Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Coupling Motor 35 12 34 50 37 8 Section AA (Housing interior) Coupling mounting dimensions 143 Series LJ1 Clean Room Specification/Dust Seal Specification Series LJ1H S10 Motor mounting area dimensions Mitsubishi Electric Corporation Yaskawa Electric Corporation M4 x 0.7 8 2 46 Manufacturer Matsushita Electric Industrial Co., Ltd. 34 19.2 Housing D Thread size M3 x 0.5 6 4 45 B Effective

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Both ends, 0 to 5mm each Metal stopper Reed switches (2 wire, 3 wire) Solid state switches (2 wire, 3 wire) 2 color indication solid state switches (2 wire, 3 wire) Auto switches +1 0 mm Stroke length tolerance Theoretical Output MXP16 (N) Operating pressure (MPa) Cylinder bore size (mm) 6 10 12 16 Piston area (mm) 0.2 6 16 23 40 0.5 14 40 57 101 0.7 20 55 79 141 0.4 11 32 45 80 0.3 8 24 34

Air Cylinder NCM Series Stainless Steel Cylinders

a) .250 \-24 0.50 .624 .621 0.25 0.86 0.38 it-l6 .251 .zfi 0.75 0.25 o.34 It.oo o.75 o.62 o.12 # 1 8 o.75 1-?

Digital Flow Switches Series PF2A

PF2A5--2 (With voltage output type) PF2A511, 521, 551 B Wiring 116 23 1.6 76.2 Brown (1) DC(+) Main circuit Black (4) OUT (Output for display unit) White (2) NC/Analog output 54 44 34 Blue (3) DC() Use this sensor by connecting it to a P/A remote type display unit Series PF2A2/3. 4-4.5 2-Port size 30 40 50 Connector pin numbers 2 1 (44.2) A 4 3 (mm) A B Output specification Pin no.

REFRIGERATION AIR DRYERS, AIR COOLING SYSTEM, Series PDE

[F/C] +100 (+115) / +37.8 (+45) Nominal inlet air pressure [psig / bar] 34 / 7 Max. inlet air pressure [psig / bar] 232 / 16 Exit pressure drop p [psig / bar] 2.9 / 0.2 Inlet outlet connections NPT-F 1/2 3/4 1 Type of refrigerant HFA 134.a Refrigerant loading [oz / gr] 7.1 / 200 9.7 / 7.1 / 11.5 / 325 275 200 Nominal electric absorption [A / W] 2.2 / 170 2.7 / 210 3.3 / 250 4.3 / 330 5.9

Antistatic One-touch Fittings Series KA

M5, M6 M5, M6 Soft nylon Polyurethane KAY23-M5 15 9.6 28.5 15.5 M5 0.8 M6 1.0 8 8 8 15.5 19.5 33 3.4 2.9 9 3.2 1 8 KAY23-M6 KAY23-U01 10 17.5 10 KAY04-M5 M5 0.8 M6 1.0 15.5 KAY04-M6 16 18 18.5 8 29.5 4.6 4.6 6 8 10.4 16 4 1 8 KAY04-U01 20 1 4 KAY04-U02 22 34 34.5 15 6.4 6.4 9 14 10 10 18 KAY06-M5 M5 0.8 M6 1.0 16 KAY06-M6 16.5 20 20.5 32 8 4.6 4.6 8 8 17 1 8 KAY06-U01 3 8 KAY06-U03 24 23

Pneumatic Transfer System Series MF

Pv P>Pv n>1 Determination of load factor (n) For MFT32 Pmv m>mv (Refer to pages 32 through 34

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note 3) When specifying more than one option, enter symbols in alphabetical order. 15 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (Terminal Block Box Kit) T 83 29.5 29.5 2-1/8 (pilot EXH. port) 12 21 47.5 36 PE R1 5 R2 3 P 1 SMC 6-3/4 Ports P (SUP), R (EXH) 2-G3/4 Conduit port 144.5 143 112.5 83.5 179 46.8 59.2 106 9 9 U side 55.5 M5 ground screw 19 34.5 34 n 12 X 2n-3

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

or less 14.4 (0.8) VQ2301 44 or less 110 Metal seal 29 or less 12.6 (0.7) VQ2400 38 or less Exhaust center Rubber seal 34 or less 14.4 (0.8) VQ2401 44 or less Metal seal 29 or less 12.6 (0.7) VQ2500 38 or less Pressure center Rubber seal 34 or less 14.4 (0.8) VQ2501 44 or less Note 1) Values are for cylinder port sizes C6 (VQ1000) and C8 (VQ2000) without back pressure check valve.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

Precautions 1

Side Flange Style (F) CV CVM5F Bore size Stroke MVGQ Max. 21 Min. 18 Manual override Width across flats B2 Width across flats B1 x Mounting hole Width across flats NA x In the case of 40 Mounting hole S + Stroke ZZ + Stroke In the case of 20 to 32 (mm) HX H2 H1 H FZ FY FX Eh8 FT FD F D C2 B2 B1 B AL A Stroke range Bore size (mm) 20 25 32 40 0 0.033 65.3 8 5 41 75 60 4 7 13 8 30 26 13 34

Digital Pressure Switch

OUT1 ON : Green OUT1 OFF: Red -28No.PS-OMU0003-D [F 2] Setting of OUT2 Page 34 Same setting as [F 1] OUT1.

Digital Pressure Switch

(Refer to page 34 for details.) -33No.PS-OMS0007-H Auto-preset When auto-preset is selected in function selection mode, the set value can be calculated and memorized from the measured pressure.

LJ1H

Actuator Series LJ1H High Rigidity Direct Acting Guide Lead screw lead mm Mounting Series Motor type Guide type Page Model orientation Ground ball screw Rolled ball screw 12 10 20 12 10 20 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 Page 2 to Horizontal Page 6 to High rigidity direct acting guide 25 25 Page 14 to Standard LJ1H motor 8 12 8 12 Page 18 to 5 10 5 10 Vertical Page 26 to 10 10 Page 34

30

34 38 38 38 44.5 44.5 8 9 9 13 13 13 15 15 0.5 0.5 0.5 0.75 0.75 0.75 1 1 300 800 800 1250 1250 1250 3100 3100 0.03 0.05 0.05 0.11 0.11 0.11 0.22 0.22 JC20-8-100 JC25-10-150 JC32-10-100 JC40-12-125 JC40-12-150 JC40-12-175 JC50-16-150 JC63-16-200 8 10 10 12 12 12 16 16 1 1.5 1 1.25 1.5 1.75 1.5 2 D-X Technical Data 1139 JC Series Dimensions of Accessories Rod end nut (mm) d: Thread nominal

44

13.8 15.6 13.8 15.6 16 17.8 20.4 10 14 10 14 12 16 20 24 27 38 41 51 37 41 50 41 45 57 42 43 53 72 78 KA 4 2.5 1.8 1.6 10 8 13.5 5 4 3 KQG2 2.3 2.6 Applicable tubing L1 M 6 4 6 10 10 15 5.8 3.3 KG H1 12 d 8 6 KFG2 KFG2 5.3 12 14 17.4 6.6 16 22.2 A L2 23 H2 MS 25.6 10 7.5 6.8 26 Connection thread 27.5 15 17 20.9 7.6 KKA 27 25.6 10 8 7.3 30 KP 27.5 27 25.6 12 9 8 LQ 35 27.5 16 17 23.5 8.5 34

Fieldbus System

3 2 1 n DIN rail clamping screw C8: 8 One-touch fitting C8 [3(R) EXH port] DIN rail clamping screw (12) 30 56.6 8 R R 11.5 63.5 62.5 3 3 12 X 12 X 40.5 B B B B B B B B P P 25 1 A 1 A A A A A A A 18.5 7.5 9.5 7.5 C3, C4, C6, M5 [4(A), 2(B) port] C8: 8 One-touch fitting C8 [1(P) SUP port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 20.5 P = 10.5 34

Suction Filter with Case FH99 Series

View port View port G1/2 Refer to page 529 for Microswitch for differential pressure indication switch. 504 A Suction Filter with Case FH99 Series Dimensions Differential pressure indication switch Blanking cap Differential pressure indicator 8 x T 16 (65) N I (34) E F U OUT X H O 62 B U U R S 4 x K OUT OUT Q P IN Differential pressure indicator Differential pressure indication switch G

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The