Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

to 550 12 to 330 6 to 180 24 to 750 16 to 500 8 to 250 30 to 1140 20 to 760 10 to 300 range 801 to 900 24 to 610 16 to 410 8 to 200 30 to 930 20 to 620 10 to 300 901 to 1000 24 to 500 16 to 340 8 to 170 30 to 780 20 to 520 10 to 250 1001 to 1100 30 to 660 20 to 440 10 to 220 1101 to 1200 30 to 570 20 to 380 10 to 190 Speed [mm/s] *1 to 400 10 to 700 5 to 360 20 to 900 12 to 600 6 to 300 24

Rotary Gripper Series MRHQ

) 3 Series MRHQ Rotary Gripper Gripping Point Limitation range of gripping point External gripping Graph 1 External gripping Internal gripping MRHQ10 MRHQ10 60 60 50 50 Pressure 0.2MPa Pressure 0.2MPa 40 40 Overhang H mm Overhang H mm 0.3MPa 0.3MPa 0.3MPa 0.3MPa 30 30 0.4MPa 0.4MPa 0.4MPa 0.4MPa 0.5MPa 0.5MPa 0.5MPa 0.5MPa 20 20 0.6MPa 0.6MPa 0.6MPa 0.6MPa 10 10 H 0 10 20 30 40 50 0 10 20

High-precision Digital Pressure Switch ( compatible)

(Er0, 4, 6, 7, 8, 9) is displayed. (2) Check if the power supply voltage is in the range 12 to 30 VDC. (2) Supply power in the range "HHH" is 6 12 to 30 VDC. displayed. (1) Reset applied pressure to (1) Check if the pressure exceeds the a level within the set pressure range.

0.4

Perform the piping work after checking the port indication. 4(A) 2(B) 4(A) 2(B) 438 A Plug-in Unit Base Mounted VQ1000 Series SV How to Order Valves SYJ [Option] SZ VQ 30 1 0 0 1 5 1 VF VP4 VQ1000 series Conforming to UL standard VQ 1/2 VQ 1/2 Manual override Type of actuation Seal VQ 4/5 0 1 Metal seal Rubber seal Nil: Non-locking push type (Tool required) 2-position single 4-position dual

Support Guide/11-LEFG Series

The load factor for each direction can be obtained as follows. x = 0/400 = 0 y = 50/250 = 0.2 z = 200/1500 = 0.13 5. x + y + z = 0.33 1 LC3F2 2000 1000 2000 800 1500 1500 Lz 600 L1 [mm] L3 [mm] L2 [mm] 1000 1000 400 Ly 500 500 200 Lx 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 61 Support Guide 11-LEFG Series 11-LEFG16, 25

0.4

P Note 1) U S U S U S w U S U S AXT100-1-J 20 Note 1) AXT100-1-F Note 1) e Note 1) Top entry connector for FU, PU, JU while side entry connector for FS, JS, PS.

LEJ-OM002xx

Table4-1.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

1 C G LJ1 10 S W X10 Guide type Slider guide S X10 Non-standard motor Series Limit switch Series 10 Series 20 Series 30 10 20 30 Cable entry direction Nil None B contact specification 2 pcs.

Stainless Steel 316 Fittings

25.3 23.3 26.7 28.1 29.7 30.1 33.5 29.7 30.1 33.5 31.3 31.7 35.1 31.3 31.7 35.1 33.1 36.3 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2 10 14 10 14 10 14 16.3 19.1 16.3 19.1 17.8 20.6 20.2 22 23 2.5 4 1.8 1.6 d 5 8 Applicable tube 3 4 2.3 2.6 H1 H2 4 6 3.3 6 5.8 10 M A L 14 6 8 5.3 6.6 14 17 Connection thread 17 25 17 7.5 10 6.8 30 22 27.1 7.6

Guide Table Series MGF ø40, ø63, ø100 1

Bore size/ Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

0.55

(A) 2 1/8 1/4 4.2 12 1 (P) 3 (R) VPA500 N.O. Base mounted Body ported (A) 2 1/4 3/8 12 P. 25 8.9 1 (P) 3 (R) VPA700 For vacuum N.C./N.O. (A) 2 3/8 1/2 15.3 12 Air operated valve 1 (P) 3 (R) VPA300 N.C. (A) 2 12 1/8 1/4 3.8 1 (P) 3 (R) N.O. (A) 2 12 VPA500 1 (P) 3 (R) 1/4 3/8 P. 30 8.8 For vacuum N.C.

Rotary Table

absorber) 2 8 Compact hexagon nut 2 7 Pinion 1 6 Piston 2 5 End cover 1 4 Seal 1 3 Plate 1 2 Cover 1 1 Body 1 No Description Qty Note . 19 - MSQB70200 (Adjustment bolt type, Internal shock absorber type) 30 Product label 1 29 Plug 2 28 Steel ball 2 27 Seal washer 2 26 Parallel key 1 25 Type CS retaining ring 2 24 Hexagon socket head cap screw 8 23 Hexagon socket head cap screw 6 22 Hexagon

Series VCS

VCS414 VCS415 VCS 17 1 0 5 1 5 20 1 5 1 0 25 20 1 5 30 25 25 2.

PFxx-OMU0002

Approx. 1.1 mm Insulator Colours Brown, blue, black, white Sheath Finish O.D. 4 71 No.PF-OMU0002-D Characteristics data Flow rate/ Analogue output 0 L/min A 2 B 0 L/min C 2 D Voltage output (1 to 5 V) 1 1 V 1.04 V 5 V Voltage output (0 to 10 V) 1, 3 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range *4 Maximum value of rated flow range PF3A703H 30

High Purity Chemical Valve

19 110.5 112.5 37 26 37 Rc 1/4, 3/8, NPT 1/4, 3/8 M6 x 1 46 60 99 16 20.5 138 142 47.5 33.5 50 Rc 3/8, 1/2, NPT 3/8, 1/2 M8 x 1.25 30 36 55 44 11 10 75.5 77 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 30 36 58.5 44 14.5 10 79 80.5 4 20 37 3.5 27 Rc 1/4, NPT 1/4

Low-Speed Rotary Actuator

1 17 Type CS retaining ring 2 16 Bearing 2 15 Cross recessed No.0 screw 1 14 Cross recessed No.0 screw 4 13 Hexagon socket head screw 8 12 Adjust bolt 2 11 Hexagon nut 2 10 Magnet 2 Only magnet built-in type included 9 Wearing 4 8 Seal retainer 2 7 Bearing retainer 1 6 Shaft 1 5 Piston 2 4 End cover 1 3 Plate 1 2 Cover 1 1 Body 1 No Description Qty Note . -21- Size 20, 30, 40 24 Heat transferred

ZR

1.5 7.5 7.5 4.5 2-Rc 1/2 EXH port 2-M5 PD port Air supply pressure port Rc 1/8 PV port Air supply pressure port Rc 1/8 PV port Common vacuum release pressure port Common pilot supply port 2-M5 PS port Common exhaust port Common pillot valve supply pressure port 2-Rc 1/8 PV port Stations (mm) 6 5 217 236 4 184 203 3 151 170 2 118 137 1 85 104 Symbol L1 52 71 L2 13-3-30 30 Series ZR Large Size

Vacuum Pad

Inlet Flat with groove Pad type Pad Unit ZP3-T10UM;-A12-B5 [Weight: 18.8 g] ZP3-T13UM;-A12-B5 [Weight: 18.9 g] ZP3-T16UM;-A12-B5 [Weight: 19.0 g] M5 x 0.8 M5 x 0.8 M5 x 0.8 Vertical With Adapter: Vacuum Inlet Width across flat 14 Width across flat 14 Width across flat 14 5 5 5 2 2 7 2 2 2 2 12 18 18 12 18 12 Vertical M12 x 1 M12 x 1 M12 x 1 Vertical 30 30 30 Width across flat 14 Width across

Vacuum Pad

Inlet Flat with groove Pad type Pad Unit ZP3-T10UM;-A12-B5 [Weight: 18.8 g] ZP3-T13UM;-A12-B5 [Weight: 18.9 g] ZP3-T16UM;-A12-B5 [Weight: 19.0 g] M5 x 0.8 M5 x 0.8 M5 x 0.8 Vertical With Adapter: Vacuum Inlet Width across flat 14 Width across flat 14 Width across flat 14 5 5 5 2 2 7 2 2 2 2 12 18 18 12 18 12 Vertical M12 x 1 M12 x 1 M12 x 1 Vertical 30 30 30 Width across flat 14 Width across

Vacuum Pad

Inlet Flat with groove Pad type Pad Unit ZP3-T10UM;-A12-B5 [Weight: 18.8 g] ZP3-T13UM;-A12-B5 [Weight: 18.9 g] ZP3-T16UM;-A12-B5 [Weight: 19.0 g] M5 x 0.8 M5 x 0.8 M5 x 0.8 Vertical With Adapter: Vacuum Inlet Width across flat 14 Width across flat 14 Width across flat 14 5 5 5 2 2 7 2 2 2 2 12 18 18 12 18 12 Vertical M12 x 1 M12 x 1 M12 x 1 Vertical 30 30 30 Width across flat 14 Width across