SL5200

0.00 0 0.00 0 0 20 40 60 80 100 120 Flow rate (slpm, N2) 0 1 2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

, 3/4 Rc 1/4 5 Process Pump Air Operated Type (External Switching Type) Series PA3000/5000 How to Order 1 1 PA 3 03 3 PA3000 Body size Connection port size 03 04 06 3 5 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 3/8 standard 1/2 standard Liquid contact body material Thread type 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Nil T F N Rc NPTF G NPT Diaphragm material 1 PTFE T, F,

Process Pump Series PA3000/5000/PAX1000 Series PB1000

(pilot air exhaust port) FLUID IN 1/2, 3/4 1/4 5 Series PA3000/5000 Process Pump Air Operated Type (External Switching Type) How to Order 1 1 PA 3 03 3 PA3000 Body size Connection port size 03 04 06 3 5 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 3/8 standard 1/2 standard Liquid contact body material Thread type 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Nil T F N Rc NPTF G NPT

CUJ

M3 x 38L M3 x 27L M3 x 29L M3 x 31L M3 x 33L M3 x 38L M3 x 43L M3 x 27L M3 x 29L M3 x 31L M3 x 33L M3 x 38L M3 x 43L 5 5 18 M3 x 18L 5 5 18 M3 x 18L 5 5 18 M3 x 18L 3 Mini Free-mount Cylinder Series CUJ Clean Room Series How to Order Double acting 10 6 8 D C D UJB F8N Number of auto switches Nil S 2 pcs. 1 pc.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Note 4) When n is an odd number, an even number that is one larger than this odd number is used for the calculation. However, the minimum even number is 4. So, 4 is used for the calculation when n is 1 to 3.

4-channel Flow Monitor (Remote type monitor unit)

For example, when analogue output is 1 to 5 V, F.S. = 5[V] 1[V] = 4[V], (ref. 1%F.S. = 4[V] x 1% = 0.04[V]) F.S. (Full span, Full scale) H Hysteresis The difference between ON and OFF points used to prevent chattering. Hysteresis can be effective in avoiding the effects of pulsation.

VCC

Qty. 1 6 11 2 7 12 3 8 13 4 9 14 5 10 15 2 port valve is specified for the gate valve and the cleaning valve. 7 valves + 1 valve + 4 valves = 12 valves 668

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a 48.5 23 60 142 0 86 1 . 5 1 5 1 0 5 59 130 58 254 58 52 17.5 66 3/. 16 37 55 1 5 23 70 208 0 102 1 3 . 5 1 8 130 76 160 71 296 80 65 21.5 80 4D 56.5 1 5 25 80 226 0 1 6 1 3 . 5 1 8 1 5 0 92 180 3 1 5 80 65 2 1 . 5 81 $eries CLA lllmensio Rear Flange Type/CLAG with Rod Boot tvt14x1.5 M 1 8 X 1 . 5 rv18x1.5 M22)r.1.5 t\426X1.5 I n 2 0 27 ,/. 42 I I 20 45 153 8 60 9 1 2 80 42 100 5 1 2 1 6

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

9 #1 !6 @9 r MTS $0 #6 MY A' CY $1 !1 !2 !0 !8 w $4 t e $2 !5 $3 y!7 @8 !4 !

Digital Flow Switch (Remote type sensor unit)

Examples of Internal Circuit and Wiring 1 to 5 V / 4 to 20 mA output type With temperature sensor 1 to 5 V output type PF3W5--1/2 PF3W5--1T Analogue output 1 to 5 V Analogue output 1 to 5 V Output impedance: 1 k Output impedance: 1 k Analogue output 4 to 20 mA Maximum load impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 -22No.PF-OMN0010-J Flow Measurement Measurement

o

: ( 5 ! 0.14 {3.51 Dia. P=0 41 (1 2 Mounlin9 holes L2 0 1 4 ( 3 . 5 ) Tgpe 541,/ Sitle Ported , r r ' : , a M Type Plug Connector(M) 11YY3,13-941-g"-'s;i.;l-M3 L Type Plug Connector(L) 0.1413.5) Dia.

o

: ( 5 ! 0.14 {3.51 Dia. P=0 41 (1 2 Mounlin9 holes L2 0 1 4 ( 3 . 5 ) Tgpe 541,/ Sitle Ported , r r ' : , a M Type Plug Connector(M) 11YY3,13-941-g"-'s;i.;l-M3 L Type Plug Connector(L) 0.1413.5) Dia.

MU

5 5 10 5 15 10 15 15 D-F7/J79 D-F7V/J79C D-F7W/F7lWV D-J79W/F7NTL D-F7BAL/F7BAVL D-F79F 20 Mountable only for equivalent bore sizes 40, 50, 63. 6.5 7 6.5 6.5 6.5 D-P5DWL 5 5 5 Since this is a guideline including hysteresis, not meant to be guaranteed.

MU

5 5 10 5 15 10 15 15 D-F7/J79 D-F7V/J79C D-F7W/F7lWV D-J79W/F7NTL D-F7BAL/F7BAVL D-F79F 20 Mountable only for equivalent bore sizes 40, 50, 63. 6.5 7 6.5 6.5 6.5 D-P5DWL 5 5 5 Since this is a guideline including hysteresis, not meant to be guaranteed.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

: ( 5 ! 0.14 {3.51 Dia. P=0 41 (1 2 Mounlin9 holes L2 0 1 4 ( 3 . 5 ) Tgpe 541,/ Sitle Ported , r r ' : , a M Type Plug Connector(M) 11YY3,13-941-g"-'s;i.;l-M3 L Type Plug Connector(L) 0.1413.5) Dia.

Air Cylinder NCA1 Series

/8 4 7/8 2 5/8 5 4 1 3/8 1-14 1 5/8 2 3/8 1 2 5/8 4 7/8 2 5/8 5 1/4 5 1 3/4-16 1 1/8 1.5 1/4 3/4 2 5/16 5 1/8 2 7/8 5 1/4 5 1 3/8 1-14 1 5/8 2 3/8 1 2 9/16 5 1/8 2 7/8 5 1/2 5 1 3/4 1 1/4-12 2 2.375 1/2 1 1/4 2 13/16 5 1/8 2 7/8 5 3/4 6 1 3/8 1-14 1 5/8 2 1/4 7/8 2 13/16 5 3/4 3 1/8 5 7/8 6 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/16 5 3/4 3 1/8 6 1/8 6 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 3/16

NCA1

4 7/8 2 5/8 5 4 1 3/8 1-14 1 5/8 2 3/8 1 2 5/8 4 7/8 2 5/8 5 1/4 5 1 3/4-16 1 1/8 1.5 1/4 3/4 2 5/16 5 1/8 2 7/8 5 1/4 5 1 3/8 1-14 1 5/8 2 3/8 1 2 9/16 5 1/8 2 7/8 5 1/2 5 1 3/4 1 1/4-12 2 2.375 1/2 1 1/4 2 13/16 5 1/8 2 7/8 5 3/4 6 1 3/8 1-14 1 5/8 2 1/4 7/8 2 13/16 5 3/4 3 1/8 5 7/8 6 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/16 5 3/4 3 1/8 6 1/8 6 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 3/16 5

MQQ

Contact SMC if the product is to be used in any of the following conditions: 1. Conditions and environments beyond the given specifications, or if product is used outdoors. 2.

Air Cylinder Series CS1

5 5.5 6 6 MB D-G39/K39 [Stainless Steel Mounting Screw Kit] 11 11 10 10 10 MB1 Since this is a guideline including hysteresis, not meant to be guaranteed.