CNG

GR GQ H1 I 18 13 38 93 1/8 56.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 20 to 200 15.5 to 200 22 17 45 103 1/8 66 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31 20 to 300 19.5 to 300 22 17 45 104 1/8 67.5 20 12 18 2 97 10 25 6.5 9 7 10 6 38 20 to 300 19.5 to 300 30 19 52 112 1/8 75 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 20 to 300 301 to 500 301 to 500 27 to 300 (mm) Bore size (mm) 20 25 32 40 P

15

Lead 20: LEYG32A 30 30 20 20 0 0 0 200 600 1000 1400 1200 Speed [mm/s] 0 200 600 1000 1400 Speed [mm/s] 866 A Model Selection LEYG Series Motorless Type * These graphs show an example of when the standard motor is mounted.

Programless controller Step motor (servo 24 VDC)

LEP6 LEP10L LEP10 J K J K J K Low 7 14 12 24 12.5 25 Pushing force [N] Middle 8.5 17 16 32 19 37.5 High 10 20 20 40 25 50 Pushing speed [mm/s] 20 10 20 10 20 10 Pushing force accuracy is 30%F.S. for the LEP6 and 25%F.S. for the LEP10. Refer to the operation manual of the electric actuator for details.

CQ2

W/o auto switch B L L1 With auto switch Bore (mm) 5st 10 A 20 20 20 20 5st 10 5st 10 5st 10 32 48 58 12 33.5 58 68 17 38.5 40 64.5 12 33.5 64.5 74.5 17 38.5 45.5 50 67.5 77.5 18 43.5 87.5 97.5 28 53.5 Rod end male thread Double clevis (mm) A Without auto switch B CL A B CL With auto switch Bore (mm) Double clevis/CQ2D, CDQ2D 5st 10 20 20 20 20 20 20 5st 10 5st 10 5st

HRX-OM-M090

--20, HRS024--20 . 9-11 9.6 Pump capacity . 9-12 9.6.1 HRS012--10-(BJM), HRS018--10-(BJM) . 9-12 9.6.2 HRS012--20-(BGJM), HRS018--20-(BGJM), HRS024--20-(BGJM) . 9-12 9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT . 9-13 9.6.4 HRS012--20-T, HRS018--20-T, HRS024--20-T . 9-13 9.6.5 HRS012--20-MT, HRS018--20-MT, HRS024--20-MT . 9-14 9.7 Required facility water flow (for water-cooled

Hydraulic

20 2 pcs. 5 10 15 10 20 15 Auto Switch Mounting Bracket Part Nos.

Digital Flow Switches

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] 100 2 or 3 particles/cc 10 00 10 20 30 40 50 60 70 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

HRX-OM-T002

This information is needed when contacting an SMC sales distributor. An example of HRS090-A-20 "3~" stands for "3 interphase".

Made to Order

Note 4) 2 locations on the back side for the standard-type 20 with 15 strokes or less and 25 with 10 strokes, and for models with an auto switch and built-in magnet of 20 with 5 strokes.

HRX-OM-X037

The date and time of an alarm are displayed if the alarm is touched on the Alarm history screen. A subcode is displayed when an alarm with a subcode is touched twice.

Thermo-chiller/Rack Mount Type

For pipe thread type N, an NPT thread conversion fitting set is included. 19 Not included for Option Z (Removed parts) 20 Not included for Options Z and Z1 (Removed parts) 15 Thermo-chiller/Rack Mount Type HRR Series Specifications: 200 to 230 VAC Water-cooled Refrigeration Model HRR012-W-20 HRR018-W-20 HRR024-W-20 HRR030-W-20 Cooling method Water-cooled refrigeration Refrigerant R410A

Fieldbus system PROFINET compatible SI Unit

Enable Generates an error. 1 Unit Disable Does not generate an error. -10..10 V -5..5 V -20..20 mA 0..10 V Selects the analogue input range. -10..10 V Channel 2 Analogue input range Sets the analogue input device range. 0..5 V 1..5 V 0..20 mA 4..20 mA Offset binary Offset binary.

4/5 Port Solenoid Valve

(A, B port) Applicable tubing O.D.: 4, 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage suppressor) + 23 20 2-2.6 (For mounting) 11 3 28.1 [35.1] 12.7 P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 1.4 (PE port) 21 L plug connector (L): SYJ5 20-L-M5 3 4 5 M plug connector (M): SYJ5 20-M-M5 3 4 5 DIN terminal (D): SYJ5 20-D-M5 3 4 5 M8 connector (WO): SYJ5 20-WO-M5 3 4 5 Approx. 300 (Lead wire length

Magnetically Coupled Rodless Cylinder

In this case, an intermediate stop can be performed only by using an external stopper, etc. Note 2) Depending on the operating environment, etc., order made products should also be reviewed. Note 3) An external guide system should be installed when over specifications. (Refer to page 6 for intermediate stops.) (Refer to pages 20 through 24.)

e

In case of an emergency, please turn it off.

Rotary Table/

ro en Size ta t r ti n r o n an e n d tio ge 95 ta 10.2 10 20 30 50 70 100 200 ro m mu 7.2 xi Ma 6.5 8.2 7.0 Note) The drawing shows the rotation range of the positioning pin hole.

Step Motor Driver （ Pulse input type ）

20 20 20 ORIG ACC/DEC 1000 1000 1000 1000 Creep speed 10 10 10 10 ORIG sensor 0 0 0 0 ORIG SW Dir 0 0 0 0 Undefined parameter21 0 0 0 0 87 - Appendix 1.2 LEF series setting value LEFS Step data default Model LEFS16 LEFS25 LEFS32 LEFS40 Lead [mm] 10 5 20 12 6 24 16 8 30 20 10 No. 0 0 0 0 Movement MOD ABS ABS ABS ABS to 500 500 250 1000 500 250 1200 500 250 500 500 250 Speed Strok 501-600

Rotary Cylinder Series MRQ

(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 15 15 20 20 15 17.5 17.5 25 30 Q 20 20 20 20 30 E 68 68 70.5 68 70.5 68 70.5 75.5 80.5 83 348 Rotary Cylinder Series MRQ Flange Style: MRQFS40 (Max. 11.5) Width across flats 14.2 Note) M6 x 1 depth 7 Number of mounting screws and distance between screws are different depending on the strokes.

SFOD-OMT0010

Product Specifications does not move Leave an interval of 15ms or more correctly.

OMR0032

External Connection (P.20) for wiring. Refer to section 17.