PFA/PFW

6 17 1.6 48.2 34 54 44 24 2-Piping port size 4-4.5 40 50 (43.5) 42 2 1 4 3 4 Connector pin numbers 43 2-3.4 Pin name Pin No.

C95

, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 15 20 60 70 85 110 115 120 2 20 + 55 (n 2)/2 25 + 55 (n 2)/2 65 + 55 (n 4)/2 70 + 55 (n 4)/2 85 + 55 (n 4)/2 110 + 55 (n 4)/2 115 + 55 (n 4)/2 120 + 55 (n 4)/2 A59W n n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12

JXCx-OMU0004

6 24 12 6 *20%F.S.

OMU0023

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

HRX-OM-R016

Terminal no.12 Switch Terminal no. 12 11 Recommended accessory cable dia. is 0.14 to 1.5mm2 9 10 Terminal no.1 Fig. 3-7 Wiring of contact for remote signal inputsExample 3.3 Installation HRS Series 3-12 HRX-OM-R016 Chapter 3 Transport and Setting Up 3. Plug the prepared connector in to the contact input/output connector that is on the back of the thermo-chiller.

AC Servo Motor Driver (Pulse input type)

CN1 (Note 3, 5) Emergency stop Servo-on Reset Proportion control External torque limit selection Forward rotation stroke end Reverse rotation stroke end EMG SON RES 42 15 19 17 18 43 44 47 (Note 7) CN6 PC 3 1 2 MO1 Analog monitor 1 (Note 12) TL LG LSP LSN MO2 Analog monitor 2 (Note 5) Plate SD DOCOM Upper limit setting P15R 1 2m max.

AC Servo Motor Driver (CC-Link Type)

Wiring . 12 3.1 Power Supply Wiring . 12 3.2 I/O signal connection . 13 3.2.1 Connection example (Sink I/O interfaces) . 13 3.2.2 Source I/O interfaces . 14 3.3 Wiring of PLC and driver . 15 4. Parameter list (Driver side) . 17 5.

MANIFOLD ASSY, VALVE, SS3YJ3 MANIFOLD SYJ300 3/PORT, 1J, SS3YJ3 OTHER SIZE RATING, .24641 lb

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-12-16-16 ZH20DL-12-16-16 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 12 12 16 16 17 21.7 21.7 One-touch and screw-in connection Applicable tubing diameter N Applicable tubing diameter E S type: White color L type: Black color (Mounting hole) B C D E F G H Model A ZH18DS-12-03-12 ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 12 12 12 12 110 52.45 42

Special Specifications:

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 20 34 M5 female thread 1/4 female thread Note) In the case of Rc, G: 10 In the case of NPT: 3/8 Drain Drain Drain Drain guide Drain cock Auto-drain Series AFF Series AM, AMD, AMG, AMH Size Size 2B 4B A B C Note) Select in accordance with the type of

Compact Manifold Regulator

Knob Position AR425 to 935 Symbol Position Knob position Knob position Knob position Front Top Bottom 56 A B C Top Front Bottom ARX 84 42 84 70 70 AMR P 26 (Max.28) 12 U S SMC SMC H 12 SMC L O C K ARM ARM SMC 28.5 6 51.5 ARP 80 51.5 15 13 OUT IN 3 28 IR-A 13 OUT IN 15 13 OUT IN 3 3 IR 3. IN/OUT Fitting Type 2.

AC Servo Motor Driver (Pulse input type/Positioning type)

Pins CN1-3 and CN1-8 (input signals) and CN1-9 ~ CN1-12 (output signals) can be allocated in currect Sink (NPN) interface and current Source (PNP) interface wiring and I/O signal allocation. 42 - 5.5.3 Signal Allocation using Setup Software The Parameter Setting window will be displayed when parameter list is selected from the parameters menu in the setup software. Click the I/O tab.

HRX-OM-W038

Centigrade(oC) Fahrenheit(oF) 5.13 12 Changing pressure unit Pressure unit can be changed.

LECP6_C

W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 73 () 12 1. CW [CW] 2. CCW [CCW] 12 1. [] 2.

LECA6_C

S [S ] 2.S [S ] S S 1 () (0 ) (+) (+) 1 + mm (-) (-) 1 mm 1 mm/s 1 mm/s 2 1 INP mm 1 31 - mm 0mm M (0mm) 100mm 1 M (100mm) (+)(-) 1 1 +(++) 12 2 (+) SW SW SW 12 1. 2. W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 7.3 () 12 1.CW [CW] 2.CCW [CCW] 12 1. [] 2.

Series MXP Precision Air Slide Table

10 4 3 5 12 "O" ring NBR 13 Piston seal NBR Replaceable parts list (Seal kit) Bore size (mm) Part no.

LEC-T1_C

No.0 No.1 No.2 // SpeedSET MENU2 ESC TB Ver1.** / ///TB TB Ver2.** / ///TB 12 6.23 22 - (2) / TB Ver TB Ver.5.11 12 5.21 6.1 TB Ver2.1*LECPA 12 (2-1) LECPLECA INP ON ON INP OFF (2-1-a) TB Ver1.** TB Ver.5.11 Step data AX IS. Menu 1 Step data Parameter Test SET No. Step No.2 SET AX IS.

JXCx-OMT0030CN

62 . 23 63 . 24 . 25 7CN3: . 26 8CN1:IF CONT . 27 81 . 27 82 . 29 9CN2:TB/PC . 30 91 . 30 10LED . 31 101 LED . 31 102 IF LED . 31 11 . 32 111 . 32 112 . 32 113 . 32 114 . 34 12 . 35 121 . 35 122 IF IN Data . 39 123 IN Data . 39 124 OUT Data . 41 13LEC . 42 131 LEC . 42 132 . 43 14/ . 44 15/ . 45 151 . 45 152 . 46 153 . 46 2 - 154 . 48 155 . 49 156 . 49 16/ . 50 161

Series KV2 Fittings

15 24 31 42 37 41 79 100/200 100/200 100/200 100/200 100/100 100/100 100/100 50/100 ** Non-Standard Product, consult factory for lead time.