HRX-OM-M005

Table 7-1 Water Quality Standards Substance Facility water Circulating water spec. spec. pH (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 Sulfate ion (mgSO42-/L) Max. 200 Max.50 Acid consumption (pH4.8) (mgCaCO3/L) Max. 100 Max.50 Total hardness (mgCaCO3/L) Max. 200 Max.70 Calcium hardness (mgCaCO3/L) Max. 150

A_HEC-OM-I009

Controller internal circuit 5 6 Excessive temp. increase Controller internal circuit Detects temp. input value not less than 70 C. Excessive temp. decrease Detects temp. input value not more than 0 C. Controller internal circuit 7 Works when temp. change is smaller than over load detection temp.

ITV

80 90 1.0 100 80 60 40 20 50 100 150 Flow rate (l/min(ANR)) VAC side pressure (supply pressure) (kPa) 1.12-13 Series ITV209l Dimensions ITV2090 Note) Do not attempt to rotate the cable connector, as it does not turn.

AFF

P.70 X26 X12 Port size Option 2 Size Applicable body size 37B 75B Symbol Description Symbol Nil 10 14 20 1 J Drain guide female threaded 4 1 4 1 1 2 2 R IN-OUT reversal direction T With element service indicator Accessory 4 Drain piping and piping for a stop valve such as ball valve are required.

VCB

107 VCB41 30 50 94 1/2 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 17-2-27

VCB

74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5 41 102 60 8 35 119 70 86.5 103 86.5 48 96 26 3/4 4 Series VCB Model Selection VCB (for heated water) 2 port solenoid valve Class Orifice size mm Model Material Port size Body Seal 4 3 2 7 5 10 1/8 (6A) 2 1/4 (8A) VCB (for heated water) 2 port solenoid valve 1/

Shock Absorber RJ Series

6 x 0.75 O.D. thread size (mm) 8 x 1 10 x 1 14 x 1.5 20 x 1.5 27 x 1.5 4 Stroke (mm) 6 7 12 15 25 0.05 to 1 0.05 to 2 0.05 to 1 0.05 to 2 0.05 to 1 0.05 to 1.5 0.05 to 1 0.05 to 2 0.05 to 1 0.05 to 2 0.05 to 1 Collision speed (m/s) 80 80 70 45 25 10 Max. operating frequency (cycle/min) Note) Extended 1.3 2.8 5.4 6.4 14.1 14.7 Spring force (N) Compressed 3.9 5.4 8.4 17.4 29.1 34.4 150 245

0.55

Gasket VF1000 VF3000 VF5000 DXT144-13-3A Round head combination screw VF1000 DXT144-12-2 DXT031-44-1 DXT031-38-5A VF3000 DXT155-25-7 (M4 x 39.5, With spring washer) VF5000-70-1A Hexagon socket head cap screw VF5000 AXT620-32-1 DXT156-9-6 (M4 x 48, With spring washer) Individual EXH spacer assembly Caution Tightening Torque for Mounting Screw M4: 1.03 lbfft (1.4 Nm) Warning When mounting a

Vacuum Gripper

The flow rate characteristics correspond to the standard supply pressure (0.5MPa). -90 -80 -70 Vacuum pressure [kPa] -60 -50 -40 -30 -20 -10 0 0 5 10 15 20 25 Suction flow [L/min(ANR)] Flow rate characteristics Exhaust characteristics * The actual suction flow at the point of suction varies depending on the piping conditions to the vacuum port.

Vacuum Gripper

The flow rate characteristics correspond to the standard supply pressure (0.5MPa). -90 -80 -70 Vacuum pressure [kPa] -60 -50 -40 -30 -20 -10 0 0 5 10 15 20 25 Suction flow [L/min(ANR)] Flow rate characteristics Exhaust characteristics * The actual suction flow at the point of suction varies depending on the piping conditions to the vacuum port.

Vacuum Gripper

The flow rate characteristics correspond to the standard supply pressure (0.5MPa). -90 -80 -70 Vacuum pressure [kPa] -60 -50 -40 -30 -20 -10 0 0 5 10 15 20 25 Suction flow [L/min(ANR)] Flow rate characteristics Exhaust characteristics * The actual suction flow at the point of suction varies depending on the piping conditions to the vacuum port.

Vacuum gripper

The flow rate characteristics correspond to the standard supply pressure (0.5MPa). -90 -80 -70 Vacuum pressure [kPa] -60 -50 -40 -30 -20 -10 0 0 5 10 15 20 25 Suction flow [L/min(ANR)] Flow rate characteristics Exhaust characteristics * The actual suction flow at the point of suction varies depending on the piping conditions to the vacuum port.

Digital Pressure Switch ( compatible)

. 0x0024 (37) 0 R Device detailed state parameter Refer to "Device detail status parameters" on page 70. 0x0025 (40) 0 R Process data input The latest value of process data can be read. 0x0028 1: R: Read, W: Wright System command (index 2) In the ISDU index 0x002 SystemCommand (system command), the command shown in the table below will be issued.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

GA1 Cushion valve Cushion valve H1 D IA FY I B W Width across flats E Air release Air release Effective thread GB3 FT GA3 4-FD NA NB A K F S + Stroke FX 3 H ZZ + Stroke FZ (mm) Bore size (mm) Stroke range (mm) Effective thread length (mm) A B B1 B2 D E F FD FT FX FY FZ GA1 GA2 GA3 GB1 GB2 20 18 38 13 26 10 8 16 7 6 51 21 68 10 12 12 8 10 25 to 300 15.5 25 22 44 17 32 12 10 16 7 9 53 27 70

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5 41 102 60 8 35 119 70 86.5 103 86.5 48 96 26 3/4 4 Direct Operated 2 Port for Heated Water Series VCB Model Selection VCB (for heated water) 2 port solenoid valve Class Orifice size mm Model Material Port size Body Seal 4 3 2 7 5 10 1/8 (6A) 2 1/4 (8A) VCB (for

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note

D. P. Lube ALD600/900 Series

D OUT OUT IN E 2 x A (Port size) F SMC J C H 4 x K Bracket mounting thread A C D E F G H J K Model AF30-02 to 03-X2230 AF40-02 to 04-X2230 AF40-06-X2230 AF50-06 to 10-X2230 AF60-10-X2230 57 118 Rc 1/4, 3/8 Rc 1/4, 3/8, 1/2 Rc 3/4 Rc 3/4, 1 Rc 1 M4 x 0.7 x 0.5 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 44 35 53 14 53 258 245 169 165 78 73 60 60 63 59 47 47 73 73 95 90 70 70 24 24 20 18 95 90 75 70 1056

AR Series Modular Type Regulator

100 33.5 34.5 M52 x 1.5 34.5 42.5 72 42.5 72 50 38 54 8.5 26.5 70 2.3 38.4 52.5 26 7 AR40-06-A 3/4 1/8 75 101.5 33.5 34.5 M52 x 1.5 34.5 42.5 72 42.5 72 50 38 55.5 8.5 26.5 70 2.3 39.9 52.5 26 7 Note) Note) The dimension of B is the length when the filter regulator knob is unlocked. 455 Regulator/AR20-A to AR40-06-A Made to Order Please contact SMC for detailed dimensions, specifications

CE2

46 21 52 24 20 28.5 10 40 10 12 162.5 17 27 59 13 11 M8 x 1.25 9 11 32 25 to 800 25 to 650 60 35 98.5 27 85 48.5 23 64 24 20 28.5 13 40 10 15 174 17 26 67 18 11 M10 x 1.25 9 13.5 32 25 to 750 25 to 600 70 40 117.5 32 102 55 23 78 26.5 25 36 15 52 14 17 189 21 30 72 23 13 M12 x 1.75 11 16.5 37 25 to 750 25 to 600 80 40 131.5 41 116 56.5 25 92 35.5 30 36 15 52 14 19 198 21 31 76 25 16 M12

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note