Compact Vacuum Ejector Series ZQ

0.3 0.4 0.5 0.6 Suction flow (l/min(ANR)) Supply pressure (MPa) ZQ110 Exhaust characteristics ZQ110 Flow characteristics Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 60 -60 -60 50 40 -40 -40 30 Air consumption 20 -20 -20 10 Maximum suction flow Suction flow (l/min(ANR)) 25 20 15

CS1

30 60 20 29 56 49 60 86 25 to 1200 1 M64 X 2 140 330 330 270 400 212 475 23 M30 X 1.5 76 80 30 33 70 96 60 20 30 65 49 to 1200 With auto switch/125 to 200 only (mm) (mm) W/o rod boot W/ rod boot W/o rod boot W/ rod boot Style Bore (mm) Stroke range (mm) Style Bore (mm) S S ZZ e f h ZZ1 H ZZ ZZ1 l 125 140 160 180 200 125 140 160 180 200 250 300 to 1000 98 75 40 110 222 133 0.2 Stroke 245 98

ML2B

Stroke adjusting unit Nil L Without adjusting unit Shock absorber + Adjusting bolt Shock absorber model Type 25 RB1007 32 RB1412 40 RB1412 Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

ML2B

Stroke adjusting unit Nil L Without adjusting unit Shock absorber + Adjusting bolt Shock absorber model Type 25 RB1007 32 RB1412 40 RB1412 Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

ML2B

Stroke adjusting unit Nil L Without adjusting unit Shock absorber + Adjusting bolt Shock absorber model Type 25 RB1007 32 RB1412 40 RB1412 Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

VQ4000

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

PF-OMM0004_C

0.54 L/min 216 L/min 540 L/min 10100 L/min 50250 L/min 3.555.0 L/min ( 3.5 L/min 0.0) 1.722.0 L/min ( 1.7 L/min 0.0) 0.355.50 L/min ( 0.35 L/min 0.00) 20350 L/min ( 20 L/min 0) 7140 L/min ( 7 L/min 0) 0.355.50 L/min 1.722.0 L/min 3.555.0 L/min 7140 L/min 20350 L/min 0.01 L/min 0.1 L/min 1 L/min 2 L/min (50 ms) 0.05 L/pulse 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2 L/pulse 090 () 070 ( ) L

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Applicable bore A J L B C D E F G H 0.25 K 1/4-28 NY-075 0.51 1/4-28 0.94 1.18 0.69 0.25 0.51 0.71 0.16 3/4", 7/8" NY-106 0.51 0.25 5/16-24 5/16-24 0.94 1.18 0.69 0.25 0.51 0.71 0.19 1 1/16" NY-125 0.75 0.38 7/16-20 7/16-20 1.31 1.69 0.94 0.38 0.75 1.02 0.25 1 1/4", 1 1/2" NY-G050 0.75 0.38 1/220 1/2-20 1.32 1.69 0.94 0.38 0.75 1.02 0.31 2" Material: Carbon steel Jam nut (Rod thread) (in)

Refrigerated Air Dryer

, IDF6E-20 IDF8E-20, IDF11E-20 Type 200 V 5 A IDU3E-20, IDU4E-20 IDU6E-20 S Option symbol IDF1E-10 to 11E-10, IDU3E-10 to IDU6E-10 With power cord connection The option allows the connection of a power cord to a terminal block.

Digital Flow Switch (Remote type monitor unit)

series 0.4 to 4 L/min type (PF2D504) 1.8 to 20 L/min type (PF2D520) [04d]: [20d]: [40d]: 4 to 40 L/min type (PF2D540) Press the button.

Compact Guide Cylinder

L 4 x OA through 4 x OB counterbore depth OL (OL) 4 x NN through 2 x P (Plug) U X PW H VA PE T R 2 x P D GB GA S Q 2 x P (Plug) JC K J PD FB FA C + Stroke A + Stroke G [mm] Bore size Standard stroke A C D FA FB G GA GB H J JC K L MM ML NN 50 (40 x 2) 25, 50, 100, 150, 200 63 43.5 18 15.5 4 51 20.5 12.5 148 25.5 9 25.5 37 M8 x 1.25 20 M8 x 1.25 63 (45 x 2) 67.5 48 20 15.5 4 56 24.5 13.5 162

Compact Cylinder/Guide Rod Type Series CQM

-25 -30 CDQMB165 -10 -15 -20 -25 -30 CDQMB205 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB255 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB325 10 15 20 25 30 35 40 45 50 75 -100 CDQMB405 10 15 20 25 30 35 40 45 50 75 -100 CDQMB5010 15 20 25 30 35 40 45 50 75 -100 CDQMB6310 15 20 25 30 35 40 45 50 75 -100 CDQMB8010 15 20 25 30 35 40 45 50 75 -100 CDQMB10010 15 20 25 30 35 40 45 50 75 -100 M8 x 60L

EXxx-OMQ0016

(When L/A IN LED is OFF.) (2)Check that the connectors of L/A IN and L/A OUT communication cables are connected and there are no broken wires. L/A IN or L/A OUT LED is OFF. LINK has not yet been established. (3)Keep noise sources away from the communication cable. 11 : The L/A OUT LED will be OFF if the BUS OUT connector is not used.

DOC1001322

or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7 1 2 3 4 AMC520 102 173.5 193.5 3.2 Depth 8 20 20 30 70 176.5 , 40 70

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Temperature specifications Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6. No. of auto switches/Detecting position Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

PA3000/5000/PAX1000

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Guide Table Series MGF ø40, ø63, ø100 1

40 50 40 DMGF63 Load weight m0 (kg) Load weight m0 (kg) Load weight m (kg) Load weight m (kg) 30 30 20 -X 20 20 MGF40 MGF40 20MGF40 MGF40 10 10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07,08,09,10,11 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 Effective area (mm2) Effective area (mm2) 14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10,11,12 08,09 1000 10 15 8 500 06,07

Peltier-type Chiller Thermo-con/ Compact Type

) [mg/L] 50 or less p Standard item Acid consumption amount (at pH4.8) [mg/L] 50 or less p Total hardness [mg/L] 70 or less p Calcium hardness (CaCO3) [mg/L] 50 or less p Ionic state silica (SiO2) [mg/L] 30 or less p Iron (Fe) [mg/L] 0.3 or less p p Copper (Cu) [mg/L] 0.1 or less p Sulfide ion (S2) [mg/L] Should not be detected. p Ammonium ion (NH4+) [mg/L] 0.1 or less p Residual chlorine