I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 34 41 42 10.3 12.8 12 25 30 30 10.3 12.8 12 + 0.058 0 -0.2 -0.4 8 8 -0.2 -0.4 10 -0.3 -0.5 18 16 20 22 34 41 42 11.5 14 14 20 25, 32 40 8.5 10.5 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 16 20 22 8 10 10 16 20 36 21 25.6 41.6 11.5 14 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 25 30 30 8.5 10.5 16 + 0.4 + 0.2 8 IY-G02 IY-G03 IY-G04 20 25, 32 40 + 0.058 0 10 + 0.058 0 10
N Backlash Manual unlocking Theoretical Output 12 16 20 40 Rear end only 125 211 29 53 82 329 1mm Non-locking type only Standard Strokes (N) Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm) Bore size (mm) Standard stroke (mm) 0.2 10 8 23 17 40 30 63 47 98 72 161 121 251 188 0.4 20 15 45 34 80 60 126 94 196 143 322 241 502 377 0.3 15 11 34 25 60 45 94 71 147 107
XB T-slot dimensions (mm) DM HN XAH7 XC XL Bore size (m) a b c d e End lock mechanism (locking type manual release ) 6.5 10.5 5.5 3.5 9.5 32 Section XX detailed diagram 6.5 10.5 5.5 4 11 40 8.5 13.5 7.5 4.5 13.5 50 11 17.8 10 7 18.5 63 LL With rear lock (mm) Standard strokes (mm) Bore size (mm) ML NN OA B C DA FA FB G GA GB GC H HA J K L MM 84.5 62.5 16 12 10 48 12.5 9 12.5 112 M6 24 24 34
46 DC 70 86 DO 82 102 M 2 3 B 70 86 K 10 11 AC 3 4 J 24 28 AA 55 66 AB 52 62 NA 18 24 L 4H9 6H9 NB 10h9 12h9 CA 9 12 CB 20 22 0 -0.036 0 -0.043 +0.030 0 +0.030 0 Model MHS2-50D MHS2-63D SC 12 14 RB 34 38 O 5 5.5 4H9 5H9 VA Q 14 17 RA 52 66 VB 4 5 WA WB 2 2.5 XA XB 4 5 YC 7 7.5 +0.030 0 +0.030 0 +0.074 0 +0.074 0 +0.030 0 +0.030 0 52H9 65H9 4H9 5H9 7
15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 12.7 12.3 7 25 25.8 22.2 9.6 28.6 M5 x 0.8 8 13.5 11.7 12.7 17 32.1 31.1 27.1 36.1 14.2 14.3 R1/8 12 13.5 18.5 16 17 18.5 21.0 19 32 18.2 18.5 R1/4 17 34.4 35.4 29.4 40.4 34
D-F9NW/F9NWV DC (+) Brown Switch main circuit Switch main circuit OUT Black Weight Table Unit: g DC () Blue D-F9NW(V) D-F9PW(V) D-F9BW(V) Auto switch part no. 0.5 7 7 7 Lead wire length (m) 3 34 34 32 D-F9PW/F9PWV 5 56 56 52 DC (+) Brown Dimensions Unit: mm OUT Black D-F9W Mounting screw M2.5 x 4l Slotted set screw DC () Blue Indicator light 2.7 2 D-F9BW/F9BWV 22 2.8 2.6 OUT (+) Brown 4 Switch
Coupling Motor 35 12 34 50 37 8 Section AA (Housing interior) Coupling mounting dimensions 143 Series LJ1 Clean Room Specification/Dust Seal Specification Series LJ1H S10 Motor mounting area dimensions Mitsubishi Electric Corporation Yaskawa Electric Corporation M4 x 0.7 8 2 46 Manufacturer Matsushita Electric Industrial Co., Ltd. 34 19.2 Housing D Thread size M3 x 0.5 6 4 45 B Effective
Both ends, 0 to 5mm each Metal stopper Reed switches (2 wire, 3 wire) Solid state switches (2 wire, 3 wire) 2 color indication solid state switches (2 wire, 3 wire) Auto switches +1 0 mm Stroke length tolerance Theoretical Output MXP16 (N) Operating pressure (MPa) Cylinder bore size (mm) 6 10 12 16 Piston area (mm) 0.2 6 16 23 40 0.5 14 40 57 101 0.7 20 55 79 141 0.4 11 32 45 80 0.3 8 24 34
a) .250 \-24 0.50 .624 .621 0.25 0.86 0.38 it-l6 .251 .zfi 0.75 0.25 o.34 It.oo o.75 o.62 o.12 # 1 8 o.75 1-?
PF2A5--2 (With voltage output type) PF2A511, 521, 551 B Wiring 116 23 1.6 76.2 Brown (1) DC(+) Main circuit Black (4) OUT (Output for display unit) White (2) NC/Analog output 54 44 34 Blue (3) DC() Use this sensor by connecting it to a P/A remote type display unit Series PF2A2/3. 4-4.5 2-Port size 30 40 50 Connector pin numbers 2 1 (44.2) A 4 3 (mm) A B Output specification Pin no.
[F/C] +100 (+115) / +37.8 (+45) Nominal inlet air pressure [psig / bar] 34 / 7 Max. inlet air pressure [psig / bar] 232 / 16 Exit pressure drop p [psig / bar] 2.9 / 0.2 Inlet outlet connections NPT-F 1/2 3/4 1 Type of refrigerant HFA 134.a Refrigerant loading [oz / gr] 7.1 / 200 9.7 / 7.1 / 11.5 / 325 275 200 Nominal electric absorption [A / W] 2.2 / 170 2.7 / 210 3.3 / 250 4.3 / 330 5.9
M5, M6 M5, M6 Soft nylon Polyurethane KAY23-M5 15 9.6 28.5 15.5 M5 0.8 M6 1.0 8 8 8 15.5 19.5 33 3.4 2.9 9 3.2 1 8 KAY23-M6 KAY23-U01 10 17.5 10 KAY04-M5 M5 0.8 M6 1.0 15.5 KAY04-M6 16 18 18.5 8 29.5 4.6 4.6 6 8 10.4 16 4 1 8 KAY04-U01 20 1 4 KAY04-U02 22 34 34.5 15 6.4 6.4 9 14 10 10 18 KAY06-M5 M5 0.8 M6 1.0 16 KAY06-M6 16.5 20 20.5 32 8 4.6 4.6 8 8 17 1 8 KAY06-U01 3 8 KAY06-U03 24 23
Pv P>Pv n>1 Determination of load factor (n) For MFT32 P
Note 3) When specifying more than one option, enter symbols in alphabetical order. 15 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (Terminal Block Box Kit) T 83 29.5 29.5 2-1/8 (pilot EXH. port) 12 21 47.5 36 PE R1 5 R2 3 P 1 SMC 6-3/4 Ports P (SUP), R (EXH) 2-G3/4 Conduit port 144.5 143 112.5 83.5 179 46.8 59.2 106 9 9 U side 55.5 M5 ground screw 19 34.5 34 n 12 X 2n-3
or less 14.4 (0.8) VQ2301 44 or less 110 Metal seal 29 or less 12.6 (0.7) VQ2400 38 or less Exhaust center Rubber seal 34 or less 14.4 (0.8) VQ2401 44 or less Metal seal 29 or less 12.6 (0.7) VQ2500 38 or less Pressure center Rubber seal 34 or less 14.4 (0.8) VQ2501 44 or less Note 1) Values are for cylinder port sizes C6 (VQ1000) and C8 (VQ2000) without back pressure check valve.
Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.
Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68
Side Flange Style (F) CV CVM5F Bore size Stroke MVGQ Max. 21 Min. 18 Manual override Width across flats B2 Width across flats B1 x Mounting hole Width across flats NA x In the case of 40 Mounting hole S + Stroke ZZ + Stroke In the case of 20 to 32 (mm) HX H2 H1 H FZ FY FX Eh8 FT FD F D C2 B2 B1 B AL A Stroke range Bore size (mm) 20 25 32 40 0 0.033 65.3 8 5 41 75 60 4 7 13 8 30 26 13 34
OUT1 ON : Green OUT1 OFF: Red -28No.PS-OMU0003-D [F 2] Setting of OUT2 Page 34 Same setting as [F 1] OUT1.
(Refer to page 34 for details.) -33No.PS-OMS0007-H Auto-preset When auto-preset is selected in function selection mode, the set value can be calculated and memorized from the measured pressure.