KA

Soft nylon Polyurethane 4 3.2 KAU23-00 33 34 37 17.5 18 20 9.6 10.4 12.8 9 9.7 11.7 18.5 21 22 15.5 16 17 15.2 18.5 20.9 9.6 10.4 12.8 45.4 45.4 28.4 28.4 17.7 17.7 9 7 5 KAU04-00 KAU06-00 13.4 13.4 4.2 4.2 3.4 2.9 8 6 24.5 27.5 30 15.2 18.5 20.9 13.7 16.1 18.1 42.5 48 51 KAU08-00 11 16 12 10 KAU10-00 KAU12-00 23 Plug-in reducer: KAR Effective area (mm2) Weight (g) Tube O.D.

High Purity Fluoropolymer

Approximately 20g of super high purity hydrofluoric acid (48%) is measured and injected into the tube. The interior wall of the tube is immersed at normal temperature for one week with both ends of the tube plugged.

Low torque Metal seal type Rotary joint

M5 x 0.8 10 counter bore depth1.5 30h8 (10 from end) 49h8 0 -0.033 25h8 16-M5 x 0.8 10 counter bore depth1.5 0 0.033 3 120 140 17 *7 (10 from end) 3 (87) 1 2 3 4 5 6 7 8 9 10 11 12 1 2 31 9 8.2 x 11 = 90.2 P = 8.2 29 8.2 x 7 = 57.4 P = 8.2 4 3 105 15 *5 5 6 7 8 7.5 4.5 25H8 (10) 5.5 (10) 30H8 45 45 1 2 3 1 12 P=45 8 P=30 2 11 4 7 10 3 22.5 5 6 6 7 8 9 4 5 4-M3 x 0.5 thread length 8 P.C.D.48

CYP

Dynamic moment Me3 L2 We W = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

CYPSeries

Dynamic moment Me3 We W L2 = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

CYPSeries

Dynamic moment Me3 We W L2 = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

VG342

DIN terminal Terminal 1 2 + + Pilot Valve Assembly Specifications Grommet (G), Grommet terminal (E), Conduit terminal (T), DIN terminal (D) Electrical entry How to Change Passage State Enclosure Dusttight Lead wire color 100 VAC: Blue, 200 VAC: Red, 24 VDC: Red/Black AC (50/60 Hz) 100, 200, 24, 48, 110, 220, 240 Coil rated voltage (V) 24, 6, 12, 48, 100 DC Allowable voltage fluctuation

VP300/500/700

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VP342-D Series VP300 VP344-G Grommet (G), Grommet terminal (E), Conduit terminal (T), DIN terminal (D, Y) 100, 200, 12, 24, 48, 110 to 120, 220, 240 Electrical entry VP542-D Series VP500 VP544-G DC AC (50/60 Hz) Coil rated voltage (V) 24, 6, 12, 48, 100

VT307

Mounting orientation Unrestricted 150/50 m/s2 (2) Shock/Vibration resistance Enclosure Dustproof Grommet, Grommet terminal, Conduit terminal, DIN terminal 100, 200, 24 , 48 , 110 , 220 , 240 Electrical entry DC AC (50/60 Hz) Coil rated voltage (V) 24, 6 , 12 , 48 , 100 Allowable voltage fluctuation 15 to +10% of rated voltage 12.7 VA (50 Hz) 10.7 VA (60 Hz) 7.6 VA (50 Hz) 5.4 VA (60 Hz)

VT317

Lubrication Manual override Non-locking push type Mounting orientation Unrestricted 150/50 m/s2 Shock/Vibration resistance (2) Dustproof Enclosure Grommet, Conduit, Conduit terminal, DIN terminal 100, 200, 24 , 48 , 110 , 220 , 240 Electrical entry DC AC (50/60 Hz) Coil rated voltage (V) 24, 6 , 12 , 48 , 100 Allowable voltage fluctuation 15 to +10% of rated voltage 19 VA (50 Hz), 16 VA

5 Port Air Operated Valve Series SYA3000/5000/7000 1

0.44 0.61 0.16 0.64 0.45 0.18 0.46 0.13 0.47 0.43 0.48 0.13 Closed center Exhaust center Pressure center SA SYA320-M5 M5 x 0.8 0.42 0.47 0.13 0.47 (0.44) 0.41 (0.37) 0.13 (0.12) 3 position 39 VA 0.50 (0.41) 0.48 (0.35) 0.15 (0.11) 0.47 0.43 0.13 44 46 Single Double 2 position SA 0.29 0.18 0.64 0.34 0.72 0.17 0.28 0.15 0.59 0.30 0.59 0.15 Closed center Exhaust center Pressure center C4 VA 48

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

P. 2-3-44 P. 2-3-46 P. 2-3-47 P. 2-3-48 C6 L6 P R D side SMC AN200 U side Individual EXH spacer SSQ1000-R-3Special wiring specifications (-K) Back pressure check valve (-B) SSQ1000-BP Built-in silencer (-S) P. 2-3-49 P. 2-3-45 P. 2-3-46 P. 2-3-47 C6 L6 D-sub connector Terminal no.

Plug-in/Plug Lead: Single Unit

) 2-Rc 1/8 (External pilot port) 2-6-32 Base Mounted Series VQ5000 Plug Lead Unit Bottom ported drawing VQC 59.2 46.8 106 83.5 SQ 55.5 M5 ground screw 9 9 2n-Rc 1/2 4(A), 2(B) port VQ0 U side 34.5 VQ4 n X 12 X 12 VQ5 B 2 A 4 6 B B B B B B A A A A A A VQZ B 2 A 4 VQD 5 SMC SMC SMC SMC SMC B 2 A 4 4 L1 L2 B 2 A 4 3 B 2 A 4 2 P = 41 P = 41 B 2 A 4 1 Cable length (600 or 1500 mm) 58.5 34.5 48

Rotary Table/Vane Style Series MSU

Adjustment: Max. 10.3 6 2 x M5 x 0.8 2 8 A port 1 +0.030 0 B port 3 x 4H9 long groove depth 3 8g6 0.005 0.014 ( A , B , C ) 16h9 0 0.043 4 x M6 x 1 depth 11 50 0 0.074 53.5h9 48 160 Series MSUA Rotary Table: High Precision Type Vane Style These drawings indicate the condition when the B port is pressurized.

Rotary Gripper Series MRHQ

40 78 Angle adjustment bolt MHR 2 x 5.5 through MHK 2 x 9.5 depth of counter bore 3 11 MHS 2 MHC 10 0 -0.062 47h9 long groove depth 4 +0.03 0 3 x 4H9 M5 x 0.8 M5 x 0.8 Port A Port B MHT (one each on three sides) MHY 4 x M5 x 0.8 depth 8 MHW -X MRHQ N J I E A D P A A M N MA 8 C M S R R E O P T 22 8 P A R I R Y 12 G DA R I 25 11 6 6 29 Side A Side B 41 727 Series MRHQ Dimensions MRHQ20 A 48

Cylinder with Lock Series CNS

E1 NX CLS 25 +0.084 0 28 +0.084 0 32 +0.1 0 I-12 I-14 I-16 125 140 160 32 0.1 0.3 36 0.1 0.3 40 0.1 0.3 54 46 100 M30 x 1.5 27 33 L1 U1 54 48 105 M30 x 1.5 30 39 CLQ 60 55 110 M36 x 1.5 34 39 RR1 RLQ MLU MLGP ML1C Clevis Pin/Knuckle Pin l L 5 5 Material: Carbon steel (mm) Applicable bore size (mm) Applicable cotter pin Dd9 Dd9 L l Part no.

CE

66.5 62 6.6 8 39 48 60 133 8 124 12 18 8 16 9 114 10-12-23 Series CE1 Dimensions: 32, 40, 50, 63 Both ends tapped style: CE1B Bore size Stroke 4-N through 8-O thread depth 20 20 2.5 91 500 or 3000 K 7 H G D M E J F C X B + Stroke L Z M A + Stroke E T 2-P (Port size) I Q Metal connector 15.5 M14 x 1 A B C D E F G H I J K Bore size (mm) 32 40 50 63 Standard stroke 50, 75, 100, 125, 150, 175

Compact Guide Cylinder Series MGQ

Series MGQ Bore Size 12 to 25: MGQM, MGQL 4 x YY depth YL X W + Stroke Z 4 x MM depth ML 4 x NN through 2 x P PW DB DA U H V R T 2 GB GA C + Stroke L Q 8 B + Stroke TA TB S K J E G A + Stroke MGQM, MGQL Common Dimensions (mm) NN P TN TF Nil Bore size Standard stroke (mm) B C DA G GA GB H J K L MM ML PW Q R (mm) 12 16 20 25 39 29 6 29 11 7.5 58 16 13 18 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 14 48

Air Slide Table Series MXJ

Operating port 2 x M3 x 0.5 (Not plugged in the case of the clean series) J I 12 Z ZZ H G 3 +0.03 0 depth 2 GA A 19 3.3 3.5 A 5.8 D4 x M4 x 0.7 3 4 3 +0.05 0 depth 2.5 A-A -X Model G GA H I J K M Z ZZ MXJ8-5 MXJ8-10 MXJ8-15 MXJ8-20 12 18 17 6 17 28.5 44.5 38 45 Individual -X 12 18 17 6 17 28.5 44.5 38 45 19 28 20 8 25 39.5 54.5 48 55 19 28 20 8 25 39.5 54.5 48 55 181 Series MXJ Dimensions

Soft Start-up Valve AV2000/3000/4000/5000 1

36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 115 98 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74