Series KP/KPQ/KPG

17 12 50 20.9 40 31.4 25 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Series KP/KPQ/KPG

17 12 50 20.9 40 31.4 25 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

KP/KPQ/KPG

17 12 25 31.4 40 20.9 50 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Vacuum System Peripherals:

17 Date issued: Photo copying this page is recommended.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

8 18.5 ASV 10.4 25.2 34.4 4 16 32 12.8 25.2 34.4 6 17 17.7 R 1/4 17 34.9 34.4 29.4 39.9 18.5 AK 34 15.2 27.2 36.4 8 18.5 36 18.5 35.3 18.3 44.5 10 21.0 Note 1) Reference dimensions Note 2) Reference dimensions of M5 and R threads after installation.

Rotary Actuator/Vane Type

[mm] Size CRB2 CRBU2 Y X Y X 10 12 (3) 10 (19) 19 (10) 3 (12) 15 15.5 11.5 20.5 6.5 20 17 13 22.5 7.5 30 19 16 26.5 8.5 40 28 17 36 9 Symbol: X5 Specifications with connection port size of sizes 10 and 15 changed to M5 The rotating angle is only 90 and 180. The vane type is compatible with single vanes only.

15

) 20 20 17 17 Weight (g) Note 1) Refer to Best Pneumatics No. 2-1 for solid state auto switch common specifications.

Fieldbus System

P. 1 P. 3 P. 9 P. 11 How to Order Specifications Parts Description Dimensions Digital Unit Unit to input or output digital (switch) signals P. 1 P. 5 P. 10 P. 12 How to Order Specifications Parts Description Dimensions Series SY (IP67) Manifold solenoid valves Analog Unit P. 17 Unit to input or output analog (voltage/current) signals P. 2 P. 7 P. 10 P. 12 How to Order Specifications

HRX-OM-X071

5.5.1 Switch to advanced setting mode . 5-17 5.5.2 Display contents of monitor menu . 5-17 5.5.3 Display contents of the standard setting menu . 5-19 5.5.4 Alarm setting menu . 5-33 5.5.5 Communication setting menu . 5-46 5.5.6 Reset menu . 5-54 5.5.7 Information Monitor Menu. 5-58 5.5.8 Alarm History menu . 5-62 Chapter 6 Option . 6-1 6.1 Option DMWith electric conductivity control function

CG1

Basic CG1DN20SCG1 20, #1 CG1DN25SCG1 25, #1 CG1DN32SCG1 32, #1 CG1DN40SCG1 40, #1 Basic CG1DN50SCG1 50, #1 CG1DN63SCG1 63, #1 CG1DN80SCG1 80, #1 CG1DN100 SCG1 100, #1 Add #7 Add #7 Basic/With Air Cushion: CG1BA With rod boot (mm) Bore (mm) l JH IJ h f JW ZZ e 20 25 32 40 50 63 80 100 27 32 38 48 59 72 59 71 55 62 62 70 78 78 80 80 16 17 17 17 17 18 10 7 30 30 35 35 40 40 52 62 (14.5) (11.5

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

AS221F-01-09 AS221F-02-06 25.3 15 34.4 6 12.8 25.2 18.2 15.2 32.4 21 21 5/16" 17 (17.5) 18.5 40.4 29.4 34.4 35.4 AS221F-02-03 AS221F-02-08 36.4 8 15.2 27.2 34.4 16 25.2 18.5 34 10.4 5/32" 32 AS221F-02-05 AS221F-02-10 43.2 10 18.5 33.9 34.2 17 18.2 24.9 36 20 21 11.4 3/16" 17 (17.5) 1/4 AS221F-02-07 AS321F-02-06 18.5 6 12.8 27.8 34.5 35.4 29.4 40.4 25.2 34 17 60 39.3 13.2 18.5 34.4 1/4" AS221F

VZ100/300/500

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A port (Pitch) (Mounting hole) (P , R port) 4-M3 x 0.5 depth 4.5 (Bracket mounting screw) Stations n L1 L2 18 304 296 19 320 312 20 336 328 17 288 280 14 241 232 15 256 248 16 272 264 13 224 216 10 176 168 11 192 184 12 208 200 9 160 152 6 112 104 7 128

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

17 12 25 31.4 40 20.9 50 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

5 Port Solenoid Valve, Series VQC

A 15 3 3 4 5 6 7 Station 5 16 17 18 19 20 SOL. B 16 SOL. A 4 Station 6 SOL. B 17 SOL. A Individual EXH spacer VVQ1000-R-1-C6 VVQ2000-R-1-C8 EXH block plate VVQ2000-19A DIN rail mounting bracket [-D] VVQ1000-57A VVQ2000-57A Silencer (EXH port) AN200-KM8 (For VQC1000) AN200-KM10 (For VQC2000) 8 5 Station 7 21 SOL. B 9 (-S) (-T) (-S) (-T) 18 22 10 SOL. A 23 6 Station 8 11 SOL.

C95

Bore size (mm) Bolt Tightening torque (Nm) Width across flats 125 M12 x 1.75 x 25l 10 30.1 160, 200 M16 x 2 x 30l 14 99 M20 x 2.5 x 35l 17 193.5 250 Foot Others M20 x 2.5 x 30l 17 6-12-42

Refrigerated Air Dryers

Signal cable outlet (Electric wire diameter 17 or less) Grommet with Heavy-duty auto drain (When symbol 5 is specified.)

Refrigerated Air Dryer

B IDFB4E to 15E A Power cable outlet 0.7 [17 mm] Grommet with membrane Signal cable outlet 0.7 [17 mm] Terminal block (Wire diameter 0.4 [9 to 11mm]) Grommet with membrane Power cable outlet 0.7 [17 mm] IDFB4E to 11E_Terminal block C D A B Terminal block Dimensions Unit: inch [mm] A B C D Model B B 9.0 [230] 2.6 [67] 7.0 [179] 1.3 [32] IDFB4E, 6E, 8E, 11E A Power cable outlet 0.7 [17 mm]

AC

Model Port size M B B A B C D P E F G H J K L 8, 1 4 1 40 53 70 75 97.5 129 165 169 11 14 18 20 40 53 70 70 40 56 73 73 17 16 17 14 30 41 50 50 27 40 54 54 22 23 26 25 5.4 6.5 8.5 8.5 8.4 8 10.5 10.5 40 53 70 70 2.3 2.3 2.3 2.3 120.5 AFD2000 AFD3000 AFD4000 AFD4000-06 4, 1 8 3 170 206 210 4 3 2 1 4, 1 8, 3 AFD2000 AFD3000 SAC2000, #1 SAC2503, #1 AFD4000 AFD4000-06 SAC4000, #1 SAC4006,

Rubber seal 5 Port Solenoid Valve Series SYJ7000

M3: 0.8 Nm 61 Series SYJ7000 Type 20: Top Proted/SS5YJ7-20Stations -00 [ ]: AC Grommet (G) Approx. 300 (Lead wire length) 6 L2 L1 4-4.5 (For mounting) 6.5 (DIN 7.8) 20.3 (DIN 21.6) 15.5 3 8 3.3 122 [126.4] 17 16.5 107.4 [111.8] B A B A B A B A B A P R R 50 25 57.3 (DIN 58.6) 56.5 (DIN 57.8) P R R 17 17 79.5 [81.7] 78.7 [80.9] 1/8 (P, R port) 1/8 (A, B port) Manual override (Pitch) P = 19

V

21 61 ASV410F-03-10S 10 R(PT)3/8 17 23.3 18.5 24 85.2 77.7 83.2 75.7 52.8 45.3 36.7 30.4 21 23 63 ASV510F-02-10S 10 R(PT)1/4 17 23.3 18.5 30 90.2 84.2 88.2 82.2 55.6 49.6 39.8 33.8 21 23 69 T H R E A D S E A L ASV510F-02-12S 12 R(PT)1/4 17 25.7 20.9 30 91.8 85.8 89.8 83.8 55.6 49.6 39.8 33.8 22 24 74 ASV510F-03-10S 10 R(PT)3/8 17 23.3 18.5 30 90.2 84.2 88.2 82.2 55.6 49.6 41.8 35.5 21 23