Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

63 GC 12 15 J M14 x 2 M16 x 2 MM M8 x 1.25 A 212 245 B 17 19 C 10.5 12.5 CH 41.5 47.0 G 27.0 29.5 GA 25.0 27.5 GB 37.5 39.5 H 124 149 K 28 32 L 250 290 LD 11 14 LH 57 65 LL LW 168 200 M 15 16 N 47 50 NC 44 60 NE 122 147 NH 60 70 087 100 M10 x 1.25 Bore size (mm) 50 63 NW 118 142 PA 120 140 PB 186 220 PG 10 12 PP 26 42 Q 380 436 QQ 28 30 QW 090 110 RR 35 49 TT 35 43 UU 24 28 VV 28 30 W 200

Digital Flow Switches, Series PF2A, Series PF2W

100 200 500 10 50 100 200 500 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1 5 10 20 50 1 5 10 20 50 8 For Air Digital Flow Switch/High Flow Rate Type Series PF2A Refer to www.poweraire.com for details of products compatible with overseas standards.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

MTS12-100 st 100 st 75 st 75 st 0.1 50 st 25 st 50 st 25 st 0 50 100 5 10 Lateral load (N) Lateral load (N) 40 16 0.3 0.3 MTS40-200 st 175 st 150 st 0.2 0.2 125 st 100 st 75 st 75 st MTS16-100 st 50 st 0.1 0.1 50 st 25 st 25 st 0 50 100 150 10 Lateral load (N) Lateral load (N) 20 0.5 Caution on Design MTS20-200 st 175 st 150 st Caution 1.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

M2 m2 M3 m3 25 32 40 23 26 23 27.5 27.5 27.5 MY1H 39 50 39 39.2 39.2 39.2 50 50 39 50 50 50 The above values are the maximum allowable values for moment and load mass.

MXF

MXF16 30, 50, 75 MXF20 30, 50, 75, 100 Weight (g) Standard stroke (mm) Model 100 75 50 30 20 10 MXF8 170 130 120 MXF12 360 250 210 MXF16 690 500 360 MXF20 1370 1060 750 600 8-6-3 4 Series MXF Table Deflection (Reference values) Table Displacement due to Pitch Moment Load Table Displacement due to Yaw Moment Load Table Displacement due to Roll Moment Load Table roll deflection arrow

HRX-OM-X071

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

Low Profile Slide Table Series MXF

Number of auto switches Bore size/ Stroke (mm) Nil S n 2 pcs. 1 pc. n pcs. 8 12 16 20 10, 20, 30 20, 30, 50 30, 50, 75 30, 50, 75, 100 Auto switch Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below.

CE2

254 0 58 3/8 31 187 334 M18 x 1.5 stroke 12.5 80 65 0 71 372 284 37 205 1/2 381 M22 x 1.5 81 14 72 389 65 0 214 1/2 300 40 398 M26 x 1.5 Foot style LS + Stroke ZZ + Stroke Y ZZ LD LS LX X B LH Bore size (mm) 40 50 63 80 100 9 27 13 309.5 58.5 40 272.5 42 333.5 9 45 289.5 50 27 13 68.5 59 34 16 362 11.5 83 50 322 16 415 13.5 372 76 44 100 65 43 17 432 13.5 114 75 386 92 10-12-50 Stroke Reading

CE2

58 0 254 3/8 187 334 31 M18 x 1.5 stroke 80 12.5 65 372 71 0 284 1/2 205 37 381 M22 x 1.5 81 14 65 389 72 0 300 1/2 214 398 40 M26 x 1.5 Foot style LS + Stroke ZZ + Stroke LD ZZ Y X LX LS LH B Bore size (mm) 40 50 63 80 100 9 309.5 13 27 42 272.5 40 58.5 9 333.5 13 27 50 289.5 45 68.5 11.5 362 16 34 59 322 50 83 13.5 415 16 44 76 372 65 100 13.5 432 17 43 92 386 75 114 10-12-50 8 Stroke

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

mm 190 30 MIS12-30D 30, 50 mm 300 10 MIS20-10D 20MIS 5 15 355 20 MIS20-20D Data 410 30 MIS20-30D 800 30 MIS25-30D 10 15 1000 50 MIS25-50D 1350 30 MIS32-30D 18 50 1650 50 MIS32-50D 10-11-9 9 Series MIW/MIS Construction: Double Finger Type (MIW) 8 12, 20 q y r !

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

mm 190 30 MIS12-30D 30, 50 mm 300 10 MIS20-10D 20MIS 5 15 355 20 MIS20-20D Data 410 30 MIS20-30D 800 30 MIS25-30D 10 15 1000 50 MIS25-50D 1350 30 MIS32-30D 18 50 1650 50 MIS32-50D 10-11-9 9 Series MIW/MIS Construction: Double Finger Type (MIW) 8 12, 20 w i !

VQ5000

Nil E Yes Without light, with surge voltage suppressor Seal Metal seal Rubber seal 0 1 Coil voltage Function 1 2 3 Stations 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC D side U side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) (2) Applicable to DC sepecifications.

Escapements Series MIW/MIS

M-5P (Width across flats 7) 32 : Hexagon socket head taper plug (Width across flats 5) Refer to the Figure 1 for G thread PD PC Supply port 2 x P FF FE EB EA D FC FA GA FG FB FD GD HA, HB GC GB C B A 87 117 105 135 165 125 155 185 215 270 250 310 Model MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 59 79 72 92 112 86.5 106.5 126.5

Heavy Duty Stopper Cylinder

Lateral load F = mg [N] (g: Gravitational acceleration = 9.8 [m/s2]) Mass of transferred object m [kg] RSQ RSG Friction coefficient RS2H RS2H RSH P: Operating pressure of the cylinder [MPa] MIW MIS D-X 593 Heavy Duty Stopper Cylinder 50, 63, 80 RS2H Series RoHS How to Order D 30 RS2H 50 L M9BW Bore size 50 63 80 50 mm Port thread type Number of auto switches (auto switch number mounted)

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

polarity protection) 50 mA or less (Current consumption for sensor is not included.)

MQQ

28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

CKZ2N

Clamp Arm Tightening Torque Bore size (mm) Tightening torque Nm Ibfin 50 63 80 12 to 15 15 to 20 18 to 24 106 to 133 133 to 177 159 to 212 Bore size (mm) Tightening torque Description Nm Ibfin 50 63 80 50 63 80 50 63 80 50 63 80 44 to 62 44 to 62 44 to 62 27 to 35 27 to 35 27 to 35 1150 to 1327 1416 to 1770 4248 to 4600 22 to 27 22 to 27 27 to 44 5.0 to 7.0 5.0 to 7.0 5.0 to 7.0 3.0 to 4.0

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

MQQ

, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.