0.4

Applicable fitting size Noise reduction (dB) Effective area (mm2) (Cv factor) Series Model A L D d D VQ2000 10 AN20-C10 36.5 57.5 30 16.5 30 Elbow fitting assembly VVQ2000-F-L(C4/C6/C8/N3/N7/N9) It is used for piping that extends upward or downward from the manifold.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Terminal no. 2 1 2 1 Signal name Yellow White Orange Blue 1 2 3 4 1 2 3 4 4 3 4 3 Plug connector pin arrangement D-coded Plug connector pin arrangement D-coded Metal parts Metal parts Shield Connections (Straight cable) EX9-AC 005 EN-PAPA (With angle connector on both sides (Plug/Plug)) 36.3 L Cable length (L) 005 500 mm 010 1000 mm 020 2000 mm 030 3000 mm 050 5000 mm 100 10 mm 30.8 6.5 Metal

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.05 to 3 L/min 0.15 to 3.15 L/min 5 V 20 mA 30% 70% PF2M705 92% 8% 0.1 to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA

Magnetically Coupled Rodless Cylinder

Dimensions 15 D HL XA FH 4-SS thread depth S (Helical insert depth) Attached from bottom with CAP bolt Bolt size: MD Attached from top with bolt L 4-recessed area diameter BB 4-recessed area depth CC LA A X A FG 4-BA LF Body Switch rail FG X A FH XA HL HB Note 1) Note 1) FF D Floating block FE Note 1) Section D-D 20, 25, 32, 40 D Attached from top with CAP bolt Floating block L LA A LF Attached

VQ5000

(for F, L, S & T1 kits) D side end plate assembly 1. D side end plate assembly part no.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

-4.3 (For mounting) 37.5 4 Manual override A B 24 A B P R 42.1 16.9 With interface regulator 39 [41.2] G: Approx. 300 H: Approx. 600 (Lead wire length) 103.2 [107.6] 108.1 [110.3] (Light/surge voltage suppressor) 69.6 [76.6] 50.1 [57.1] + 54.2 45 34.7 31.5 21.5 6 6 17 17 43.9 15 8.5 1/8 (P, R port) 32 24 45.5 L plug connector (L): SYJ5 40-L-01 3 4 5 M plug connector (M): SYJ5 40-M-01 3 4

51

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) Note 1) BMA3-020 Note 1) BMA3-025 Note 1) BMA3-032 Note 1) BMA3-040 Note 1) BMA3-050 Note 1) BMA3-063 CJ1 Note 2) BMA3-020S Note 2) BMA3-025S Note 2) BMA3-032S Note 2) BMA3-040S Note 2) BMA3-050S Note 2) BMA3-063S D-M9A(V) CJP D-C7/C80 D-C73C/C80C D-H7 D-H7W D-H7NF D-H7BA D-B5/B64 D-B59W D-G5/K59 D-G5W/

Transfer

model Bore size (mm) CEP1 25 8.5 32 11.5 40 11.5 D-Z7/Z80 CE1 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 6 9 10 CE2 A B Since this is a guideline including hysteresis, not meant to be guaranteed.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Dimensions 15 D HL XA FH 4-SS thread depth S (Helical insert depth) Attached from bottom with CAP bolt Bolt size: MD Attached from top with bolt L 4-recessed area diameter BB 4-recessed area depth CC LA A X A FG 4-BA LF Body Switch rail FG X A FH XA HL HB Note 1) Note 1) FF D Floating block FE Note 1) Section D-D 20, 25, 32, 40 D Attached from top with CAP bolt Floating block L LA A LF Attached

MXS Series Air Slide Table

45 55 65 75 100 125 150 175 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 MXS25L-10 MXS25L-20 MXS25L-30 MXS25L-40 MXS25L-50 MXS25L-75 MXS25L-100 MXS25L-125 MXS25L-150 162 218 258 72 72 Air Slide Table MXS Series Appropriate mounting position for stroke end detection (mm) Reed switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V Stroke B Stroke E Model Operating range A 10 40 10 75

Rotary Actuator

Angle adjusting screw Angle adjusting screw Angle adjusting screw n o A R ti n 0 0 n c ot g 9 e 9 o l e y at ir ti y c d a a a io e d w g w ir n j n u y d y ti s ra e e g s ti k k u n n n g j ti of d g of s d a e u ir e e e e j d of c l g a g ti g o n n e n k A n l g n ra ra A e y n n w io io a y at at 9 ot ot 0 R R The rotation range under the adjustment of an angle at 60 is indicated

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

blank plate assembly SYJ5000-21-1A Applicable individual exhaust spacer assembly SYJ5000-17-1A Stations P port Rc(PT) 2 stations 02 1 8 : : 20 stations 20 R port Rc(PT) 1 8 40 Type (5 Port/Base mounted) Applicable solenoid valve SYJ5l40-l SYJ5l43-l SYJ5l50-l SYJ5l53-l Applicable blank plate assembly SYJ5000-21-1A How to Order SS5YJ5-40-05 -M5 P port Rc(PT) 1 8 Stations 02 2 stations : :

Cylinder with Lock Series MNB

D-F5LF (2 color indicator) D-A53 D-A54 D-A56 D-A64 D-A67 D-A59W (2 color indicator) Single rod Series MNB 40 50 63 80 100 25 to 500 Cylinder with Lock Series MNB Tie-rod mounting type 25 to 600 Double acting Double rod Series MNBW 25 to 700 Feature 2 Cylinder with Lock Double Acting: Single Rod Series MNB 32, 40, 50, 63, 80, 100 How to Order MNB L 50 100 D Standard type With auto switch

REC

58.0 35.5 55.0 32.5 56.5 33.5 53.0 30.0 CC 40 70.0 39.5 64.0 33.5 69.0 38.5 65.5 35.5 67.0 36.5 63.5 33.0 RB Auto switch model Bore size (mm) Operating Range Auto Switch Mounting Height D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-B5 D-B64 D-B59W D-G5NTL D-H7C J 20 25 32 40 D-G39 D-K39 D-A33 D-A34 Bore size (mm) D-C7/C80 D-C73C/C80C D-C73C D-C80C D-A44 8 10 9 10 D8 10 9 10 D-B5/B64 13 13 14 14

MLGP

Bore size (mm) c e b d a 40 50 63 5.5 7.5 10 11 13.5 18.5 10.5 13.5 17.8 4 4.5 7 6.5 8.5 11 b a c d e Common Dimensions: MVGPM/MVGPL Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA ID IE IH J K L IB 52 64 77 40 46 58 M6 27 32 39 34 35 38 11 13 16.5 4 7 6.5 10 14 34.5 40 50 63 100 120 148 162 16 20 20 14 44 12 16 16 44 47 50 54 64

MLGP

Bore size (mm) c e b a d 40 50 63 5.5 7.5 10 10.5 13.5 17.8 11 13.5 18.5 4 4.5 7 6.5 8.5 11 b a c d e Common Dimensions: MVGPM/MVGPL Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA ID IE IH J K L IB 52 64 77 40 46 58 M6 27 32 39 34 35 38 11 13 16.5 4 7 6.5 10 14 34.5 40 50 63 100 120 148 162 16 20 20 14 44 12 16 16 44 47 50 54 64

CL

L Dd9 d Applicable bore size (mm) Part no.

Large Bore Compact Cylinder Series CQ2

C A D Model D C Model D C Mounting bolt (mm) Mounting bolt (mm) M18 x 125 l M18 x 135 l 125 135 C (D) Q2B18010DC C (D) Q2B20010DC M18 x 135 l M18 x 145 l 135 145 C (D) Q2B18020DC C (D) Q2B20020DC M18 x 145 l M18 x 155 l 145 155 C (D) Q2B18030DC C (D) Q2B20030DC M18 x 155 l M18 x 165 l 36 155 39 165 C (D) Q2B18040DC C (D) Q2B20040DC M18 x 165 l M18 x 175 l 165 175 C (D) Q2B18050DC C (D) Q2B20050DC

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Auto Switch Proper Mounting Position (Detection at Stroke End) (mm) Auto Switch Mounting Height (mm) D-M9l D-M9lW D-M9lA D-A9l Hs 20 26.5 25 29 32 32.5 40 37 50 42.5 63 49.5 D-M9l D-M9lW D-M9lA D-A9l Auto switch model Auto switch model Bore size A B A B 20 12 24 8 20 25 11.5 24.5 7.5 20.5 32 13 25 9 21 40 18 27 14 23 50 20 32 16 28 63 18.5 33.5 14.5 29.5 Bore size Note) Adjust the auto switch

3

Auto Switch Mounting Height (mm) D-F7/J79 D-F7W D-J79W D-F7BA D-F79F D-F7NT D-A7H D-A80H Auto switch model D-F7V D-F7WV D-J79C D-A7 D-A80 D-A73C D-A80C D-A79W D-M9V D-A9V D-P3DWA Bore size U 25.5 28 36 38 43.5 48.5 U 25 28 28.5 32 37.5 42.5 U 23 26 26.5 30 35 40.5 U 27.5 30.5 26.5 40 45 50.5 U 30 32.5 39.5 42.5 48 53.5 U 24.5 27.5 34 37.5 43 48 U 31 34 40.5 43.5 49 54.5 U 28 31 37.5 40.5