New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

0oi q w e r t y u i !1 !2 No.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

Ball bushing O-ring NBR Snap ring Nickel plated Carbon tool steel Rod end nut Nickel plated Steel Mounting nut Steel 12 Series MQM Dimensions Basic type: MQMLB 6 Mounting nut M12 x 1 Rod end nut 2-M5 x 0.8 15 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F F S + Stroke H ZZ + Stroke (mm) P Bore

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

5 5 120 130 5 5 Driver input/output signal list (CN-1/F connector) Driver dimensions For LJ1, LG1, LX Pin no.

CV/MVGQ

Mounting style B L F Basic style Axial foot style Rod side flange style Type R, U: DC only In the case of AC, since the rectifier prevents the production of surge voltage, there is no type S.

Regulator for 2 MPa Series ARX20

0.05 to 0.85 MPa 0.05 to 0.30 MPa 0 1 ARX21 Nil F Note 1) Thread type (2) G Pressure gauge ARX20N Rc NPT G Nil N F ARX21N P Port size Panel nut 01 02 1/8 1/4 Option combination numbers Panel nut is also included with B.

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

2/3 Port Solenoid Valve for Chemicals

1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No. Material Part list/LVM13R, 14R, 16R, 115 !2 !0 Plate 1 PEEK/PFA !1 Diaphragm assembly 2 EPDM/FKM/Kalrez Body 3 PBT Slide bush assembly 4 POM/Stainless steel y Armature assembly 5 Stainless steel/PBT Coil assembly 6 t Sleeve 7 Iron u Spacer 8 i !

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No. Material Part list/LVM13R, 14R, 16R, 115 !2 !0 Plate 1 PEEK/PFA !1 Diaphragm assembly 2 EPDM/FKM/Kalrez Body 3 PBT Slide bush assembly 4 POM/Stainless steel y Armature assembly 5 Stainless steel/PBT Coil assembly 6 t Sleeve 7 Iron u Spacer 8 i !

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Rated voltage Electrical entry U, Z spec.

ZX

unit (F) E P F Model ZX100 K6 Circuit diagram (Circuits other than those with vacuum switch are shown as below.)

MXQ

6 r u y w !

MXS

5 u !9 !7 !8 w e q !1 !0 !6 CL MLGC r CNA !2 !3 t !

SMC Pneumatic Clean Series

A 1.5 F H S + Stroke 20 Non-lock manual release type K (This drawing shows the cases of 20 and 25.)

Digital Pressure Switch

Other parameter settings Item Page Default setting [F 3] Response time page 30 2.5 ms [F 4] Display resolution page 31 1000-split [F 5] Auto-preset function page 32 Manual [F 6] Fine adjustment of display value page 34 0% [F 7] Power saving mode page 35 OFF [F 8] Security code page 36 OFF [F90] Setting of all functions page 37 OFF [F97] Copy function page 39 OFF [F98] Check of output page

Digital Pressure Switch

Other parameter settings Item Page Default setting [F 3] Response time page 29 Digital filter:1 s Delay time: 4 ms [F 4] Display resolution page 32 Depends on the specification of the special product [F 5] Auto-preset function page 33 Manual [F 6] Fine adjustment of display value page 35 0% [F 7] Power saving mode page 36 OFF [F 8] Security code page 37 OFF [F 9] Setting of low-cut function

39

19 19 19 Weight kg 0.5 0.6 0.7 Weight kg 0.5 0.6 0.7 NAAMS code ACA206M ACA207M ACA208M NAAMS code ACA216M ACA217M ACA218M A B C D E F G H I A B C D E F G H I Part no.

CNG

WH BZ I E 0 0.05 H1 TA 4-TC TB AL A K F H C0. 1 C0. 1 NA BC 8-J BN S + Stroke F ZZ + Stroke e 8 f l ZZ + l + Stroke h + l With rod boot (mm) Stroke range with rod boot Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I Standard Long stroke 5.5 6 20 to 200 18 15.5 13 38 93 1/8 14 8 12 2 87 10 (12) 18 4 5 26 to

Cylinder with Lock Series CNG

mounting range GB A F K BN Rc(PT) P TB AL 2-TDe8 (pin O.D.)

Digital Flow Switch

1] Setting of OUT1 (page 28 to) and [F 2] Setting of OUT2 (page 36 to). -22No.PF-OMP0002-H 1.

Digital Flow Switch ( compatible)

Order of function settings Order F number Items Notes 1 F 0 Switching function of reference condition, unit selection function, switch output specifications All models 2 F 1 Setting of OUT1 All models 3 F 2 Setting of OUT2 SW2 output type 4 F 3 Digital filter setting All models 5 F10 Sub screen setting All models 6 F14 Zero cut-off setting All models 7 F20 Setting of external input Model