XM, XY

0 Bellows holder (Material: Stainless steel 304) Pilot port S (For initial exhaust) o Bellows (Material: Stainless steel 316L) Pilot port M (For main exhaust) Bellows side exhaust Exterior seal (Maintenance part) e O-ring to move valve S (Material: FKM) t O-ring to fix Valve seal (Maintenance part) w u Valve M (Material: Stainless steel 304) Valve S seal assembly (Maintenance part) y Body

VQ7-6/7-8

0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

VQ7-6/7-8

0 t t r i u w y e q r i w e q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

CJ2X/CUX/CQSX/CQ2X/CM2X

-3-8 20, 25, 32 0.05 0.5 RS Q G RS H A Bore size (mm) Minimum operating pressure (MPa) Minimum operating piston speed (mm/s) Compact Cylinder Series CQSX RZQ 0.03 1 12, 16 MI W S 0.025 0.5 20, 25 10-3-10 CEP1 CE1 Bore size (mm) Minimum operating pressure (MPa) Minimum operating piston speed (mm/s) Compact Cylinder Series CQ2X CE2 ML2B 32, 40 0.025 0.5 50, 63, 80, 100 0.01 0.5 C J G5-S 10-

Air Cylinder

-Q6312-S 325 NCA325-02AQ6311-S NCA325-03-Q6311-S Material Aluminum alloy Aluminum alloy Aluminum alloy Carbon steel Aluminum alloy Aluminum alloy Bronze casting Carbon steel Carbon steel Carbon steel Carbon steel Resin NBR NBR NBR NBR NBR NBR Resin Carbon steel 150 NCA150-02AQ6308-S NCA150-03-Q6308-S 200 NCA200-02AQ6309-S NCA200-03-Q6309-S Please see below for How to Order Cylinder Tube.

Actuator Position Sensor

Y 3 1 R/W 0x003E BDC2 2 R/W SetPoint2 bit(0) 16 bit 3 Y 3 (62) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x003F 2 R/W Mode bit(16) 8 bit 0 Y 5 BDC2 (63) 3 R/W Hysteresis bit(0) 16 bit 10 Y 1 to 400 SetPoint1 bit(16) 16 bit 3 Y 3 1 R/W 0x4000 BDC3 2 R/W SetPoint2 bit(0) 16 bit 3 Y 3 (16384) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x4001 2 R/W Mode bit(16) 8 bit 0 Y 5 BDC3 (16385) 3 R/W Hysteresis bit(0) 16

Cylinder with Lock Series CLS

[Horizontal] 50 Manual release bolt Forward 140 160 60 W SOL.A SOL.B SOL.C Action 180 70 200 80 250 90 ON ON OFF Forward Backward OFF OFF OFF Locked stop Regulator w/check valve 0.5 s or more 0 to 0.5 s ON OFF OFF Unlocked 3 port normally closed ON ON OFF Forward Pressure center Adjustment ON OFF ON Backward OFF OFF OFF Locked stop SOL.A SOL.C SOL.B 0.5 s or more 0 to 0.5 s Caution ON OFF

CJ2X/CUX/CQSX/CQ2X/CM2X

Operates smoothly with minimal stick-slip. 0.01 0.01 0.1 RZQ 1 10 Cylinder operating conditions Particle diameter (m) MI W S 10-CM2XB20-50 CEP1 CJ2XB10-60 CQSXB20-20D Evaluation of air purity inside chamber 100 Air cleaning system Particle concentration (particles/cf) Average speed 0.85 mm/s Average speed 0.88 mm/s 2.0 CE1 Average speed 0.43 mm/s Average speed 0.43 mm/s 2.0 Speed (mm/s) Displacement

CJ2X/CUX/CQSX/CQ2X/CM2X

Operates smoothly with minimal stick-slip. 0.01 0.01 0.1 RZQ 1 10 Cylinder operating conditions Particle diameter (m) MI W S 10-CM2XB20-50 CEP1 CJ2XB10-60 CQSXB20-20D Evaluation of air purity inside chamber 100 Air cleaning system Particle concentration (particles/cf) Average speed 0.85 mm/s Average speed 0.88 mm/s 2.0 CE1 Average speed 0.43 mm/s Average speed 0.43 mm/s 2.0 Speed (mm/s) Displacement

New

Body material: Aluminum, C37, Stainless steel Body material: Resin q q t t w w y u i y u i e e r r o o IN OUT IN OUT !0 !0 Component Parts Component Parts No.

Fieldbus System

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

25.0 062 RB0806 36.5 20.1 29.8 051.5 3.6 46.7 25.2 07 1.4 28.5 090 RB1007 53.5 30.1 45.0 072.5 5.0 67.3 36.3 12 0.9 39.0 128 RB1412 83.5 36.1 70.5 108.0 6.0 73.2 36.2 15 0.9 43.0 178 RB2015 Shock absorber for high load + Adjusting bolt MY3B Bore size Stroke H (Shock absorber stroke) T S EY EC SD E W FC TU Stroke adjusting unit h TT (mm) E EC FC h S SD T TT TU W Shock absorber model EY Applicable

JXCx-OMT0061CN

SW Enable SW SW 12 Unit name W 1 W-AREA1 W 1 AREA ON (mm) W 12 AREA ON + *W 1>=W 2 ,PARA W 1=W 2=0 AREA OFF W 2 W-AREA2 W 2 + ORG Correct * Sensor type * 1 (CC-Link () 1 (CC-Link ) ) () Option 1 1 (1 ) 14 (Occupied number of stations of CC-Link) 2 (2 ) 4 (4 ) CC-Link (CRC ) 11 CC-Link 11 CC-Link CC-Link 0 () UndefineN o.11 0,10 (Operation setting at CC-Link communication

Air Pilot Operated

P & S P A 0 1 1 3 43 y. qB siB s/B s/g 9a SP & SPA 0114 54 B B B B sP & sPA 0115 45 S s 2 MTNG HOLES I .FOOTPRINT' CLASS 1 SUB.PLATE MOUNTED 'SWAY VATVES '49 i.'8 (?

Speed Controller with Indicator

32.7 (32.8) AS221FS-02-08 (S) 8 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FS-02-10 (S) 10 15.9 26.9 36.2 (36.3) 15.6 25 (26) AS321FS-02-06 (S) 6 1/4 17 (17.5) 13 13.3 10.4 21.8 32.1 36.4 63.1 61.7 57.9 56.5 24.5 28.5 9.3 19.2 47 (48) AS321FS-02-08 (S) 8 13.2 22.7 33 14.2 AS321FS-02-10 (S) 10 15.9 26.7 37 35.7 15.6 38 (39) AS321FS-02-12 (S) 12 18.5 29.7 40 34.5 17 50 (51) AS321FS-03-06 (S)

RSQ

4-O counterbore 2-N through MK(2) X F Stroke Q 2-P Y RS Q G RS H A G D T RZQ U W V L M MI W S 10 (11) 20 (22) H + Stroke B + Stroke A + 2 stroke Workpiece transfer direction CEP1 CE1 32 40 50 RSQB -R Bore size: 32, 40, 50 CE2 Stroke Q F Z 2-P X ML2B S J I C J G5-S W E D T G CV U L V MVGQ 10 (11) 20 (22) M 0.2 E B + Stroke H + Stroke 4-N through 8-O counterbore CC A + 2 stroke RB Built-in

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

40 Work load: W [kg] Work load: W [kg] 20 Lead 16: LEKFS32EA 30 Lead 16: LEKFS32EA 20 Lead 24: LEKFS32EH 10 Lead 24: LEKFS32EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40EB Lead 10: LEKFS40EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEKFS40EA 30 Lead 30: LEKFS40EH

CLS

Locked stop OFF OFF OFF Regulator with check valve 0.5 s or more Unlocked ON OFF OFF 0 to 0.5 s 3 port normally closed Forward ON ON OFF Pressure center Backward ON OFF ON Locked stop OFF OFF OFF SOL.A SOL.C SOL.B 0.5 s or more Unlocked ON OFF OFF 0 to 0.5 s Backward ON OFF ON Brake lever Brake piston Locking spring 2) [Vertical] Brake cylinder Auto switch for lock unit [Load in the direction

17

mm/s) = 9.5 (Nm) X MY1 HT Z M1E M1: Moment 1 3 1 3 M1E = x FE x Z = x 82.3 x 50 x 103 m1 M1 max (from w of graph MY1B/M1) = 13 (Nm) M1 MY1 W M1 = m1 x g x X = 2 x 9.8 x 20 x 103 = 0.39 (Nm) = 1.37 (Nm) Load factor 4 = M1E/M1E max = 1.37/9.5 = 0.14 M1 Load factor 2 = M1/M1 max = 0.39/13 = 0.03 M3 Y MY2C M3E: Moment Y M2: Moment M3E max (from t of graph MY1B/M3 where 1.4a = 420 mm/s) = 2.9

ML2B

RS Q G RS H A RZQ MI W S CEP1 CE1 M2.5 x 4l (Included with the auto switch) CE2 ML2B 40 mm or more C J G5-S 4. Avoid wiring patterns in which bending stress and pulling force are repeatedly applied to the lead wires. 5. Please consult with SMC when using in locations where water or coolant liquid, etc is splashing constantly. 6.