SMC Corporation of America
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Power Valve: Regulator Valve Series VEX1 How to Order 03 D 3 1 0 B VEX 1 Regulator valve Option None Nil Bracket Foot (VEX110 only) Gauge B F G When specifying more than one option, combine symbols alphabeticaly.

01 02 03 01B 02B Port size Side ported 1/8" Side ported 1/4" Side ported 3/8" Bottom ported 1/8" Bottom ported 1/4" Size 26 mm Size 18 mm R M Note) External pilot 18 mm and 26 mm sizes mixed Note) Refer to pages 27 and 28 for details of option M.

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Mass (g) Model IN OUT OUT EXH AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 M5 x 0.8 2 2.8 25 1 8 4 5.8 45 1 8 25 25 110 1 4 35 40 105 1 4 40 42 215 8 3 60 70 205 1 2 105 115 690 3 4

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2005 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing JX printing JX 120DN Printed in Japan.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2022 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. D-G

1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

pressure Maximum operating pressure Regulating pressure range Rc 1/8, NPT 1/8 (Female thread) Air 1.2 MPa 0.8 MPa Standard: 0.2 to 0.7 MPa, Low pressure use (0.2 MPa setting): 0.05 to 0.2 MPa 5 to 60C (No freezing) Relieving type 0.065 Ambient and operating temperature range Construction Weight (kg) Model Port size IN Model OUT ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03

.; ~ '" '" DOWN button UP bulton ~ .{ LED (red) I SET button T2 NPTF'4 M5X O 8 deplh 5 I 12.3 20 4 .0' 2.7 17 depth 6.5 i 28 View A With bracket 50 (44) 4.%4S 40 30 39 II i ~g: D Sll:PR,~~RE~'mCil 0 0 M N '" 6 ;e;V 'P -$~ 11:rn I~ tP 00 lR ;l=i I I 12.3 I , 28 SMC CORPORATION ~. 1164,SH1MBASHI,MINATO-KU,TOKYO 10S,JAPAN Tel:03-3502-2740 Fax:03-52517240 l si printing January 1995.0-036,P

17 I I 28 Fitting View A TSJ'/4 50 (44) (Tube Swaged Joinl) 4-%4.5 With bracket 39 , ~ oiL ' -"t~l=r 12.3 l 28 ,-16-4,SHIMBASHI,MINATO-KU,TOKYO 'OS,JAPAN Tel:03-3502-2740 Fax:03-5251-7240 SMC CORPORATION l si printing June 1995.0-036,P-56(M) Augus< 1996, 45(RP) Specllications are subJeclto change without poor notICe Printed in Singapore and any obhgatlOn on the pari of the manufacture.

Valve: None; Stop Valve: None, Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: F (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA; Temp.: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: S (w/Flow Adj.

Stations: 03 (3 Stations), Supply/Return Unit Layout: U (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: F (G), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: F (G), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: Rc, Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: F (G), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.