Compact Vacuum Ejector Series ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.

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Solid state switch Model D-F8 Series Variations Bore size (mm) Rod end configuration Stroke (mm) Clean room series 4 6 8 10 15 20 Action Series Auto switch Double acting Male thread Without thread Nil 4 Single acting (spring return) Double acting 6 Single acting (spring return) CUJ Solid state switch D-F8 D-F9 Female thread Double acting 8 Male thread Single acting (spring return) Double

Parallel Type Air Gripper

-40 M8 x 1.25 17.7 16 Max. tightening torque (Nm) Model Screw MHZ2-10 M2.5x0.45 0.49 MHZ2-16 M3 x 0.5 0.88 MHZ2-20 M4x0.7 2.1 MHZ2-25 M5 x 0.8 4.3 MHZ2-32 M5 x 0.8 4.3 MHZ2-40 M6x1 7.3 Note) If auto switches D-Y59, D-Y69, or D-Y7P are used, or the auto switch is mounted to the corner of the body, only a tapped body can be used.

Industrial Filters

74, 105 EM100 All types of gases/liquids, High-temperature fluids P.42 5, 10, 20, 40 74, 105 EM500 Stainless steel 316 21 Filter Selection by Main Application FGD/FGE/FGG type FGD type FGE type FGG type Applications and Applicable Element : Recommended : Can be used : Cannot be used Applicable filter model F G D C F G D E F G D T F G D F F G E S F G E L F G E T F G G S F G G L Fluid name

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Note 5) 3/16", 3/8", 1/2"are made of brass AS131F (3.2, 4, 6, 1/8", 5/32, 1/4), AS231F-01(3.2, 4, 6, 1/8", 5/32) are POM. 15-9-5 5 Series AS Elbow Type M3 port M5 port U10/32 port Applicable tubing O.D. d (Hexagon width across flats) Applicable tubing O.D. d (Hexagon width across flats) Metric Size Inch Size Applicable tubing O.D. d 1/8" Applicable tubing O.D. d A(2) Weight (g) T D1 H(1)

125

VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC * DC specification of type D and DO is only available with 12 and 24 VDC.

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (

VVX31/32/33

240 228 310 292 7 276 264 356 338 8 312 300 402 384 9 348 336 448 430 10 384 372 494 476 Model L1 L2 L1 L2 VVX31 LQ VVX32 VVX33 LVN Z 59 62 64 W 83 99 106 X 47 48 51 Y 47 58 67 V 102 114 123 S 39 41 44 T 59 62 64 U 92 95 97 Q 23 25 28 L 6 9 9 M 45.5 50.5 50.5 N 20 23 25.5 K 36 46 46 F 33 34 34 H 24 25 25 J 30 40 40 D 22 24 24 A 40 44 44 B 20 22 22 C 9 10 10 Model VVX31 VVX32 VVX33 TI/ TIL

Refrigerated Air dryer Series IDU/IDF

(C) IDF 1D 30 35 40 50 25 IDF 2D to 240D 30 35 40 45 50 Outlet air press. dew point (C) Ambient temp.

MHx-OMU0057

6 MHZ2-16 M40.7 1.6 4.5 MHZ2-20 M50.8 3.3 8 L L MHZ2-25 M61 5.9 10 MHZ2-32 M61 5.9 10 MHZ2-40 M81.25 13.7 13 Nm Lmm MHZ2-10 M30.5 0.69 5 MHZ2-16 M40.7 2.1 8 MHZ2-20 M50.8 4.3 10 MHZ2-25 M61 7.3 12 MHZ2-32 M61 7.9 13 MHZ2-40 M81.25 17.7 16 Nm MHZ2-10 M2.50.45 0.49 MHZ2-16 M30.5 0.88 MHZ2-20 M40.7 2.1 MHZ2-25 M50.8 4.3 MHZ2-32 M50.8 4.3 MHZ2-40 M61 7.3 D-Y59 D-Y69 D-Y7P 7 - 1. 2. 1.

VXA21/22

The right side of the common port provides plug. 4.1-75 VVXA31/32 Dimensions Stations 2 3 4 5 6 7 8 9 10 Model L L1 L2 L1 L2 96 84 126 108 132 120 172 154 168 156 218 200 204 192 264 246 240 228 310 292 276 264 356 338 312 300 402 384 348 336 448 430 384 372 494 476 VVXA31 VVXA32 Symbol Model M 45.5 50.5 N 69 76 K 6 9 G 24 25 H 30 40 J 36 46 F 33 34 C 9 10 D 22 24 E 59 66 B 20 22 A 40 44

ASR

6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

air-filter-e

Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S BT-3S Replacement Parts *BLUE links will lead to purchase pages. 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

Air Preparation Equipment

Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S BT-3S Replacement Parts *BLUE links will lead to purchase pages. 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

CEx-OMQ0011

Sol.1 Sol.2 Sol.3 A ON OFF ON B OFF ON ON OFF OFF OFF 25 VFS250 VFS240R VFS210 AR425 6-4 32 VFS250 VFS240R VFS210 AR425 6-4 40 VFS250 VFS240R VFS210 AR425 8-5 50cm 1m 0.30.5MPa0.3MPa 0.5MPa 15 <> <> <> <> <> <> WR WL 1 2 3 4 5 6 WL WR A C E G I K B D F H J L 1)6 2)1245 SMC O A 2532 40 O C9 C11.2 Rz12.5 A 6 8 16 4-1 ML2 () 1(an1) (an1 ) 500mm/s W N Va P MPa NG NG

HRX-OM-W032

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector trip . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

) 4 (A6063) C C C C D D D D Body (material: A6063) K C C C C E E E E E E E E KF flange F F F Fn n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance

53

Cooling Capacity HRSH090-A-20HRSH090-A-4012 12 Ambient temperature 32C Ambient temperature 32C 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 Ambient temperature 43C Ambient temperature 43C 6 6 Ambient temperature 45C 4 4 Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH090-W-20/4014

212

140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator