Vacuum Saving Valve

Example of Selection from Minimum Operating Flow 100 Example) Vacuum saving valve used: ZP2V-A8-05 From Table 1, Q2 can be calculated as 5.0 l/min (ANR). 90 31 {l/min (ANR)} 5 {l/min (ANR)} 80 N = 6 (unit) Vacuum pressure (kPa) 70 Q2 = 5.0 l/min (ANR) 60 Table 1.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

-03-09 8 5/16" 15.2 18.5 29.5 41 23 29.5 57 41 18.5 57 19.8 45.4 40.4 40.2 35.2 15.2 3/8 45.4 40.4 40.2 35.2 19.8 23 3/8 AS321F-03-10 AS321F-03-11 31.8 43.3 21 59 17.9 10 18.5 21 43.3 31.8 59 3/8" AS321F-03-12 AS421F-04-11 12 3/8" 20.9 22 44.3 32.8 33.6 61 47.9 21 100 17.9 24 28.6 49.2 49.6 42.1 1/2 24.5 56.7 (23.8) AS421F-04-10 AS421F-04-13 10 1/2" 18.5 21 47.9 33.6 35.2 100 49.5 22 101

EX600-WEN_WSV.eng

Link, No Activity (100 Mbps) Communication status of EtherNet/IPTM ports 1 and 2 Green LED flashes. Link, Activity (100 Mbps) (2) Set the number of occupied I/O points for the module and each parameter of the "base". : Different from the I/O points of the whole system. LINK/ACT1 ROMANIA (40) 213205111 Orange LED is ON.

CEx-OMG0106

~1500mm/s (during positioning, 100~500mm/s) Ambient Temperature 5~60 (No freezing) Cushion Both sides Air Cushion Brake Type Integrated Pneumatic and spring Lubrication None Strokes tolerance 0~+1.8 Hardware JIS B 0209 Port Size Front & Side Port Rc1/8 Rc1/4 Bottom Port 5 6 8 5-2 Controller Specifications Type CEU2 CEU2P Model Nomenclature Controller Mounting Surface Mounting (Din Rail or

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

(23.8) 1/2 28.6 25.4 57.6 42.1 49.6 50.1 AS421F-04-11 AS421F-04-12 33.6 17.9 48.9 12 47.9 21 20.9 100 22 101 34.6 3/8" 28.6 50.1 42.1 25.4 57.6 49.6 1/2 AS421F-04-13 35.2 21.7 49.5 22 101 Note 1) ( ) are the dimensions of NPT thread.

Free-Mounting Cylinder with Air Cushion Series CU

, 70, 80, 90, 100 Bore sizes (mm) 20, 25, 32 Intermediate strokes are also available upon receipt of order.

Air Cylinder MGQ Series Compact Guide Cylinder

MGOL /tO, 50, 63, 80, 1OO 25, 50, 75, 100 As to inremedrale slroke (5, 10, 15,20,30 35.. .. ), spacer ol5, 10, 15 20mm wdth wllbe used (EEmple) MGQM5o lO s produced by instaling 15mn spacer in MGQ'!

Direct Operated Precision Regulator Modular Style Series ARP3000 1

(MPa) VEX 0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (ANR)) Flow rate (/min (ANR)) VE VY1 G Pressure Characteristics PPA Inlet pressure: 2.0 MPa Outlet pressure: 0.8 MPa Flow rate: 60 /min (ANR) Inlet pressure: 2.0 MPa Outlet pressure: 0.3 MPa Flow rate: 60 /min (ANR

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

VCB

(C) 1 to 99 VC Enclosure Dusttight, low jetproof (equivalent to IP65) VDW Environment Location without corrosive or explosive gases Valve leakage cm3/min 0 (With water pressure) VQ Mounting orientation Unrestricted Note) Vibration/Impact resistance (m/s2) 30/150 or less VX2 Rated voltage 100 VAC, 110 VAC, 200 VAC, 220 VAC, 230 VAC (50/60 Hz) Coil specifications 10% of rated voltage Allowable

VQ5000

with AMC610-10 installed Approx. 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159 (172.5) 159 (172.5) (approx. 105 with AMC810-14 installed) (105 with AMC810-14 installed) 118 (135) (approx. 105 with AMC810-14 installed) (105 with AMC810-14 installed) 158.7 158.7 6-Rc3/4 Ports P (SUP), R (EXH) 6-Rc3/4 Ports P (SUP), R (EXH) 2-G1 (electrical

Title not found

Bore size(mfn) Standard stroke(mm) MGOftl Slide bearing MGor12, rc 10, 20, 30, 40, 50 MGOr2o,2s 20, 30, 40, 50, 75, 100 25, 50, 75, 100 MGOL Ball bush bearing MGOr32,40, 50, 63, 80,1OO . intermediate stroke As to intermediate stroke (5, 10, 15, 20, 30, 35 )' spacer of 5, 10' 15,20mm width will be used (Example) MGOM50-10 is produced by installing 1smm spacel in MGQM50'25 Consult factory when

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Lead wire length (m) Load voltage Indicator light Auto switch model Pre-wire connector Applicable load Special function Type Electrical entry Wiring (Output) AC DC 0.5 (Nil) 3 (L) 5 (Z) None (N) C73 C80 B53 B54 B64 C73C C80C B59W H7A1 H7A2 H7B H7C H7NW H7PW H7BW H7BA H7NF G59 K59 100 V Yes 12 V Relay, PLC No IC circuit 100 V or less 5 V, 12 V Reed switch Solid state switch Grommet PLC Yes

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Solenoid Specifications 100, 200 VAC, 50/60 Hz; 24 VDC Coil rated voltage How to Calculate the Flow Rate 15 to +10% of rated voltage Allowable voltage fluctuation For obtaining the flow rate, refer to page 31-10.

JXCx-OMT0032CN

CN2TB/PC () 19 - .CN4 6.1 1 EMG+ EMG 2 EMGEMG 3 24V 5 4 3 2 () 4 0V 5 FG FG (LEC)(0V) ULUL1310Class2 6.2 2) AWG20(0.5mm (24V0V) 60 2) EMG AWG20(0.5mm (EMG+,EMG-) 60 8mm 20 - D(100) D 6.3 (CN2SW)ON(EMG+,EMG-) (LEC)EMG (CN2SW) RY CN4 CN2 EMG+ EMG24V 0V (CN2SW)ON EMG+,EMG-(LEC) OFF (LEC)(EMG+,EMG-) 21 - (LEC) ( LEC6) DC24V 0V Ry EMG+ Ry EMG(1) BK RLS EMG Ry C 24V 24V

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

In the case the load voltage is 100 or 200V AC. Be sure to use the contact protection box in any case mentioned above. Otherwise, the contact life may be shortened. (Due to permanent energizing conditions.)

VXH

Electrical entry Rated voltage G Grommet 2 200 VAC 50/60 Hz 1 100 VAC 50/60 Hz C Conduit D DIN terminal 3 110 VAC 50/60 Hz T Conduit terminal 4 220 VAC 50/60 Hz 7 240 VAC 50/60 Hz Refer to the table (1) given below for availability. 8 48 VAC 50/60 Hz 9 Other (Only AC) Table (1) Rated VoltageElectrical Entry-Electrical Option Caution Insulation type Electrical entry Electrical option 1 (100

VT325

(Values at the initial period) VT325-C VT325-G JIS Symbol Solenoid Specifications Grommet, Conduit, DIN terminal, Conduit terminal 100, 200 VAC, 50/60 Hz, 24 VDC 15 to +10% of rated voltage 75 VA 60 VA 27 VA 17 VA 12 W Electrical entry Coil rated voltage Allowable voltage fluctuation 50 Hz 60 Hz 50 Hz 60 Hz Inrush AC Apparent power (3) Holding DC Power consumption (3) Note 3) At rated voltage

Parallel Type Air Gripper Series MHZ

Applicable Tubing Note: 1in = 25.4mm 1MPa = 145psi F = (C x 1.8) + 32 Soft nylon tubing TS0425 4 0.8 12 20 to 60 Nylon 12 Polyurethane coiled tubing TCU0425B-1 4 0.5 20 to 60 Polyurethane Specification Description/Model Nylon tubing T0425 4 1.0 13 20 to 60 Nylon 12 Polyurethane tubing TU0425 4 0.5 10 20 to 60 Polyurethane Outside diameter mm Max. operating pressure MPa Minimum bending radius

VQC

Air temperature (C) 10 0 10 30 40 50 60 20 Correction coefficient 1.06 1.04 1.02 0.98 0.97 0.95 0.94 1.08 32 Series VQC Specific Product Precautions 1 Be sure to read before handling. Refer to pages 29 through 32 for safety instructions and common precautions.