SMC Corporation of America
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Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

2 1 L N PE RUNNING ALARM 3 TB 2 1 L N PE MC MC TDR TDR ILS TDR ILS TDR MC MC OLR OLR MC MC MC CM PTC MC CM PTC PRS C11 FM FM PRS P P TDR MC TDR MC IDU6-10-T IDU6E-20/23-T AC200/200,220V (50/60Hz) AC100/100,110V (50/60Hz) PE 2 RUNNING ALARM 3 1 N L RUNNING ALARM 3 1 N L PE 2 TB TB MC MC TDR ILS TDR ILS TDR MC TDR MC OLR OLR MC MC CM C01 CM MC PTC MC PTC C11 FM C11 FM PRS PRS P P MC TDR MC

41 56 68 AA 106 133 164 BB 30 35 40 CC 16 19 23 DD 12 15 16.5 EE 14.5 16 22 FF 63.5 77.5 95 GG 22 27 35 HH 24 32 37 II 16 19 23 F 93.5 Model ML2B25 ML2B32 ML2B40 107.5 130.5 KK 15 16 17.5 LL 28 30.5 37.5 MM 16 21.5 24.5 NN 22 26 37.5 OO 9 9.8 23 PP 56 62.5 77 QQ 34.5 42 51 RR 37.5 45 54 MA M5 x 0.8 M6 x 1 M8 x 1.25 LA 11 12 14 MB M6 x 1 M8 x 1.25 M10 x 1.5 LB 9.5 16 15 MC M5 x 0.8 M6 x 1

How to Order 10 SY 5 L 5 1 20 01 Clean series Bracket Series Nil: Without bracket F1: With foot bracket A, B port size 3 10-SY3000 5 10-SY5000 Thread piping 2 position single only Coil type Symbol Port size M5 x 0.8 10-SY3000 Applicable series 7 9 10-SY7000 10-SY9000 M5 Standard Nil 1 8 01 10-SY5000 T With power saving circuit (24, 12 VDC only) Actuation type 1 4 10-SY7000 02 02 03 2 position

Grommet type 16.5 3 7 15 21 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with

1(P) 12(P1) Nozzle 2(A) 3(B) port (Coolant liquid EXH port) 3(B) Plug Tank Coolant Pump 2 port valve application (Not applicable for 7.0 MPa model) 17-4-31 2 Series VNH How to Order VNH 15A 2 1 1 A 1 T Note) Silencer is provided as standard on pilot EXH port (P2).

Refer to "Auto Switch Hysteresis" on P.24. Note 2) Refer to P.22 and 23 for auto switch specifications.

Unit switching Real-time switch output ( ) ZSE ISE For Air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON PSE YES CFM x 102, CFM x 101 ft3 x 101 OFF P-1 P-2 High flow rate Z I SE3 CFM = ft3/min P Window comparator mode H: Hysteresis High Flow Rate Type (For Air) PS H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON Z I SE1 2 NO OFF P-1 P-

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.

Tap M5 thread on the brackets mounting positions at the installation side, and fix the ionizer body and brackets with M5 threads. M5 tap M5 threads 4. Adjust angle of the ionizer body to ensure proper static charge elimination, and fix it with detent threads (M5) of brackets.

Make sure to verify the operating conditions of the actuator at least once a day. 5-10-13 5.34 AIR PREPARATION: ACCESSORIES SILENCERS SERIES (N)AN SERIES (N)AN SILENCER M3, M5, 18 SINTERED BRONZE Suitable for miniature valves and pilot air exhaust ports 13 21 dB noise reduction H O W T O O R D E R SERIES NAN SILENCER T E C H N I C A L SPECIFICATIONS NAN120-M3 (M3) NAN120-M5 (M5) NAN110-N01

IDX-OM-W014-C / Series IDU3E-10(-C,K,L,M,R,S,T) IDU3E-20(-C,K,L,M,R,T) IDU4E-10(-C,K,L,M,R,S,T) IDU4E-20(-C,K,L,M,R,T) IDU6E-10(-C,K,L,M,R,S,T) IDU6E-20(-C,K,L,M,R,T) IDU3E-23(-C,K,L,R,T,V) IDU4E-23(-C,K,L,R,T,V) IDU6E-23(-C,K,L,R,T,V) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC ISO4414 * 1) JIS B8370 *2 ) *1) ISO 4414

rate measurement range l/min Integrated type Display unit Display unit (4ch) Sensor unit PF2W504(T) PF2W520(T) PF2W540(T) PF2W511 PF2W704(T) PF2W720(T) PF2W740(T) PF2W711 0.5 to 4 2 to 16 5 to 40 10 to 100 PF2W30 PF2W20 PF2W33 For Deionized Water and Chemicals For Deionized Water and Chemicals P. 44 Remote type Flow rate measurement range l/min Display unit Display unit (4ch) Sensor unit

3 y r t !1 A A Enlarged view of A Component Parts Description No.

1 Output RoHS 3-Screen Display High-Precision Digital Pressure Switch IP40 ZSE20(F)/ISE20 Series How to Order Rated pressure range ISE20 0.1 to 1 MPa M For positive pressure ISE20 M5 N For vacuum/ compound pressure ZSE20 N M M5 q w e r t y u q Rated pressure range e Unit specification w Output specification ZSE20 0 to 101 kPa ZSE20F 100 to 100 kPa Symbol Description N NPN open collector 1