SMC Corporation of America
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PD (vacuum breaking pressure port) Breaking flow adjustment needle M5 port PS (pilot valve supply pressure port) 1 Spacer A PE 2.5 Valve unit Attachment D 1 85 80 PD Rc(PT) 1/8 port PV (vacuum pump connection port) SMC 2-4.2 (mounting hole) PS 51.5 41.5 2 20 32.5 27.5 Filter block D 16.5 16 PV 2 8 13 3 1.5 Adapter G 1 4 Bracket A Bracket A 128.7 100.8 (9.8) 4.5 Rc(PT) 1/8 port V (vacuum

time/ Applicable compressor Manual button Nil 2 sec/min (1 cycle/min) /3.7 to 37 kW 4 sec/min (2 cycle/min) /37 to 75 kW 6 sec/min (3 cycle/min) /75 to 110 kW 8 sec/min (4 cycle/min) /220 to 370 kW 4 Component Parts Replacement Parts 6 8 Part no.

Wiring 1) Pass them through the cable (8) in the order of cable ground (5), washer (6), rubber seal (7), and then insert into the housing (4). 2) Dimensions of the cable (8) are the figure as below. Skin the cable and crimp the crimped terminal (9) to the edges. 3) Remove the screw with washer (3e) from the bracket (3e). (Loosen in the case of Y shape type terminal.)

IFW5 10 03 N 1 1 PSE Z I SE3 Diaphragm style flow switch PS Light 0 None Z I SE1 2 1 With neon light (110 VAC, Red) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 With neon light (110 VAC, Green) Flow range ZSP 3 With neon light (220 VAC, Red) Low flow setting

110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF) 2B (JIS 10kFF) 3B (JIS 10kFF) 4B (JIS 10kFF) 4B (JIS 10kFF) 14-16-2

80 133 177 44 70 11 M8 x 25 70 290 2.7 34.5 43.2 128 95 185 234 49 86 15 M10 x 30 86 340 4.6 49.1 61.1 152 110 214 268.5 54.5 100 15 M12 x 35 102 370 6.1 77.1 9.5 176 125 220 290.5 70.5 120 15 M12 x 35 130 410 90.0 8.0 102.6 14.0 224 155 280 364.5 84.5 150 15 M16 x 40 166 490 115.4 13.5 501

V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) Class B G C D, T S S L, Z Note) Be sure to read this before handling the products.

Made to order options (see Page 55) Low temperatureresistant (XB6) resistant Modification of rod end auto switch Page P 8 P 1 7 P32 fechnical Data Auto switch guide P 4 6 P 3 8 ?

Dryers Code By-Pass PDE 3 5 -S 1/2" 2240GBP301 PDE 8 15 -S 3/4" 2240GBP302 PDE 20-S 1 2240GBP303 In realising the dryer, particular measures have been taken in order to limit the vibration which could occur during the operation.

URJ1/4 TSJ1/4 SUS630SUS304 () 51 g 51 g 48 g 47 g 54 g 46 g () 77 g 78 g 74 g 65 g 81 g 72 g +40 g 110 -5Pam 3/s 110 -10Pam 3/s 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0008CN-D 02 48.4 N02 48.9 42.6 7 M50.8 5 02R1/4 N02NPT1/4 -79No.PS-OMU0008CN-D F02 C01 M50.8 5 Rc1/8 G1/4 A2 B2 URJ1/4 TSG1/4 -80No.PS-OMU0008CN-D 02L 22.6 12 M50.8 5 02R1/4 N02LNPT1/4 -81No.PS-OMU0008CN-D

suitable to their rated voltage specifications. 2) Stand alone controllers can be programmed from the 8 front panel function keys. 3) All Pneu Alpha controllers have a CD-ROM supplied giving full instructions together with Hardware, Software & Programming manuals. 4) If you have any questions regarding the CD-ROM please contact your nearest SMC Regional Centre. 20(12/8) 10(6/4) 6(4/2) I/O

A 24 VK M5 thread 8 deep, with or without insert depending on base material. VZ 32 VF A' VFR Coding stud.

A 24 VK M5 thread 8 deep, with or without insert depending on base material. VZ 32 VF A' VFR Coding stud. M5 x 10 DIN913-45H VP4 12 2 8 VZS G 1/4 DIN/ISO228/1 M5 Drive flange face VFS VS4 19.5 5.5 Solenoid valve flange face O-ring 16 x 2 VQ7 1.5 3 EVS VFN The solenoid valve can be attached with 2 mounting bolts.

(Where the load voltage is 110 VAC) When the load voltage is increased by more than 10% to the rating of applicable auto switches (except D-A73C/A80C/C73C/C80C/90/97/A79W) above, use a contact protection box (CD-P11) to reduce the upper limit of the load current by 10% so that it can be set within the range of the load current range, 110 VAC.

) 02 D type DIN connector D Rated coil voltage 3/8 (AVL3000) 03 Port size D type DIN connector with indicator light & suppressor Manual lockout Nil 3(R) DZ 1/2 (AVL4000) 04 B A G 100VAC (50/60Hz) 1 3/4 (AVL5000) 06 D type DIN connector with M12 connector, indicator light & surge voltage suppressor AVL2000 push button protrudes by 1mm over the body. 200VAC (50/60Hz) 2 DZM 1 (AVL5000) 10 110

130 315 Rc 3/4 515 325 485 Note: The diagram above is drawn base on IDFS6E dimension with scale 1:6. 14-18-8 9 The models IDF1E to 11E and IDU3E to 6E have been revised.

105 126 32 90 110 105 126 4 CKZT -X2797 -X2798 Dimensions: Clamp Arm CKZT25-A000 S-X2797 C R L L: Left 26 18 52 40 16 C: Center R: Right 200.1 2 x 4H7 through 200.02 (8) 28 2 x 6.5 through 93 44 10 200.1 5 CKZT -X2797 -X2798 Model Selection Relation between arm length and clamping force Arm length Clamp arm Shim Clamping block Extension arm Fulcrum Load cell Bore Size: 25 Bore Size:32 270

Typically 1/8 turn past finger tight of the nut. 6. Connect tube welds. Follow the industry standards (refer to SEMI F78) to weld the piping. 7. Connect compression fittings. Follow the procedures, recommended from the fitting manufacturer, to connect properly. Typically 1-1/4 turn past finger tight of the nut after inserting the tube into the fitting. 8. Connect NPT thread fittings.

Rc(NPT)3/8 22 to 24 Nm 3 DC(-) 2 4 Rc(NPT)1/2 28 to 30 Nm These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of "Caution", "Warning" or "Danger".