Air Suction Filter With One-touch Fittings Series ZFB 1

Air suction filter with One-touch fittings Applicable model Size Symbol Tubing size 04 ZFB100 ZFB100 ZFB200 ZFB200 ZFB300 ZFB300 10 4 Basic type Metric size Inch size 06 6 Flow (l/min (ANR)) MAX.20 MAX.50 MAX.75 Symbol 100 200 300 Tubing size Metric size JIS Symbol 08 8 Release button: Blue 10 3 16 05 101 201 301 401 ZFB101 ZFB101 ZFB201 ZFB301 ZFB401 " MAX.20 MAX.30 MAX.60 MAX.100 Metric

NCQ8

OUT IN Theoretical Output Table Unit: lbs Bore size (in) Operating direction Operating pressure/PSI (MPa) 45 (0.3) 75 (0.5) 145 (1.0) 200 (1.4) IN 8.87 14.6 28.6 39.2 056 (9/16") OUT 11.1 18.2 35.7 48.9 IN 16.4 27.0 52.9 72.5 075 (3/4") OUT 19.9 32.7 64.1 87.8 IN 30.8 50.8 99.5 136 106 (1-1/16") OUT 39.7 65.3 128 175 IN 65.7 108 212 290 150 (1-1/2") OUT 79.5 131 256 351 IN 121 200 391 536

Thermo-chiller/Rack Mount Type

0.9/1.1 (1.1/1.1) 1.0/1.3 (1.2/1.3) 0.9/1.0 (1.1/1.0) 1.1/1.1 (1.2/1.1) Communication function Contact input/output, Serial RS-485/RS-232C Noise level (50/60 Hz)9 [dB] 59/60 59/60 59/60 59/60 Accessories19 Power supply connector, Particle filter element and maintenance handle20, Operation manual Weight10 [kg] 41 40 Rated power consumption18 1 No condensation should be present.

60

Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz Connector Refer to the Table (3) shown below for availability.

HRS100/150

Note 1) C 5 to 35 Cooling capacity 50/60 Hz Note 3) kW 9.0/9.5 13.0/14.5 Heating capacity 50/60 Hz Note 4) kW 1.7/2.2 2.5/3.0 Temperature stability Note 5) C 1.0 Circulating fluid system Rated flow 50/60 Hz (Outlet) Note 6) L/min 42/56 Maximum flow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating flow rate 50/60 Hz Note 7) L/min 28/42 Tank capacity L 18 Circulating fluid

33

Hz 230 VAC 50/60 Hz 191 Thermo-chiller Basic Type HRSE Series Circulating Fluid Temperature Controller Simple function and performance Cooling capacity 1.2, 1.6, 2.2 kW (60 Hz) Power supply 100/200 VAC (50/60 Hz) 230 VAC (50/60 Hz) Triple control Compressor, fan and electronic control valve can be controlled depending on the heat load from the user s equipment.

MHK2

30 30 60 0.3 MPa 0.4 MPa 40 0.5 MPa 0.6 MPa 20 20 40 0.6 MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

MHK2

30 30 60 0.3 MPa 0.4 MPa 40 0.5 MPa 0.6 MPa 20 20 40 0.6 MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

Wedge Cam Operation Provides

10 20 30 40 50 60 Holding point L(mm) Holding point L(mm) MHK2-20D MHK2-20D 80 60 70 Pressure 0.6MPa Pressure 0.6MPa 50 60 Holding force (N) Holding force (N) 50 40 0.5MPa 0.5MPa 40 30 0.4MPa 0.4MPa 30 20 0.3MPa 0.3MPa 20 10 10 0.2MPa 0.2MPa 0 0 20 40 60 80 20 40 60 80 Holding point L(mm) Holding point L(mm) MHK2-25D MHK2-25D 100 120 Pressure 0.6MPa 80 100 Holding force (N) Holding force

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

MPa 0.4 MPa 0.5 MPa 0.6 MPa 30 30 60 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 40 D20 20 40 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

energy saving effect

Hz) -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) Set temp. range 5 to 35C Set temp. range 5 to 35C Set temp. range 5 to 35C Temp. stability 0.1C Temp. stability 0.1C Temp. stability 0.1C Piping conversion

VZS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VZS3000 Rc 1 4 VZS With surge voltage suppressor (FS) Single Double 3 position (Closed center) Page VFS (Standard) 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 24 VDC 3-7-23 3 position closed center VS4 2.4 2.4 VQ7 (Option) 24 VAC, 50/60 Hz 48 VAC, 50/60 Hz 110

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

(S2) 200 to 230 VAC encoder) Absolute Power supply voltage 50/60 Hz AC servo motor (S7) AC servo motor (S3) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz AC servo motor (S6) 100 to 120 VAC Pulse input type 50/60 Hz AC servo motor (S7) (For absolute AC servo motor (S6) 200 to 230 VAC encoder) 50/60 Hz AC servo motor (S7) Dimensions LECSA 2 x 6 Mounting hole 40 135 (Bearing surface

Thermo-con/Rack Mount Type

60 Hz) Reduces pump maintenance time (Maintenance-free pump) A mechanical sealless magnet pump is used.

10

20 56 76 280 MHL2-10D1Z 40 40 78 118 355 10 MHL2-10D2Z 60 96 156 430 MHL2-16DZ 60 30 68 98 525 MHL2-16D1Z 40 60 110 170 725 16 MHL2-16D2Z 80 130 210 845 MHL2-20DZ 60 40 82 122 940 MHL2-20D1Z 40 80 142 222 1335 20 Symbol MHL2-20D2Z 100 162 262 1520 Double acting: External grip Double acting: Internal grip MHL2-25DZ 60 50 100 150 1565 MHL2-25D1Z 40 100 182 282 2295 25 MHL2-25D2Z 120 200 320

Pneumatic Purification

1/2 80 17.7 21.2 31.4 2.1 13.5 17.7 17.7 PFE8-S 30 3/4 100 115/1/60 17.7 21.2 31.4 2.1 13.5 17.7 PFE10-S 39 3/4 105 17.7 115/1/60 17.7 21.2 31.4 2.1 13.5 17.7 PFE15-S 64 3/4 110 17.7 115/1/60 PFE20-S 81 1 115 17.7 21.2 31.4 2.1 13.5 17.7 17.7 115/1/60 PFE30-S 109 1 152 21.2 26.3 36.4 2.7 15.3 28.3 21.6 230//1/60 PFE40-S 152 1-1/4 198 23.0 32.2 45.6 4.5 15.3 35.6 27.9 230//1/60 230//1/60

240

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

VXZ

PA 02 200 VAC 50/60 Hz 01 100 VAC 50/60 Hz 08 48 VAC 50/60 Hz 01 02 03 04 07 08 05 06 002 Applicable valve model No. 13 24 VAC 50/60 Hz VXZ22 VXZ23 03 110 VAC 50/60 Hz 23 440 VAC 50/60 Hz PAX 003 AC 04 220 VAC 50/60 Hz 51 6 VDC Coil combination code 05 24 VDC 53 48 VDC PB 06 12 VDC 55 100 VDC 56 110 VDC (Refer to the table below.) 07 240 VAC 50/60 Hz DC Note) The voltage codes

IIIIIIIIII

PP-700-5 PP-700-15 PP-700-30 PP-700-60 PP-700-100 1 1 1 3 5 5 15 30 60 100 30 60 60 120 120 0.2 0.3 0.3 0.5 0.7 0.4 0.6 1.0 2.0 3.5 PPMOUNTING STYLE BARBED FITTING (FM & PM ONLY) VALVE FUNCTION RANGE (PSI) FM = FLUSH MOUNT PM = PANEL MOUNT PT = PIPE THREAD MM = MANIFOLD B80 = NYLON 1/16" I.D. TUBE B85 = NYLON 1/8" I.D.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

For the wiring to power supply terminal, refer to back page 9. 26 Series SJ2000/3000 PC Wiring System with Power Supply Terminal Plug-in Connector Type How to Order Solenoid Valves SJ 3 1 U 60 C6 5 C Standard SJ 3 1 C Z J 60 C6 5 With switch Individual wiring SJ 3 1 Z 60 C6 5 M Note 1) [For plug-in mixed mounting] Single solenoid wiring spec.