Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Graduations for adjusting on flow rate q Graduations for IN pressure 0.1 MPa Graduations for IN pressure 0.2 MPa Fig. (1) Viewing faceplate 16-12-5

SMC Pneumatic Clean Series

+ Stroke ZZ + Stroke (mm) 2 1 10 10 10 10 GB M4 x 0.7 depth 7 J M10 x 1.25 M10 x 1.25 M8 x 1.25 MM 1/8 1/8 1/8 1/8 P 27 19.5 19.5 15.5 AL Bore size Standard stroke range Up to 200 Up to 300 Up to 300 Up to 300 50 35 32 Up to 300 63 80 100 50 40 40 35 H A 8 6 6 5 H1 47 38 31 26 I 13<10> 20<18> 20 20 GA 19 17 17 13 B1 6 5.5 5.5 5 K 44 35.5 29 24 NA 9 7 7 7 RA 26 20 16.5

SMC Pneumatic Clean Series

2 3 4 1 2 3 4 Piping length (m) Piping length (m) Back matter 6

Compact

I ':"1 6 65 274 1 7 7 1 7 7 6 52 55 -r5 loo . 6 . 202 202 6 8 65 320 227 227 6 47 75 litzs . 70 345 252 252 6 47 150 6 8 370 277 2 7 7 r 1 65 T-slot A dimensions T-slot B dimensions $unies tX$ tilo To 0[dEl' tlect|'ic Acl||at0 AC Servo Motor 100vAc TS45O1N -rslsotl I Nole 1) l Applicable Applicable TarnaFwa Sek I 2OOVAC TS45O1N AppLicable L Applicable 3 -.'

VM

Protrusion Protrusion Recessed portion 5-6-6 Mechanical Valves Series VM Replacement parts 1. Use the part numbers listed below to order individual mushroom head or flat head buttons.

A

27.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5

ZX

VJ10-20-4A-6 2 pcs. Ordering example) ZX1051-K15LOECN 1 pc. VJ10-20-4A-6 2 pcs. ZS-10-5A-50 1 pc. (For 110 VAC) 3A 36 VJ10 6 Ejector System/Recommended Model (The models below will have shorter deliveries.)

PF2A/PF2W

ZSM PF2 Terminal block number 5 6 7 8 IF 4 3 2 1 The applicable panel thickness is 1 to 3.2 mm.

10

1 et y u o !0 q !6 r RJ10, 14, 2015, 2725 w i !2 r !3 !1 q e t y u o !0 !6 Component Parts No. Material Treatment Description No.

Manifold Specifications

for 4 Rc 1/8 G B3 One-touch fitting for 5/32" 20 20 stations 4(A), 2(B) port 1(P) port NPT Rc 1/8 How to Order Flat ribbon cable type 41P Applicable solenoid valve VV5Z3 41P 05 M5 1 3 5 6 1 3 5 6 VZ343MOZ Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 4(A), 2(B) port 03 VZ353MOZ 3 stations M5 x 0.8 M5 M5 x 0.8 Rc Nil F N Z NPTE Applicable blanking plate assembly DXT192-13-

SI Unit for Vacuum Manifold

PressureValueMonitoringChannelSelection byte bit Content 7 6 5 4 3 2 1 0 0 0 0 0 0 0 0 0 Select CH0 for PressureValueMonitoring 0 0 0 0 0 0 0 1 Select CH1 for PressureValueMonitoring 0 0 0 0 0 0 1 0 Select CH2 for PressureValueMonitoring 0 0 0 0 0 0 1 1 Select CH3 for PressureValueMonitoring 0 0 0 0 0 1 0 0 Select CH4 for PressureValueMonitoring 0 0 0 0 0 1 0 1 Select CH5 for PressureValueMonitoring

SMC Pneumatic Clean Series

Grade 4 M4.5 ISO class 6 10 M5.5 ISO class 7 0.1 0.5 1 1 M6.5 ISO class 8 Particle diameter (mm) Selection procedure (1) Required clean room cleanliness? Class M2.5 or Class M3.5 or Class M4.5? Diagram 1 Air flow (2) Air flow to the workpiece (Refer to Diagram 1.) Workpiece A The air flow is blocked before it reaches the workpiece.

Suction Guard (Produced upon receipt of order) FHG Series

Note 1) 1 1/4B 90 1 1/2B 120 Note 2) 2B 200 2 1/2B 315 3B 450 Description Part no.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Confirm the total of x, y, and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3. Wall x y x z x 2. Bottom 4. Vertical z y x y z Example 1.

Plate Cylinder with Lock Series MLU

4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

Cylinder with Turntable Series MGT

3 @2 @1 @5 !1 !0 Section AA @0 u @8 r y !6 @3 @4 e !7 w i t q A A @7 #3 @9 #0 #1#2 !8 !9 #4 @8 @6 !4 !5 Description Material Note Component Parts Description Material Note Component Parts No.

e-Rodless Actuator

Speed [mm/s] 1 1 100 0.49 2 2 200 0.74 3 3 300 0.98 4 4 400 1.23 5 5 500 1.47 6 6 600 1.96 7 7 700 2.45 8 8 800 2.94 9 9 900 3.92 10 10 1000 4.90 Note) The factory default setting for the switch is No.1 (100 mm/s).

Compact Cylinder

3 i q !1 t Rod end male thread Component Parts Note Replacement Parts: Seal Kit Kit no. Material Description No. Contents Size 20 25 32 40 Rod cover 1 CQUB20-PS Chromated Aluminum die-casted Head cover 2 CQUB25-PS Chromated Aluminum die-casted Set of component parts i, !1, !2, !

Compact Cylinder with Air Cushion and Lock Series RLQ

TH Rear cylinder Port TP w e r t q u i y w e r t q u i y Approx. Max. T1 Approx. Max. T1 Approx. Max. T2 Approx. Max. T2 Approx. T3 Cylinder with by-pass piping component parts No. 1 2 3 4 Quantity 1 1 1 1 Description Part No.

Air Pilot Operated Series NVSA

B.o'd. 1 1 vallo Eodyla" NPTF "'NPTF 2 qpdng Sat xT!1&4 I Spdng-spooltuln xTmtl0 4 Orlng -Slv ARRt6A{14 sltw a3lambt-congEt3 ot spoot end st.v (metchd s6t) end (4) detjt4 6 XT@4 7 Q!!e, axT01&5 I P[ot cotr asrmDty with oprator.