Process Pump Series PA3000/5000/PAX1000 Series PB1000

to 55 (23 to 131) Ambient temperature C (F) 5 to 50 (23 to 122) 5 to 55 (23 to 131) 5 to 50 (23 to 122) Outlet air atmospheric pressure dew point C (F) Standard performance 20 (-4) Inlet air flow rate l/min (ANR) (SCFM) Note 2) 625 (22.0) 62 (2.19) 125 (4.41) 250 (8.82) 375 (13.24) Outlet air flow rate l/min (ANR) (SCFM) 50 (1.8) 100 (3.5) 200 (7.1) 300 (10.6) 500 (1.77) Purge air flow rate

Process Pump Series PA3000/5000/PAX1000 Series PB1000

to 50 5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75 125 Inlet air pressure MPa 0.7 Inlet air temperature C 25 25 25 1l/min (ANR) {inlet air pressure at 0.7MPa} Inlet air saturation temperature

VXP21/22/23

VN Rated voltage 1 2 3 4 5 6 7 8 9 Solenoid valve option Nil Standard 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz Other (Please contact SMC separately.) LVC Select an option mark in page 17-3-10 by Applicable Fluids Check List for special fluids outside of the standard.

LEJ-OM002xx

/60Hz) 200 to 230VAC (50/60Hz) 3-phase 200 to 230VAC (50/60Hz) option Analog monitor output Regenerative option PC LEC-MR-RBRS-422 interface When using this software, order USB cable separately.

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

50 R5 5 100 100 R8 8 * RA 10 * Motor option RB 15 * Controller *Refer to catalog.

AW

3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21 AC31 AC41 * Without relief valve option ** With relief valve option mm AC-A A* 90 117 154 AA** 140 181 238 B 160 220 239 C 73 86 92 E 30 38 F 45.5 58.5 75.5 G 40 55 80 J 26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21A AC31A AC41A * Without relief valve option ** With

IDX-OM-P023E

point oC 10 Amount of cooling water (50/60Hz) Note 2) L/min 100 Cooling tower capacity Note 3) k W(RT ) 38.5 (8.5) Cooling water pressure drop (50/60Hz) MPa 0.05 (excluding automatic fluid filling valve) Fluid port size 1 1/4 union Power supply voltage (frequency) Note 4) Three-phase AC200V (50Hz) / AC200,220V (60Hz) characteristic Electric Power consumption (50/60Hz) Note 5) k W 11.6 Running

Series AK1000

to 150 psig (0.034 to 1.0 MPa) 5 to 200 psig (0.034 to 1.4 MPa) 5 to 300 psig (0.034 to 2.1 MPa) 10 to 500 psig (0.07 to 3.4 MPa) Bonnet option 01 02 06 10 15 20 30 50 0.5 to 10 psig (0.0034 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) Code Bonnet Standard Panel installation 6) Code Connections NPT 1/4 inch 1/4 inch compression

MHF2

5 33 15 20 Accessory option: Hexagon socket head screw (special screws) 2-2.5H9 +0.025 0 depth 2.5 Groove for auto switch mounting 18 4.5 18 4.5 1.7 4 2-M4 x 0.7 thread depth 5 Mounting thread 3.3 3 15 Groove for auto switch mounting 90 14 Series MHF2 Dimensions MHF2-16D Scale: 50% 4H9 +0.030 0 depth 3 38 4H9 +0.030 0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 57.5 5 M5 x 0.8 Finger

Cylinder with Lock Series CNS

5 V, 12 V IC circuit A96 5 V Yes A93 A90 A54 A59W A33 A34 A44 12 V 100 V Relay, PLC No IC circuit 5 V, 12 V 100 V or less 100 V, 200 V PLC Terminal conduit 2-wire 24 V 12 V Yes Relay, PLC 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indication) Solid state auto switches marked with are produced upon receipt of order.

Thermo-dryer

/60 Hz) 4.2 A 10 A 180/200 W 50/60 Hz 220 W 0.01 m (99.9% filtration efficiency) Particles of 0.3 m or more: 3.5 particles/L [ANR] or less Heater operation, PID control Singlephase 200 VAC (50/60 Hz) 2.1 A 5 A Singlephase 230 VAC (50/60 Hz) 2.1 A 5 A Singlephase 100 VAC (50/60 Hz) 9.4 A 15 A Singlephase 200 VAC (50/60 Hz) 4.8 A 10 A Singlephase 230 VAC (50/60 Hz) 4.8 A 10 A Power supply Note

o

NPTF 4 poris Lead wire length Stations(n 2 4 5 7 10 11 '13 14 15 1e 18 'i9 L1 1.47 (47 5) 2.24 2.70 3.11 (68.5) (7s) 3.52 (89.5) 3.94 (100) 4.35 4.76 (110.5) (1a) 5.14 (131.5) 5.59 \142) 6.00 (152.5) 6.42 (163) 6.83 (173.s) 7.24 (184) 7.66 0s4.5) 8.O7 (2051 8.44 (215.5) 8.90 \226) 9.31 (236.s L2 1.56 (39.5) 1.97 (50) 2.34 (60.5t 2.@ \71) (&.5) \92) 4.O4 (102.5) 4.45 (113) 4.46 (n.5) \ta)

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NPTF 4 poris Lead wire length Stations(n 2 4 5 7 10 11 '13 14 15 1e 18 'i9 L1 1.47 (47 5) 2.24 2.70 3.11 (68.5) (7s) 3.52 (89.5) 3.94 (100) 4.35 4.76 (110.5) (1a) 5.14 (131.5) 5.59 \142) 6.00 (152.5) 6.42 (163) 6.83 (173.s) 7.24 (184) 7.66 0s4.5) 8.O7 (2051 8.44 (215.5) 8.90 \226) 9.31 (236.s L2 1.56 (39.5) 1.97 (50) 2.34 (60.5t 2.@ \71) (&.5) \92) 4.O4 (102.5) 4.45 (113) 4.46 (n.5) \ta)

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

NPTF 4 poris Lead wire length Stations(n 2 4 5 7 10 11 '13 14 15 1e 18 'i9 L1 1.47 (47 5) 2.24 2.70 3.11 (68.5) (7s) 3.52 (89.5) 3.94 (100) 4.35 4.76 (110.5) (1a) 5.14 (131.5) 5.59 \142) 6.00 (152.5) 6.42 (163) 6.83 (173.s) 7.24 (184) 7.66 0s4.5) 8.O7 (2051 8.44 (215.5) 8.90 \226) 9.31 (236.s L2 1.56 (39.5) 1.97 (50) 2.34 (60.5t 2.@ \71) (&.5) \92) 4.O4 (102.5) 4.45 (113) 4.46 (n.5) \ta)

Filter for Cleaning Solvent Quick Change Filter Series FQ1

-025X11 50 EJ302S-050X11 75 EJ302S-075X11 1 EJ402S-001X11 3 EJ402S-003X11 5 EJ402S-005X11 10 EJ402S-010X11 65 x 500 25 EJ402S-025X11 50 EJ402S-050X11 75 EJ402S-075X11 Note) Seals are not necessary.

High Vacuum L Type Valve

Valve specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Double acting (Dual operation), Pressurize to open/close Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal

3-Position Rotary Table

Adjusting angle per rotation of angle adjustment screw Adjustment bolt a, b (End position adjustment) Adjustment bolt c, d (Center position adjustment) size 5.1 10.2 10 20 30 50 D9.0 3.6 8.2 3.3 4.1 8.2 A piping, speed control, and angle adjustment manual is attached to the product. 295 MSZ Series Construction @8 !5 !3 @0 !7 @5 !1 #0 t u r w @3 !

Digital Flow Switch (Remote type monitor unit)

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM510--1 10 (5) PFM510--2 10 (5) PFM525--1 25 (12.5) PFM525--2 25 (12.5) PFM550--1 50 (25) PFM550--2 50 (25) PFM511--1 100 (50) PFM511--2 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 -55No.PF-OMJ0018-F Dimensions PFM3 Panel cut-out dimensions Panel thickness: 0.5 to 6.0 mm Individual Two or more in a row (n: The number of products

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

For more information, please refer to Auto Shift Function on page 5.

Fluoropolymer Tubing Variations

Length per roll Color Translucent Translucent Symbol N N R BU B N N N N N KM 10 m Red (Translucent) KF 20 m Blue (Translucent) Black (Opaque) Translucent Translucent Translucent Translucent Translucent Roll M 50 m 100 m 16 m ( 50 ft) H/DL L/LL 33 m (100 ft) 2 m Straight KC Metric O.D. size 3.2 O.D. 5/32" is available in 4 metric tubing, and O.D. 5/16" is available in 8 metric tubing.