Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

MHL2

60 30 60 80 40 80 100 50 100 120 70 120 160 100 160 200 60 10 40 MHC 60 MHT 16 40 MHY 60 MHW 20 40 MRHQ 60 25 Misc. 40 30 D32 20 2030 40 P . 12-4-7 20 Note) The open and close time spans represent the value when the exterior of the workpiece is being held.

LFE-OMZ0012

Without bracket (Bottom view) Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Use flexible tubing in between to avoid such an effect. 1100

VXA31/32

Construction/ Principal Parts Material Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Water (Standard) Air (Standard) Oil (Standard) (V, M) Maximum Minimum 40 1 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V, M in parentheses are option symbols.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Use flexible tubing in between to avoid such an effect. 1100

PSE530/200

M5 Port size L M5 x 0.8 Option Sensor cable (3 m) + Connector (1 pc.)

AC Servo Motor Driver (SSCNET Type)

Calculating Acceleration/deceleration conversion example using an actuator with a 8 [mm] lead with an acceleration of 3000[mm/sec2].

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

MHR2-10/MDHR2-10 MHR2-20/MDHR2-20 50 60 Overhang distance H (mm) Overhang distance H (mm) 50 40 Pressure Pressure 40 30 External hold 0.2MPa 0.2MPa 30 0.3MPa 0.3MPa 0.4MPa 20 0.4MPa 20 0.5MPa 0.5MPa 0.6MPa 10 0.6MPa 10 0 10 20 30 40 50 0 10 20 30 40 50 60 Holding point L (mm) Holding point L (mm) MHR2-15/MDHR2-15 MHR2-30/MDHR2-30 80 50 H 70 Overhang distance H (mm) Overhang distance H (mm

VM

It is equivalent to the pilot lamp of an electrical system. This is an ultra-compact air indicator light to monitor the presence of air pressure. It is equivalent to the pilot lamp of an electrical system.

VXD21/22/23

DC AC, DC 60 40 1 80 60 10(1) 40 60 60 40 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

/ISE60 How to Order M ISE60 A2 22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

Process Valve

28 40 33 50 33 50 1.4 1.5 1 2.5 2.6 1 4 1 5.7 5.8 32 Symbol Valve type Type 4.1 4.2 1 2 1 N.C.

Pressure Relief 3 Port Valve with Locking Holes

Install an air dryer or after cooler on upstream side. Air containing excess drainage may cause malfunction. Caution 3. Install an air filter of 5 m filtration on upstream side. 4. Install a mist separator on upstream side to remove carbon powder from the compressor or other equipment. Excess carbon dust may cause malfunction.

VCB

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 52 42 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 65 56 Two mounting screws (for mounting

ASR

1 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ Air consumption reduction ratio (%) 40 Working stroke pressure (MPa) 40% reduction in air consumption 40% reduction in air consumption 30 0.9 0.7 20 0.5 10 0.3 Cuts air consumption by operating the return stroke at a reduced pressure.

Rotary One-touch Fittings Series KS/KX

M Min. hole dia.

ITVH

It will lead to an operation failure. Caution 1. This product does not have a filtering function. Install an air filter on the supply side close to the product. Select an air filter with a filtration degree of 5 m or finer. 2. Compressed air containing large amounts of drainage can cause a malfunction of this product and other pneumatic equipment.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

LQ1L5B-M LQ1L5A-M 1/2" 39 54 40 30.5 26 29 3/4" LQ1L6A-M LQ1L6B-M LQ1L6C-M LQ1L6D-M 3/4" 49 36 39.5 68.5 46 35 1" 17-5-102 7 Series LQ1 High Purity Fluoropolymer Fittings Female Elbow: LQ1L-F Metric sizes Connection threads Rc/NPT Model Applicable tubing O.D.

Magnet Gripper for Collaborative Robots

Install an air filter. Install an air filter upstream near the valve. Select an air filter with a filtration size of 5 m or smaller. 3. Take measures to ensure air quality, such as by installing an aftercooler, air dryer, or water separator. Compressed air that contains a large amount of drainage can cause the malfunction of pneumatic equipment, such as magnet grippers.