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D Q F S Conduit: C DIN terminal: D E U V U Approx. 280 E 31.5 (44) G1/2 T T G1/2 R R Cable 6 to 12 Applications B B 8 x 18 8 x 18 F F S S Conduit terminal: T (V) (U) E 25 32 G1/2 R T B 8 x 18 F S (mm) Electrical entry Grommet Model Applicable flange Conduit DIN terminal Conduit terminal U 103.5 106 106 B C D A E F H N Q R S N.C.

page 60.) 30 or less Max. operating frequency (Hz) 5 Non-locking push type, push-turn locking slotted type, push-turn locking lever type Manual override (Manual operation) Body ported Individual exhaust for the pilot valve, common exhaust for the pilot and main valve Pilot exhaust method Lubrication Mounting orientation Shock/Vibration resistance (m/s2) Note 2) Not required Unrestricted 150

67 2 x 6.2 (For mounting) NO 2A NC 53 66 12 12 3R NC 1P (1/8) 12(PA) port 11.5 16 115.1 107.1 24 96.5 95.5 32.5 M5 x 0.8 (Breathing hole) 16 X 40 3/8, 1/2 1(P) port 80 03 04 A B For vacuum/VPA744V-13/8, 1/2 2(A) port 40 16 64 3/8, 1/2 3(R) port 24 18 67 2 x 6.2 (For mounting) NO 2A NC 53 66 12 3R NC 1P 1/8 12(PA) port 11.5 16 115.1 24 96.5 95.5 32.5 M5 x 0.8 (Breathing hole) 16 X 40 80 3

B (+) () () (+) 18 18 SOL. A (+) () 19 COM (+) () 19 Station 10 SOL. B (+) () 20 COM (+) () 20 SOL. A (+) () 21 Negative COM. spec. Positive COM. spec. Station 11 SOL. B (+) () 22 SOL. A (+) () 23 Station 12 SOL. B (+) () 24 COM () (+) 25 Special Wiring Specifications (Option) COM () (+) 26 Positive COM. spec. Negative COM. spec. COM.

Value 7 6 5 4 3 2 1 0 Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 1 0-7 All clear output Setting value 00 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 15 14 13 12 11 10 9 8 2 8-15 All hold last state Setting value FF 1 1 1 1 1 1 1 1 00 0 0 0 0 0 0 0 0 Output No. 23 22 21 20 19 18 17 16 23 22 21 20 19 18 17 16 3 16-23 All force output Setting value

Refer to air consumption on page 18. 13 Rotary Actuator Technical Data 1 and 2 Effective Torque/Moment of Inertia Effective Torque Unit: Nm Effective torque values are typical values and are not guaranteed. Use them as guide values in actual applications.

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-14-2 3 Check Valve with One-touch Fitting Series AKH/AKB 3 configurations provide design solutions based on the operating conditions.

M3 x 0.5 18 0.9 M3 x 0.5 39 (Without subplate 18) Base mounted (with sub-plate) 0.089 M5 x 0.8 0.36 0.31 0.089 0.36 0.31 N.O.

-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in connection (Mounting hole) Model A 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12 29 5 50 70.5 30.5 18 12 29 5 50 86.5

50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.! 734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirensio Pad Diameters @2 . s4 .

jlable 1 7 Not availaHe wih monitor oubut 4 18 Not avaihde wilh pressure range 19'--4O' inM ousril combination noi a\,'aihble {:-_J4"-':

50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.! 734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirens , Pad Diameters @2 . s4 .

Return spring A VF4000-18-2-1 VF4000-18-2-1 VF4000-18-1 VS8060-17-2 VF4000-18-1 VFS3000-17-1 5. Return spring A 6. Return spring B 7. Detent assembly 8. Pilot valve assembly SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 6. Return spring B VF4000-18-2-2 VF4000-18-2-2 7.

Specifications Table. 8-1 Specifications Item Specification General Dimensions (W x L x H) in mm 25.5 x 102.4 x 76.5 Weight 150 g Housing materials PBT Maximum number of ejectors 16 Maximum number of sensors 16 Applicable standard CE Marked RoHS directive EN50581:2012 Withstand voltage 500 VAC 1 min.

Refer to air consumption on page 18. 13 Rotary Actuator Technical Data 1 and 2 Effective Torque/Moment of Inertia Effective Torque Unit: Nm Effective torque values are typical values and are not guaranteed. Use them as guide values in actual applications.

MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 2.1{21.4} 2.1{21.4} 4.4{44.9} 7.4{75.5} 7.4{75.5} 18{180} 8 8 10 12 12 16 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 2. Side through hole mounting These conditions could lead to malfunctions.

Y-G02 Y-MU03 A1 8.5 12 L1 25 31 E1 18 L1 25 31 MM M8 x 1.25 M12 x 1.25 NDH10 8 10 MM M8 x 1.25 M12 x 1.25 E1 16 18 A1 8.5 12 Size 20, 25 32, 40 Size 20, 25 32, 40 +0.058 0 +0.058 0 NL 9 10 R1 10.3 4 NZ 16 22 NX 8 11 NO 20.5 24 U1 11.5 14 R1 10.3 10 NX 8 11 NO 20.5 24 U1 11.5 14 NDH10 NL 9 10 Part no. I-G02 I-MU03 Part no.

12 15 95 38 328.5 81 90 19 9 70 12 110 12 35 50 88.5 + 0.070 0 + 0.3 + 0.1 0.032 0.059 263 148 25 16 18 110 49 352 101 105 23 11.5 86 16 130 15 40 59 106 + 0.070 0 + 0.3 + 0.1 0.032 0.059 -X 31.5 297 192 20 25 140 61 403 119 130 28 13.5 102 20 160 18 48 76 112.5 + 0.084 0 + 0.3 + 0.1 0.040 0.073 35.5 309 214 25 25 162 64 430 133 150 36 13.5 116 25 180 18 58 92 139.5 + 0.084 0 + 0.3 + 0.1

(Refer to page 8-30-7 for contact protection box.) 5.5 5.7 Most sensitive position Most sensitive position 2.7 12.5 12.5 8-30-17 18 Reed Switch Direct Mounting Style D-E73A/D-E76A/D-E80A For details about certified products conforming to international standards, visit us at www.smcworld.com.

(Refer to page 8-30-7 for contact protection box.) 5.5 5.7 Most sensitive position Most sensitive position 2.7 12.5 12.5 8-30-17 18 Reed Switch Direct Mounting Style D-E73A/D-E76A/D-E80A For details about certified products conforming to international standards, visit us at www.smcworld.com.