ZSP1

10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11 10 2-3.3 Mounting hole 16-7-4

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod End Male Thread Bore size (mm) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q

MGC

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Except deflection of guide rods ( ) 0.06 0.05 0.04 0.04 0.04 Ball bushing bearing CX Piping port size Rc 1/4 M5 x 0.8 Rc 1/8 DStandard Stroke -X Bore size (mm) Long stroke (mm) Standard stroke (mm) Model Bearing type 20JIS Symbol 20 25 32 75, 100, 125

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in3.2M5 x 0.8AS1201FG-M5-23AS1211FG-M5-23AS1301FG-M5-23AS1311FG-M5-23

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in3.2M5 x 0.8AS1201FG-M5-23AS1211FG-M5-23AS1301FG-M5-23AS1311FG-M5-23

EXxx-OMY0004

Required screws are as follows: 2 x M5 (End plate: torque = 1.5 Nm) 2 x M5 (SI Unit : torque = 1.5 Nm) 4 x M (Valve manifold: refer to valve manifold catalogue) Fig. 7-1 Required screws All manifolds are mounted using 8 screws (except VQC4000 which uses 7 screws). 25 No.EX##-OMY0004 7.1.1. Valve manifold connection Connect the valve manifold with the 2 screws on the SI Unit.

XLDV Series

Closing the valve for initial pumping and the valve for main pumping When the initial and main pumping solenoid valves are de-energized, the valve S and M will return and start sealing. 9 XL-OMM0005-A 5 Dimensions 57.6 XLDV-25 (For AC) 55.4 (For DC) 2.2 8.5 C E B 1(P) D (KF flange) Fn G M5 1(P) SUP A M5 3(R) EXE H A XLDV-40160 C C E B 8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP

Rotary Table: High Precision Type

Mounting dimension in axial directions Size Tap depth for the Tap depth for the top Bolt bottom mounting mounting 1 8 4 M4 3 8 7 M4 7 10 7 M5 20 11 7 M6 Vertical mounting body through hole Body side mounting body through hole Table 9. Mounting dimension in body side Size L Bolt 1 38 M4 3 44 M4 7 50 M5 20 59 M6 28 Piping Fig. 4 and Table 10 show port position and size.

Air Gripper for Collaborative Robots

Hexagon socket Head cap screws M4x10 Protection cover Attachments Hexagon socket Head cap screws M3x7 Air gripper JMHZ2-16D* Auto switch D-M9 Positioning pin3x6 O ring5x3x1 ISO9409-1-31.5-4-M5 Compliant Adapter plate. For opening the finger (O) Speed controller JAS-LEB04-M5 For closing the finger(S) Speed controller JAS-LEA04-M5 Hexagon socket head cap screwM4x20 5 - 3.

Air Gripper for Collaborative Robots

Hexagon socket Head cap screws M5x10 Positioning pin3x6 ISO9409-1-31.5-4-M5 Compliant Adapter plate. O ring5x3x1 For closing the finger(S) Speed controller JAS-LEA04-M5 For opening the finger (O) Speed controller JAS-LEB04-M5 Hexagon socket head cap screw M6x10 Hexagon socket head cap screwM4x20 Positioning pin5x10 Positioning pin6x10 ISO9409-1-50-4-M6 Compliant Mounting flange. 5 - 3.

Pressure Sensor

M3 M5 01 N01 R04 R06 IM5 IM5H M5 female M5 female Port size M3x0.5 M5x0.8 R1/8 NPT1/8 M5x0.8 4 6 thread, thread, through M5x0.8 reducer reducer through type (with type mounting hole) Case Resin case: PBT Fitting: C3604BD PBT Resin case: PBT Resin case: PBT Fitting: SUS303 Fitting: A6063S-T5 Material Pressure sensing section Pressure sensor: Silicon, O-ring: NBR Oil resistance vinyl cabtyre

MHF2-E

torque Nm (mm) MHF28D M3 x 0.5 0.63 4 MHF2-12D M4 x 0.7 1.5 5 MHF2-16D M5 x 0.8 3 5.5 MHF2-20D M6 x 1 5.2 6 Screw-in depth Model Bolt Max. tightening torque Nm (mm) MHF28D M2.5 x 0.45 0.36 4 MHF2-12D M3 x 0.5 0.63 5.2 MHF2-16D M4 x 0.7 1.5 MHF2-20D M5 x 0.8 3 When MHF2-8D* and MHF2-12D* are mounted body through-hole, use the attached special bolts.

rep-modular-e

x 0.8 x 8 Black Zn. chromate treatment 1 1 Rubber lining material: HNBR Cross recessed round head screw Valve spring M4 x 0.7 x 16 Nickel plating 1 4 Cross recessed round head screw Diaphragm holder M5 x 0.8 x 22 Nickel plating 1 6 Flat washer O-ring holder 10.5 x 20 x 1.2 Zinc chromate treatment 1 1 Chromate treatment Hexagon socket head plug Handle R(PT) 1/4 Nickel plating 1 2 444 AR625

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

/M5W/M5TL D-E7A/E80A 25 6 4 32 6 4 D-M5, D-M5W, D-M5TL D-E7A, D-E80A D10 15 5 10 1 pc. 2 pcs.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

/M5W/M5TL D-E7A/E80A 25 6 4 32 6 4 D-M5, D-M5W, D-M5TL D-E7A, D-E80A D10 15 5 10 1 pc. 2 pcs.

ML1C

Range (mm) No. of auto switches mounted Applicable auto switch Bore size (mm) 25 6 4 D-M5, D-M5W, D-M5T D-E7A, D-E80A Auto switch model 40 6 4 D-M5, M5W, M5T D-E7A, E80A 32 6 4 10 15 5 10 1 pc. 2 pcs.

MLGC

0.2 MPa (Horizontal with no load) 10 to 60C Ambient and fluid temperature CL1 50 to 500 mm/s Piston speed MLGC Cushion Air cushion Base cylinder lubrication Non-lube CNG Thread tolerance JIS Class 2 +1.9 +0.2 Stroke length tolerance mm MNB 0.06 0.05 0.05 0.04 Slide bearing Non-rotating accuracy Ball bushing bearing Except deflection of guide rods ( ) 0.04 0.04 0.04 0.04 CNA Cylinder port M5

Dedicated Controller

Controller model Mounting screw Mounting bracket assembly LC1-1H-N3 M3 x 0.5 LC1-1-N3 Power terminal: TB LC1-1H-N5 M5 x 0.8 LC1-1-N5 LC1-1H-L3 M3 LC1-1-L3 LC1-1H-L5 M5 LC1-1-L5 Communication connector: CN3 Motor power line connector: CN5 Mounting with T-nuts Regenerative absorption unit connector: CN6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

IR1000/2000/3000

Standard part number X1 Clean room specifications Specifications Non-grease specifications Cleanliness Bleed port Class 10 With M5 fitting (applicable tube O.D. 6) Manifold Specifications (except type IR2120 and series IR3000) 6 IR1000/2000: M5 fitting (applicable tube O.D. 6) IR3000: Rc(PT) 1/2 female thread EXH port Grease Teflon grease 2 to 8 station manifold type regulators.

MLGC

Horizontal, No load) Ambient and fluid temperature 10 to +60C MLGC 50 to 500mm/s* Piston speed Cushion Air cushion CNA Lubrication of base cylinder Non-lube Thread tolerance JIS 2nd class CB +1.9 +0.2 Tolerance of stroke length mm Non-rotating accuracy CV/MVG Slide bearing 0.06 0.05 0.05 0.04 Ball bushing bearing Deflection of guide rod is not included. 0.04 0.04 0.04 0.04 CXW Cylinder port M5