42

filter with manual drain P P P Regulator P P P P P P Air release valve P P P P P P Pressure switch P P Blanking plate (Air release valve) P P Blanking plate (Filter, Regulator) P Blanking plate (Pressure switch) P P P P P Thread type Nil Rc F G N NPT T NPTF Note) Electrical entry: Control unit can not be removed except L and C kits. 2 stations 2 stations 2 stations 2 stations 2 stations

Table of Contents

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

SX

Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold

VFR

0 e (B) (A) 4 2 (EA)(P)(EB) 5 1 3 Exhaust center: VFR640 (B) (A) 4 2 (EA)(P) (EB) 5 1 3 o r Pressure center: VFR650 (B) (A) 4 2 PE 5(EA) 4(A) 1(P) 2(B) 3(EB) PE This figure shows a closed center type. (EA)(P)(EB) 5 1 3 Component Parts Material Aluminum die-casted Note No. No.

SYJ300/500/700

48 R P R P R P VS Refer to page 4-4-61 for dimensions with connector cable.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(A) 2 (A) 2 X X 1 (P) 3 (R) 1 (P) 3 (R) 2.2-47

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Port Symbol Caution VF1000 VF3000 VF5000 Supply P P (SUP) P Cylinder A, B A (CYL2) B (CYL1) A, B Connector R1 (EXH2) R2 (EXH1) R1, R2 EXH outlet EA, EB Lead wire JIS symbol Single solenoid Socket Hook 1: P (SUP) 2: B (CYL.1) 3: R2 (EXH.1) 4: A (CYL.2) 5: R1 (EXH.2) 1: P 2: B 3: R2 4: A 5: R1 Plug Connector Lead Wire Length 1: P 4: A 2: B 5: R1 3: R2 Standard length is 300 mm, but the following

&snac

i O N : S , P S ) f i t t i n s i n g u s e p u r s i n s o f t u b e a T u b e s i z e w i t h o n e t o u c h ( o p t i o n P , P 5 ) f o r p u r g p l e a s e r e f e r t o P . ?

Table of Contents

Single type Suck back P P P VN A B A B Unit Single type Unit LVC Manifold (5 stations max.) LVA LVH A R P 3 port N.C. PA LVD N.C.

3 Port Air Operated Valve Series SYJA300

+ -+ R P R P P port 1/4 R port 1/4 P port 1/8 R port 1/8 Note) If there are more than 6 stations for type 20, or more than 9 stations for 21 type, supply air to both sides of P port and exhaust air from both sides of R port.

4/5 Port Air Operated Valve Series SYJA3000

SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

Micro Mechanical Valve Series VM1000

(Total Travel) 3 P .T.

ZP

Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

Series VQ Metal Seal/Rubber Seal Body Ported

L Series VQ1000 Plug lead Cassette Plug-in P.1.10-12 P.1.10-14 Series VQ0 P.1.10-44 P.1.10-36 P.1.10-40 Series VQ1000 P.1.10-36 P.1.10-40 P.1.10-44 C Series VQ2000 P.1.10-40 P.1.10-44 P.1.10-36 Series VQ1000 P.1.10-74 P.1.10-76 P.1.10-78 1.10-4 Manifold Variations C S L Port size SUP EXH port Cylinder port kit kit SY Lead wire Direct electrical entry style Serial transmission unit P, R A,

CQ2

Refer to p.2.3-18 for rod end nut and optional bracket.

Table of Contents

First tentative bore size determination 0.1 x Wcos + Wsin D 5.0 x P First tentative bore size determination 0.1 x W + W D 5.0 x P W W > WV P > PV Determination of allowable load weight & pressure Inclined operation W WV P PV (For vertical operation, refer to page 10-2-79.)

VFS

Body type Plug-in type ARBF2000-00-P-1 Non plug-in type ARBF2000-00-P-2 P port regulation Body type Plug-in type VVFS2000-10A Non plug-in type Part no. Rc 1 4 VVFS2000-P-02-1 VVFS2000-P-02-2 Accessory One pair of gasket and mounting thread is attached to every option parts assembly.

2/3 Port Valve

R P A Energized closed (N.O.) R P A Common (C.O.)

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.