Environment

25, 32 Size Refer to page 232 for model selection.

7ND9071en

As default device is HART 6 device. Device needs to be rebooted after change 400 16 5 5.5 9.5 (14") 5 9.5 450 18 6 7.5 (16") 500 20 6 4.5 600 24 5.5 650 26 7 700 28 7 750 30 6 800 32 900 36 5.5 1) Seat supported 2) Trunnion 3) Soft seated R-valve 4) Low Cv Finetrol 5.5.12 Language selection, LANG Select between three languages EnG, GEr or FrE using the + and keys.

MU

(#1+#6+#11) MUD32SMU32, #6 (#1+#6+#11) MUD40SMU40, #6 (#1+#6+#11) MUD50SMU50, #6 (#1+#6+#11) MUD63SMU63, #6 (#1+#6+#11) (mm) Rotation() 100 90 80 80 80 ZZ 116 130 142 173 185 Z 108 120 132 159 169 RR 8 10 10 14 16 Q 125 142 159 191 207 L 17 22 27 32 38 CDH10 CX 9 11 13 16 16 CZ 18 22 26 32 32 Model MUC25, MUD25 MUC32, MUD32 MUC40, MUD40 MUC50, MUD50 MUC63, MUD63 8 10 10 14 14 +0.058 0 +0.058

Table of Contents

Piping Specifications Part N7L C6L C4L N7H C6H C4H T1 01 NPT 1/8 M5 x 0.8 R 1/8 M5 x 0.8 Port size One-touch fitting Straight type 4 mm 5/32 inch 1/4 inch 6 mm One-touch fitting Elbow type 4 mm 5/32 inch 1/4 inch 6 mm Sensor pressure receiving area: Silicon, Piping port: C3602 (Electroless nickel plated), O-ring: HNBR Wetted part material O-ring: NBR, fitting: PBT O-ring: NBR With lead

SMC Wireless System PROFINET compatible

to the operation manual for the digital and analogue unit. information. (6)-1 Short-circuited power supply voltage for control and input (US1). (6)-2 Short-circuited power supply voltage (7) Replace the valve and check the operation. for output (US2). (6)-3 Short-circuited output load (6)-4 Analogue I/O upper and lower set limit exceeded (6)-5 Analogue Input range upper and lower limit exceeded

CV/MVGQ

32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 6 7 7 11 11 9 9 11.5 13.5 13.5 40 45 50 65 75 86 83 83 84 85 138 144 166 204 212 3.2 3.2 3.2 4.5 6 42 50 59 76 92 70 80 93 116 133 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 8 11 11 13 16 Up to 600 601 to 1000 Up to 600 601 to 1000 Up to 750 751 to 1000 Up to 750 751 to 1000 Bore

MY1

-X417 Fine stroke adjustment range (mm) -X417 (one side) Adjustment range MY1MW MY1CW -X416 (one side) Adjustment range Slider (Piston yoke) Stroke adjusting unit Bore size (mm) Spacer lengths Spacer length MY1MW MY1CW 5.6 to 11.2 6 to 12 11.5 to 23 12 to 24 16 to 32 20 to 40 25 to 50 11.2 12 23 24 32 40 50 5.6 6 11.5 12 16 20 25 11.2 to 16.8 12 to 18 23 to 34.5 24 to 36 32 to 48 40 to 60

HRX-OM-X071

T1, T2Inverter pump . 6-2 6.4 Option YWith feet / Without rack mounting brackets . 6-3 6.4.1 Option YWith feet / Without rack mounting brackets . 6-3 6.4.2 Anti-quake bracket (Optional Accessories) . 6-4 6.5 Option Z . 6-5 6.5.1 Option Z. 6-5 6.5.2 Option Z1. 6-5 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm Buzzer Stop . 7-3 7.3 Troubleshooting

Plate Cylinder

17 22 27 32 38 CJ 7 10 10 14 16 DA 53 67 85 103 122 DB 23 27 31 37 48 DDH10 DE 3.5 3.5 3.5 5.5 6 DF 4 7 10 12 14 DH 11 13 13 17 19 DI 17 22 27 32 38 DJ 7 10 10 14 16 Part no.

Stroke Reading Cylinder and Counter

Operating Range (mm) Auto switch model Bore size (mm) 9.5 9.5 11.5 12 20 32 40 50 63 D-A9(V) 7 9 9.5 D-M9(V) D-M9W(V) D-M9A(V) 2.5 4 6 6 6 6.5 D-A7(H)(C) D-A80(H)(C) 9.5 12 12 11 10 12 D-A79W 11.5 13 13 14 14 16 D-F7(V) D-J79(C) D-F7W(V) D-F7BA(V) D-F7NT D-F79F 4 5.5 6 6 6 6.5 D-X Since the operating range is provided as a guideline including hysteresis, it cannot be guaranteed (assuming

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

6 !9 !5 @1 !3 !0 !1 80, 100 80, 100 @2 Component Parts Replacement Parts/Seal Kit (Single rod) Bore size [mm] Kit no. Contents 32 CK95-32 No.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

(mm) Auto switch model Bore size Bore size Auto switch model 20 to 32 40 to 80 63 80 D-A9/A9V 20 25 32 40 50 8 9.5 8 8 8.5 9.5 9.5 D-A9/A9V D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL Note) q BMP1-032 w BMG2-012 D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL BMY3-016 4.5 4.5 5 5 5 6.5 6 D-Z7/Z80 D-Z7/Z80 D-Y5/Y7P D-Y7W D-Y6/Y7PV D-Y7WV D-Y7BAL 10 10 11 13 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL q BMP1-032 6 5 6

44

H2 H1 1/8" (3.18) 0.086" (2.18) KFG2F0122-N02 25 8 1/4 26.7 17.2 5 1.5 1.1 17 d KDM 0.098" (2.5) 5/32" (4) KFG2F0325-N02 23 8 1/4 26.7 17.2 5 1.8 1.6 17 KB 1/4" (6.35) 5/32" (3.95) M L2 L1 KFG2F0704-N02 28 12 1/4 27.5 16.3 6 3.3 6 17 KR 5/16" (8) 0.236" (6) KFG2F0906-N03 32 14 3/8 29.4 17 6.6 5.3 17 19 Applicable tubing KA 3/8" (9.53) 1/4" (6.35) KFG2F1163-N03 38 17 3/8 30.5 16.1 7.6 5.6

Free Mount Cylinder for Vacuum Series ZCUK

(mm) DQ HQ HP Model Applicable pad model Note) ZPU-X11 ZC(D)UKD10 ZC(D)UKR10 SP 4 6 8 10 13 16 20 25 32 40 50 10 16 25 40 6 8 10 13 16 20 25 32 40 50 12 18 32 13 7 32 13 9 12 15 18 31 12 2. 6 26 10 2. 6 31 12 4. 8 26 10 4. 8 31 12 7 26 10 7 31 12 9 26 10 9 12 15 18 ZCUK DQ HQ HP AMJ ZP ZC(D)UKD16 ZC(D)UKR16 AMV DQ HQ HP ZC(D)UKD20 ZC(D)UKR20 ZP 53 15 36 16 37 28 20 44 43 29 16 37 53 38

0.4

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

4/5 Port Air Operated Valve Series SYJA3000

46.5 1/8 33.5 M5 x 0.8 (Piping port) (Piping port) With fiflter (80 mesh) 21.5 R1 P 8.5 6 6 2-1.8 (Bleed port) 17 17 15 R2 21 With fiflter (80 mesh) 24 32 45.5 3 position closed center/exhaust center/pressure center SYJA5 20-M5 3 position closed center/exhaust center/pressure center SYJA5 40-01 3 4 5 3 4 5 28 2-4.3 2-M5 x 0.8 2-M5 x 0.8 37.5 23 (Pilot port) (For mounting) (Pilot port) A

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 17.5 15 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20.5 20 7 32 5 M5 x 0.8 M3 x 0.5 11 32 10 3 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 Rc1/8 M4 x 0.7 20.4 39 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 15 17.5 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 M4 x 0.7 20.4 39 Rc1/8 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(D, Y) Manual override (Non-locking) Double Single VK 197.5 (3 position: 226.5) Y: 217.5 (3 position: 246.5) D: 218.5 (3 position: 247.5) 218.5 (3 position: 247.5) Y: 108.5 (3 position: 123) D: 109.5 (3 position: 124) (3 position: 124) (3 position: 113.5) VZ (Pitch) (Mounting hole) VF 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) (With individual EXH

Air Cylinder NCA1 Series

: 1-12 65 : M5 x 0.8 93 : M30 x 3.5 05 : 5-40 33 : 1 1/8-7 66 : M6 x 0.75 94 : M36 x 4.0 06 : 5-44 34 : 1 1/8-12 67 : M6 x 1.0 95 : M16 x 1.25 07 : 6-32 35 : 1 1/4-7 68 : M8 x 1.0 96 : M36 x 1.5 08 : 6-40 36 : 1 1/4-12 69 : M8 x 1.25 97 : M36 x 2.0 09 : 8-32 37 : 1 3/8-6 70 : M10 x 1.25 10 : 8-36 38 : 1 3/8-12 71 : M10 x 1.5 11 : 10-24 39 : 1-14 72 : M12 x 1.5 12 : 10-32 40 : 1 1/2-16 73