(Tolerance 30%) Dimensions Bore size (mm) Z Auto switch part number H H' HW C T T' D-G39C-4, D-K39C-4 D-G39C-5, D-K39C-5 D-G39C-6, D-K39C-6 D-G39C-8, D-K39C-8 D-G39C-10, D-K39C-10 40 50 63 80 100 57 58 60.5 64 67 69 77 91 107 121 44 52 64 78 92 49.5 50.5 52 53.5 56.5 7.5 8.5 10.5 12.5 15.5 6.5 6.5 7.5 9.5 9.5 M5 X 0.8 X 16 M5 X 0.8 X 20 M5 X 0.8 X 25 5.3-38 Solid State Switch/Direct Mounting
0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) ARBF5050-00-A ARBF3050-00-A ARBF4050-00-A 0.6 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0.5 Outlet pressure (MPa) 0.4 0.3 0.2 0.1 0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 3-5-6 7 Series VFR2000/3000/4000/5000/6000 Caution
OPTIONS AND PERIPHERAL EQUIPMENT (3) Dimensions (a) EMC filter HF3010A-UN [Unit: mm] 4-5.5 7 3-M4 3-M4 M4 32 2 110 4 85 2 IN Approx. 41 258 4 65 4 273 2 288 4 300 5 HF3030A-UN/HF-3040A-UN [Unit: mm] 6-K 3-L 3-L G 1 E 1 D 2 F 2 M J 2 C 1 C 1 B 2 H 2 A 5 Model Dimensions [mm] A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25 length: 8 M5 M4 HF3040A-UN
Q 8 B + Stroke TA TB S K J E G A + Stroke MGQM, MGQL Common Dimensions (mm) NN P TN TF Nil Bore size Standard stroke (mm) B C DA G GA GB H J K L MM ML PW Q R (mm) 12 16 20 25 39 29 6 29 11 7.5 58 16 13 18 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 14 48 10, 20, 30, 40, 50, 75, 100 43 33 8 33 11 8 64 18 15 22 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 16 52 47 37 10 36 10.5 8.5 74 19 17 26 M5 x 0.8 13 M5 x
P1 = 0.1MPa 0.04 0.04 0.02 0.02 00 00 500 1000 1500 5000 10 15000 Flow rate L/min (ANR) Flow rate L/min (ANR) AF30 Rc 3/8 AF60 Rc 1 0.10 0.10 P1 = 0.7MPa P1 = 0.5MPa P1 = 0.1MPa 0.08 0.08 P1 = 0.7MPa P1 = 0.3MPa Pressure drop MPa Pressure drop MPa P1 = 0.5MPa P1 = 0.3MPa 0.06 0.06 P1 = 0.1MPa 0.04 0.04 0.02 0.02 00 2000 1000 3000 4000 00 5000 10 15000 Flow rate L/min (ANR) Flow rate L/min
Current output 4~20mA2.5% F.S. or less Repeatability 0.2% F.S. 2digit or less 0.2% F.S. 1digit or less response time 2.5ms or less (With anti-chattering function:20ms, 160ms and 640ms selection) Hysteresis Hysteresis mode and window comparator mode selection Port size R1/8 (with M5 female) Enclosure IP40 43 Vacuum Regulator Series IRV 60 l/min (ANR) Note) 100 l/min (ANR) Note) 150 l/min (
H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 M5 x 0.8 M3 x 0.5 10.5 16 M6 x 1.0 M4 x 0.7 11.5 20 M8 x 1.25 M5 x 0.8 13.5 25 M10 x 1.25 M6 x 1.0 16.5 30, 40 M14 x 1.5 M8 x 1.25 22.5 Clevis pin d Dd9 m m l t L t Applicable bore size (mm) Applicable snap ring Part no.
P PL M ML C D XT661-2A-(R, L) M5 x 0.8 5 M2 x 0.4 3.2 20 XT661-4A-(R, L) M5 x 0.8 5 M4 x 0.7 5 32.8 40 XT661-6A-(R, L) M5 x 0.8 5 M4 x 0.7 5 47 60 XT661-8A-(R, L) Rc 1/8 M4 x 0.7 5 47 80 XT661-10A-(R, L) Rc 1/8 M4 x 0.7 5 47 100 ZP2 ZP2V ZP ZPT ZPR Dimensions [Low Profile Cyclone Type] XT661 XT661 XT661-3A-(R, L)-X260 XT661-2A-(R, L)-X260 1.6 Air supply port 1.6 Air supply port 20 1.8
VQ110-L-M5 36.6 30.2 Manual override 4.9 4.9 12.4 15 E 22.7(Mounting hole) 2.5 12 17 About 300 (In case of latching) (Lead wire length) About 300 (Lead wire length) Lead wire color : Red Lead wire color : Black In case of latching type In case of locking knob type 42 40.7 35.6 11 SMC VQ110 -*L 30.7 JAPAN (4.1) (5.9) 5 (5.9) 5 5 A P 7 3 M5 (M3) 8.5 4.9 4.9 30.2 36.6 ( ) : In case of M3 Dimensions
, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M5 female thread (A) IDG30M/50M IDG30HM/50HM IDG30LM/50LM (B) K (D) C L H F 37 J IN OUT M (E) (G) M5 female thread HA AT With float type auto-drain With drain guide Drain Discharge ID AMG (P) (N) AFF N.C.: Gray N.O.: Black Thread size: 1/4 (Without valve mechanism) Applicable tubing O.D
chart ON ON Output transistor Output transistor OFF OFF Operate Operate Load 1 (Relay) Load 1 (Relay) Return Return H H Load 2 Load 2 L L Be sure to use the attached mounting screws.
pre-wired connectorSDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BW(V)L-900, D-M9BW(V)SDPC-900 and DY7BW(V)L-900.
L L Model Bolt Maximum tightening torque (Nm) Maximum screw-in depth L (mm) Model Bolt Maximum tightening torque (Nm) Maximum screw-in depth L (mm) MXF8 MXF8 4.7 2.1 1.2 4.7 M4 x 0.7 M3 x 0.5 MXF12 MXF12 6.5 2.1 6.5 M4 x 0.7 M3 x 0.5 1.2 MXF16 MXF16 6.7 4.4 6.7 M5 x 0.8 M4 x 0.7 2.8 MXF20 MXF20 8.5 4.4 8.5 M5 x 0.8 M4 x 0.7 2.8 0.02 mm or less of flatness is recommended for the body mounting
AC200230V AC100120V 40 AC100120V 6 AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 U U CNP3 V CNP3 V M5 3.24[Nm] W W 11 2 11 (2) LECSC-S8 [mm] 40 6 5 6 6 (80) 170 CNP1 () CN1 CNP2 CNP3 6 (68) (25.5) MR-J3BA MR-J3BAT 1.0[kg] .
Step 3) Screw in the accessory unlocking bolt (hexagon socket headcap screw (32: M3 x 5 l, 40: M4 x 6 l, 50: M4 x 6 l, 63: M5 x 6 l). 1. Piping port position, switch mounting rod position, and by-pass piping position can be selected by the part number. However, if there is an error in ordering and changes to the positions are required, please note the following. a.
(mm) <M5, M6> <M5, M6> A Weight (g) L D M Model Soft nylon Urethane KAH23-M5 17 8.5 14 13 2.1 M5 x 0.8 M6 x 1 7 17.5 12.5 8.5 3.4 2.9 4 Applicable tubing 1 8 KAH23-M6 KAH23-U01 8 10 3.2 KAH04-M5 17 M5 x 0.8 M6 x 1 9.5 14 13 2 4 4 8 KAH04-M6 17.5 4 1 8 KAH04-U01 13.5 18.5 5 14 10 10 16 5.6 5.6 K 1 4 KAH04-U02 16.5 10.5 10 KAH06-M5 18.5 M5 x 0.8 M6 x 1 15 14 4 4 11.5 3 10 KAH06-M6 19 Connection
side) Motor cable mounting direction: Nil (Top entry) Rod operating range Note 1) 2 x M5 x 0.8 thread depth 9 [1] 1 20 Motor cable length 300 2 x 5 Origin Note 2) Stroke end [Origin] Note 3) 20 [Stroke end] M5 x 0.8 thread depth 9 Manual override screw 21 42 28 12 Note 5) 28 Motor cable mounting direction: L (Entry on the left side) A 7 12 Stroke L2 L1 Mounting surface 18 5.5 12 Note 5)
Flat head watchmakers screwdriver L 5 to 6 When auto switch D-M9 is used Auto switch mounting screw M2.5 x 4 L Auto switch L Note) Use a watchmakers screwdriver with a grip diameter of 5 to 6 mm to tighten the auto switch mounting screw. The tightening torque should be about 0.05 to 0.15 Nm.
M5 type U10/32 type AS3311FG-02 Parts List No.