PC Wiring System Series PCW

4 2 6 10 8 14 12 16 34 20 18 24 22 26 30 28 32 36 40 38 Input/output connector (CS0) 3 1 5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3 2 1

Modular F.R.L. Unit

AD38 AD38NNote 5) AD48 AD48NNote 5) AD48 AD48NNote 5) Float type Note 4) auto drain N.C. AD27 AD37 AD37NNote 5) AD47 AD47NNote 5) AD47 AD47NNote 5) With back flow mechanism Filter regulator Note 1) Assembly includes a bracket and set nuts. Note 2) in part numbers for a round pressure gauge indicates a type of connection thread.

Air Catch Sensor

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

Prevents Micro-Bubbles

Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5 5 19, 3/4" 19, 3/4" TI/ TIL How to Order Valve PA LVC 2 0 S07 A PAX Option PB Body class Nil 1 4 None With flow rate adjustment

CYV

5 !1 !9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

Modular Type Lubricators Series AL

Note 5) Note 5) Note 5) Note 5) Note 5) Note 1) Option B is not assembled and supplied loose at the time of shipment.

Tube One Touch Fitting FMW-4200-100-FM-OT1 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting FMW-4200-2-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting FMW-4200-100-FM-OT1 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting FMW-4200-2-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting FMW-4200-100-FM-OT1 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting FMW-4200-2-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D.

Air Cylinder CP Series Cylinder Positioner Assembly

I n e zz 1 3 8 (35) 170) 2 0 5 (52) 0.79 l2D) 140) 0.39 ( 1 0 ) 3.94 (100) r 5 0 (38) (62) 1.38 (35) 0.43 ( 1 1 ) M l 8 i 1 . 5 I 1 8 (30) 1.22 ( 3 1 ) 3.4 (90) 2 2 4 (58) 6 2 6 1159) 2.05 (s2) 11.2) 2.60 166) s T o 6 5 7 (167) 1 3 8 (35) 3.35 (85) 2 5 2 (64) 0.79 l2D) 1.57 (40) 0.39 (10) 3.94 (100) 1.50 (38) 2.44 (62) 1.38 (35) 0.55 (14) M 1 8 x l 5 1.22 ( 3 r ) 1.22 ( 3 1 ) 3.86 (s8) 2.24

MHF2

Gripping force N Gripping force N 150 0.5MPa 0.5MPa 80 120 0.4MPa 0.4MPa 60 90 0.3MPa 0.3MPa 40 0.2MPa 60 0.2MPa 20 30 100 0 80 60 40 20 80 60 40 20 0 100 Gripping point L mm Gripping point L mm 12-3-5 6 Series MHF2 Model Selection Effective Gripping Force: Series MHF2 Step 2 External Gripping Internal Gripping The air gripper should be operated so that the amount of overhang "H" will stay

MHF2

Gripping force N Gripping force N 150 0.5MPa 0.5MPa 80 120 0.4MPa 0.4MPa 60 90 0.3MPa 0.3MPa 40 0.2MPa 60 0.2MPa 20 30 100 0 80 60 40 20 0 80 60 40 20 100 Gripping point L mm Gripping point L mm 12-3-5 6 Series MHF2 Model Selection Effective Gripping Force: Series MHF2 Step 2 External Gripping Internal Gripping The air gripper should be operated so that the amount of overhang "H" will stay

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

173 4 51.5 59.5 87.5 98 5 62 70 100 110.5 6 72.5 80.5 100 110.5 7 83 91 112.5 123 8 93.5 101.5 125 135.5 3 41 49 75 85.5 L1 L2 L3 L4 1.12-20 VQZ1000/2000/3000 Body Ported VQZ2000 (35) (5.5) 44.5 Mounting holes VV5QZ22 C 28 (11) Station 20 (7.5) DIN rail clamp screw n-C4, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread Grommet (G) U side n Manual override 5

EXxx-OMY0006CN

0 10 msec 0 1 1 50 msec 1 0 0 100 msec 1 0 1 1 sec 1 1 0 5 sec 1 1 1 Bit 7 Ch0/4(0) 0 3 msec 1 5 msec *1oo1 ChN/ChN+4 Table 10-12 Safety Mode (Module Passivation/xxx)Byte5Ch1/5(0) Bit 1 Bit 0 Ch1/5(1) 0 0 Disable 0 1 1oo1 (Input 1, 5) * 1 0 1oo2 2-channel equivalent 1 1 1oo2 , 2-channel non-equivalent Bit 3 Bit 2 Ch1/51 0 0 Input1UT1 Input5UT2 0 1 Input1 & 5UT1 1 0 Input1 & 5UT2 1 1

Modular F.R.L. Unit

Features 5 Feature 6 F.R.L.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

MTS Cylinder: CYV32-100 Workpiece weight: 5 kg Average speed: 100 mm/s Measurement environment: Operation in the atmosphere after baking at 150C for 48 hours. Leakage [Pam3/sec] 10-8 MY Note 2) The leakage test result shown is based on a test conducted for 10 minutes after the cylinder was pressurized with helium at 0.1 MPa.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber (optional for CX2) No rubber bumper No rubber bumper Double-side

VCL

7 Class 2 Class 3 Class 4 Symbol 2 3 4 5 7 3 N.C. for manifold Valve type Voltage 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Electrical entry Grommet Conduit Conduit terminal Conduit terminal with indicator light DIN terminal DIN terminal with indicator light DIN terminal (without connector) G C T TL D DL DO Note 1) Class B in AC has a rectifying circuit built-in

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Flow Rate and Sonic Conductance AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 10, 12 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Flow rate (L/min (ANR)) 180 230 100 260 390 660 790 460 920 1580 1710 Controlled

PSxx-OMF0005CN

0.01 mm 0.01 mm ISA2-G ISA2-H 1.5 64 5 m 2.0 64 5 m 50kPa 30kPa [mm] [mm] [mm] [mm] -20No.PS-OMF0005CN-E ISA2-G ISA2-H 1.5 64 5 m 100 kPa 2.0 64 5 m 100 kPa 0.05mm 0.05mm [s] [s] [mm] [mm] 1.5 64 100 kPa 0.15 mm 2.0 64 100 kPa 0.3 mm [s] [s] [mm] [mm] -21No.PS-OMF0005CN-E ISA2-G ISA2-H 100 kPa 1.5 64 5 m 100 kPa 2.0 64 5 m [mm] [mm] [kPa] [kPa] -22No.PS-OMF0005CN-E ISA2 ()