EXxx-OMW0014CN

(EX245-DY1) 5.

IIIIIIIIII

F-4200-.5 F-4200-2 F-4200-5 F-4200-15 F-4200-30 F-4200-60 F-4200-100 .05 .2 .5 .5 .5 .5 1 .5 2 5 15 30 60 100 15 30 30 45 60 120 120 .05 .1 .4 1.0 1.8 3.5 3.5 .15 .3 .8 1.6 2.4 5.0 7.5 3A 10A 10A 10A 10A 10A 10A Wetted materials For special deadband or current requirements, contact factory See Appendix A F-4200BARBED FITTING SPECIAL OPTIONS RANGE (PSI) MOUNTING STYLE B80 = NYLON 1/16" ID

JXCx-OMT0005CN

JXCD1 PLC OFFON 6-7 3 0-7 Byte4-7 Byte 0.01[mm] *5 800.00[mm]80d=13880h 4Byte = 80h 5Byte = 38h 6Byte = 01h 7Byte = 00h 4 5 6 7 Byte8,9 Byte 1[mm/s] *5 300[mm/s]300d=012Ch 8Byte = 2Ch 9Byte = 01h 8 9 *5 21(P.85 35 - Byte10,11: Byte 10 1[%] *5 11 Byte12-15 Byte 12 0.01[mm] *5 800.00[mm]80d=13880h 12Byte = 80h 13Byte = 38h 14Byte = 01h 15Byte = 00h 13 14 15 Byte16-19 Byte

CQM

5 !6 !

Cylinder

> I A, ' Y.POO6 I 6 5 6 3g 040 112 3,5 M3XQ,5 5 3 5 I ~POO6 6 5 6 I 3 I-g040 112 3,5 M3 x Q,5 5 3 5 1 4 -1 -11'(51.0,1 '10 $,~ ~o ! 5+ g"'" 116 5:5 M4XO,7 YPOIO , '10 6.S 10 sg04I 16 5.5I M,4 XQ,7 71' 5 a 6.3 7 I 5 a 1 6.3 YP015 I 15 7 12 ~-g.048 19 7 M5XO,a 9 I 6 10 ,7.8 10 7,a ...!:!'.015 l 15 7 12 6 -g~ 19 9 I 6 7 M5 x O.B . ~I ~--~~ K ~~ P~ ' ~k I -TFunnion Pin' . , nue ' :e In .

SFOD-OMT0005CN

2) LEC-T1-3G *1 *2 http://www.smcworld.com/ 5(P.23) 16(P.68) USB LAN -8- 2.4 () (1) (JXC-CPW) (JXC91-) 1 (JXC-CPW) 1 *1 1 *1 [] (:LEC-T1-3G) (LEC-W2) (USB ) (: P5062-5) (2) 3.4 (P.16) (3) 4.1 (IP )(P.18) (4)PLC PLC (5) 5.

EXxx-OMN0029CN

g 1 -27No.EX-OMN0029CN-D -28No.EX-OMN0029CN-D EX600-ED D DIN 2 DIN 2 M12(5 ) 3 DIN (SY ) 3 7/8 (5 ) EX600-ED2EX600-ED3No. 1 / 2 3 DIN DIN 4 F.E. 5 () -29No.EX-OMN0029CN-D (1)EX600-ED21 24 V() 2 0 V() 3 24 V() 4 0 V() 5 FE (2)EX600-ED31 0 V() 2 0 V() 3 FE 4 24 V() 5 24 V() 2 SI IP67 -30No.EX-OMN0029CN-D EX600-ED2EX600-ED3M12(5 ) 7/8 (5 ) () DC24 V 10 Class22 A DC24 V 108 A () DC24

EXxx-OMS0026CN

g 1 -25No.EX-OMS0026CN -26No.EX-OMS0026CN EX600-ED D DIN 2 DIN (SY ) 2 M12(5 ) 3 DIN (SY ) 3 7/8 (5 ) EX600-ED2EX600-ED3No. 1 / 2 3 DIN DIN 4 FE 5 () -27No.EX-OMS0026CN (1)EX600-ED21 24 V() 2 0 V() 3 24 V() 4 0 V() 5 FE (2)EX600-ED31 0 V() 2 0 V() 3 FE 4 24 V() 5 24 V() 2 SI IP67 -28No.EX-OMS0026CN EX600-ED2EX600-ED3M12(5 ) 7/8 (5 ) ( DC24 V 10 Class22 A DC24 V 108 A ( DC24

EXxx-OMQ0015CN

g : -19No.EX-OMQ0015CN -20No.EX-OMQ0015CN EX600-ED D DIN 2 DIN (SY ) 2 M12(5 ) 3 DIN (SY ) 3 7/8 (5 ) EX600-ED2EX600-ED3No. 1 / 2 3 DIN DIN 4 FE 5 () -21No.EX-OMQ0015CN (1)EX600-ED21 24V() 2 0V() 3 24V() 4 0V() 5 FE (2)EX600-ED31 0V() 2 0V() 3 FE 4 24V() 5 24V() 2 2 SI IP67 -22No.EX-OMQ0015CN EX600-ED2EX600-ED3M12(5 ) 7/8 (5 ) DC24 V10 Class22 A DC24 V108 A DC24 V+10/-5 Class22

OMU0023

CR 17 LF (iii) Irregular response Example 1 Start code 2 ID 0 Controller ID: 1 3 1 4 Function code 8 Function code & MSB + 1 = "85h" 5 5 6 Error code 0 Error code = "01h" 7 1 Calculated 8 value Checksum(LRC) 9 Calculated value 10 End code CR 11 LF 24 - (5) 06h Write data to a single holding register address Function code used to set a single Step Data parameter.

EXxx-OMN0037CN

21 79E8 79E8 31208 10 5 20 3CF4 3CF4 15604 5 2.5 10 0 0 0 0 0 0 BCF4 C30C -15604 -5 -2.5 -10 F9E8 8618 -31208 -10 -5 -20 F 8000 -32767 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB -23No.EX-OMN0037CN-A -24No.EX-OMN0037CN-A EX600-AY A M12 (5 )2 2 M12 (4 ) No. 1 LED 2 () 3 4

Direct Solenoid

(5), Bottom Ports (5) 05 = Mounted oo Individual Subplate 1'NPTFSidsPorts(5) 06 = Mounted on lndividual Subplate 3/4" NPTF Side Ports (5) DIRECTIO}IAL AIR VALVES DIMENSIONS/PARTS LIST NVS424, NVS *u, orro, 41.*,41M t!.

IDX-OM-M051

Remove the side panel and the plug 5 in the body, and open the stop valve 4. 4. Be sure to mount the plug 5 after draining the water, and close the stop valve 4 in the body. 5. Return the panel to the original position. 4. Stop valve in the body 5. Plug 4. Stop valve in the body Automatic fluid filling valve 5. Plug 2. 3.

EXxx-OMU0020CN

HW ConfigEX245-SPN1 HW Config Module information 1 . 5-1 1 US2 DiagnosisEnable /(US2)2 EX245-DX147 39 No.EX-OMU0020CN Module information (General) . 5-2General (IO Device Diagnostics) . 5-3IO Device Diagnostics 40 No.EX-OMU0020CN 2 . 5-4 2 EX245-SPN1 1 3 EX245-SPN1 1 Module information (Communication Diagnostics) . 5-5 Communication Diagnostics 41 No.EX-OMU0020CN 3 . 5-6 Communication

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

EXxx-OMZ0016

Problem 5 Red Green Alternate Flashing OFF Red Flashing W-MS W-MS LED does not turn on green.

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M14 K 1.5 '5, 1->"14",5' 18 1M16xl.5 15 17 1M) Up to 1000 ' 50 47 157 126 160 281 17 36 ::1 36 ~~ 72 :.g;' 32 ' 71 43 15"" 'l7 15 20 160 Up to 1200 56 53 I 177 144 180 32 1'00 20 40 j~ 40 :g l 80 .2, 38 78.S 42 (mm) H Z ZZ f h , Bpre sige ' K K-A' 'L ' MM N P 5 U RR WithoUt ron-:bO'O't . ,.. ,', 'i":"WitH rod boot """ , ii' ', J!

Wireless System

Description 73.6 1 24 V (for output) 56.6 2 1 2 0 V (for output) 3 24 V (for control/input) 5 30.2 4 0 V (for control/input) 4 3 13.2 5 FE EX600-ED3 42.5 5.5 26 20.5 8 106 90 30.35 Power supply connector PWR: 7/8 inch 5-pin plug 56.6 Configuration Pin no.

Compact Type Dual-Rod Cylinder Series CXSJ

2 @4 @5 !5 t !5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

HRX-OM-W069

. 807Eh 2 3 Perform (6) for 2nd value (0006h) and then, perform (5). 2280h 4 Perform (6) for 3rd. value (0h) and then, perform (5).