IDX-OM-W014

20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W IDU Series 10-2 10 2 IDX-OM-W014 10 M 10-3 Rc1/2 32 25 1) 2830Nm 30 (5) (17)(30) 2 2 Rc1/2 10-4 1-1 IDU Series 10-3 10 3 IDX-OM-W014 11 R 11 R 11-1 11-2 1 AC100V AC200V, AC230V INOUT IDU3E/4E/6E-10-R IDU3E/4E/6E-20/23-R (A) 10 5 (mA) 30 11-3 M5 9.5mm 2 1.25mm L ,N N L () () IDU Series

IDX-OM-W094

IDX-OM-W094 / Series IDFA60-23-A,C,L,R,T,V IDFA70-23-A,C,L,R,T,V IDFA80-23-A,C,L,R,T,V IDFA90-23-A,C,L,R,T,V URLhttp://www.smcworld.com/ English instruction manual can be downloaded from our URLhttp://www.smcworld.com/ SMC ISO4414 *1) JIS B8370 *2) *1) ISO4414Pneumatic fluid power Recommendations for the application of equipment to transmission and control systems. *2) JIS B8370 URLhttp:

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 3 5 11-/22-MXP12 11-/22-MXP12 11-/22-MXP16 11-/22-MXP16 99 Air slide table MXP/MXPJ6 11221122Dimensions / MXPJ6 5 C 11-/22-MXPJ6-5 Depth 2.5 2.5 7 H 5 10.05 3 3.5 4M3 x 0.5 depth 3 +0.030 0 D B 16.5 3.5 18 14 13 20 6 +0.030 0 Depth 2.5 2.5 6 E 5 2-M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3

Micro Mechanical Valve Series VM1000

VM120-01-30 (R, B, G, Y) A-X207 VM130-01-30 (R, B, G, Y) A-X207 Panel mounting hole 40 30.5 T.T. 28.6 0.8 to 7.5 3 1.5 1.5 Symbol 2 port (A) 2 R port (3 port only) (97.3) 43.7 12 10 1 (P) (68.7) 3 port (A) 2 5.5 25 10 12 14.5 14.5 1 (P) 3 (R) * 0.5 MPa supply 25.4 2 x 1/8 44 17 2 x 4.6 mounting hole F .O.F .* 27 N T.T. 6.7 mm VM220-02-30 (R, B, G, Y) A-X207 VM230-02-30 (R, B, G, Y) A-X207

AC Servo Motor Driver (CC-Link Type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

MGC

21.5 (29.5) A B 20.5 (28.5) A B 15 (22.5) A B 17.5 (25.5) A B 19.5 (27.5) A B 18 (26) A B 16 (24) B 20 27.5 27 24.5 31 25.5 27.5 29 27 24 30 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 18 (26) 16 (24) 25 30 29.5 27 31 25.5 27.5 29 27 24 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 19 (27) 17 (25) 32 33.5 33 30.5 32 26.5 28.5 30 28 25 31 25 (34) 24 (33) 18 (

Electric Actuator Triple Axis P&P Unit

Please inform P/A of any changes in the motor specifications. 6) For motor details, please refer to Applicable motors on page 23. 9 Triple Axis P&P Unit Dimensions (reference drawing for assembling) 30 40 30 Stroke+240(Table movement range) 200 180 2-8H7depth10 4-M8 x 1.25 thread depth 16 Urethane stopper 110 280 (150) (Refer to 4) (Refer to 4) Home position gauge (Refer to 4) L 15 15 110

CRB1/Size: 10, 15, 20, 30

Go to Clean Room Spec Rotary Actuator Vane Style Series CRB1/Size: 10, 15, 20, 30 Rotation angles: 90, 180, 270 Up to 270 is possible for the entire series Stainless steel shafts and bolts (Carbon steel for size 30 and double-vane) Through the adoption of specially designed seals and stoppers, a swing angle of 270 has been achieved for the first time in a compact vane style actuator.

VEX1

P, A port Rc(PT) 107 VEX350 1 2 3 4 123 96 112 26 30 70 90 50 60 25 30 10 15 25 25 80 100 46 60 45 51 60 82 72 95 2.3 , , 1 2.3 VEX370 1 4 Rc(PT)11 4 Rc(PT)1, 1 189 j DIN connector 9 c Bracket 166 h Grommet terminal 175.5 i Conduit terminal g Grommet 110 a Model 130 b 12 d 2 e 47 f 140.5 VEX350 120 VEX370 136 20 5 49 205 9 182 191.5 156.5 5.1-22 VEX3 Body ported/VEX390 Air operated: VEX3900

RSH

at front side QB 2-Plug WB GB E W (Diagonal I) (mm) I B GB P QA CD QB CT CZ D E FT FX FZ GA H Stroke A L Bore (mm) N O 1 8 1 4 1 4 50 14 depth 5 85 93 16 10 20 7 8 36 32 64 20 73 93 16 128 30 221 45 9 63 18 depth 6 103 107 24 12.5 20 8.5 10 45 40 77 25 90 114 24 144.5 30 251.5 54 11 80 20 depth 6 132 128 35 12.5 25 10 10 45 50 98 25 110 138 24 171.5 40 299.5 56 13 SRSH Bore size A, #1 (

o

(H) : NVJ3340O-OiiOO.Ms NVJ34400-OMOO-M5 NVJ35400-OMOO-M5 L Type Plug Connec{or (L) : NVJ3340O-OLOO-M5 NVJ34400-OLOO-M5 NVJ35400-OLOO-M5 0.37 (22) 012 (3) @ Tupe 2O Manifold: Top Ported/NVV5J3-20,@ inch(mm) Grommet (G) , (H) M3X0.5 2n a a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03

o

(H) : NVJ3340O-OiiOO.Ms NVJ34400-OMOO-M5 NVJ35400-OMOO-M5 L Type Plug Connec{or (L) : NVJ3340O-OLOO-M5 NVJ34400-OLOO-M5 NVJ35400-OLOO-M5 0.37 (22) 012 (3) @ Tupe 2O Manifold: Top Ported/NVV5J3-20,@ inch(mm) Grommet (G) , (H) M3X0.5 2n a a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03

Air Catch Sensor

ISA11-4L-01BG ZSE2 ISE2 ISA15-1-01G ZSP ISl ZSM Accessories (Optional) PFl Bracket ISA-1-A Gauge G33-3-01 DIN rail ISA-2-1 to 7 IFl Gauge/G33-3-01 Bracket /ISA-1-A DIN rail/ISA-2-1 to 7 Material: SPC (Nickel plated) Material: Aluminum 10 hex. 100 110 q w e r t L 90 10 25 5 4-4.5 7.5 30 R1/8 34 42 28 4.5 35 27 9 16.5 13 5.6 L Applicable model Part No. 105 140 175 210 245 280 315 Description

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(H) : NVJ3340O-OiiOO.Ms NVJ34400-OMOO-M5 NVJ35400-OMOO-M5 L Type Plug Connec{or (L) : NVJ3340O-OLOO-M5 NVJ34400-OLOO-M5 NVJ35400-OLOO-M5 0.37 (22) 012 (3) @ Tupe 2O Manifold: Top Ported/NVV5J3-20,@ inch(mm) Grommet (G) , (H) M3X0.5 2n a a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

When a load, such as a relay or solenoid, which generates surge is directly driven, use a type of switch with a built-in surge absorbing element. 8.

VXP21/22/23

K J A e 57 62 67 b 39 45.5 49.5 Q 39 39 41.5 Q 23 23 25.5 N 61 (68) 69 (76) 79 (89) d 47 52 57 a 34 51 58 N 69 (76) 77 (84) 87 (97) N 61 69 79 c 65 78 86 Q R 57 74 81 VXP2142 , 30 30 35 20 20 23 34 43 47 29 37 43 28 35 40 3 8 8 63 80 90 59 59 62 104 (116) 118 (136) 133 (150) 26 32.5 36.5 71 87 97 14 17.5 20 92 92 95 3 8 1 2 3 4 1 VXP2152 VXP2262 VXP2150 VXP2260 ( ): N.O. 17-3-50 9 Series

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

/pressure centre L plug connector (L) 20 2 x M4 x 0.7 Threads depth 6.5 (For bracket mounting) 3 7 52-SY7420-L-02 (-F2) 5 52.8 39.8 Insulation: Black () B 13.6 Manual override Insulation: Red (+) A 2 x 4.2 (Mounting holes for manifold) 20 42 2 x 1/4" {A (4), B (2) port} (52) (2 x 4.2 Mounting holes) 44 (For E type) 0.3 mm2 (42.5) (49.5) 40 40 24.5 14.7 1.55 (1.2) L 180.8 (Lead wire length

CEx-OMQ0011

b. c. 4. a. b.

Clean Regulator/Fluororesin Type

(MPa) 0.15 0.15 0.15 SRF SRF ITV 0.10 0.10 0.10 IC 0.05 0.05 0.05 ITVH 0.00 0.00 0.00 0 1 2 3 4 5 Flow rate (L/min (ANR)) 0 5 10 15 20 Flow rate (L/min (ANR)) 0 10 20 30 40 50 Flow rate (L/min (ANR)) ITVX PVQ VY1 Input/Output Characteristics (Representative Value) Inlet pressure: 0.5 MPa Flow rate: 0 L/min (ANR) Fluid: Air VBA VBAT SRF10 SRF30 SRF50 AP100 0.5 0.5 0.5 0.4 0.4 0.4 Outlet pressure

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Symmetric type Nil Standard L Note 2) Symmetric Auto switch Bore size (Stroke (mm)) Adjuster option Nil Without auto switch Nil AS AT A Without adjuster 6 10, 20, 30, 40, 50 Refer to the table below for auto switch model numbers.