JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

50 M10 x 1.25 76 52 15 40 19 43 35 1/2 46 155 13 31.5 20 20 230 45 25 16 55 15 15 25 to 1400 63 M12 x 1.5 90 63 15 42 19 43 35 1/2 52 163 15 40 31.5 31.5 261 63 40 20 65 15 20 25 to 1500 1/4 stroke 80 M16 x 1.5 110 80 17 40 22 44 44 3/4 65 184 18 40 31.5 31.5 291 72 40 20 80 17 20 25 to 1800 100 M18 x 1.5 135 102 19 42 22 44 44 3/4 75 192 20 50 40 40 316 84 50 25 100 19 15 25 to 1800 Rod

Output block / Power block

Description Remarks Usable load wattage is limited to 1.5 W because power is supplied by the SI unit. When the load is up to 12 W, use both the Power block and a high wattage load Output block. For low Current Output to connected load (output equipment) or manifold valves using the power supply from the SI unit.

Free Mount Cylinder for Vacuum Series ZCUK

40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 19 21.5 23 21.5 22 22.5 M5 x 0.8 1/8 1/8 8 5 to 50 11.5 5 to 50 H HA J L P Q QA R S SA T W Y Z Model ZC(D)UKR16 ZC(D)UKR20 ZC(D)UKR25 ZC(D)UKR32 7.5 26 5 14 5 4.5 4 2 12 30 (40) 7.6 depth 6.5 3.5 15.5 68.5 (78.5) 29 33 42 5 5 5 16 20 24 6 8 10 5.5 5.5 6.6 9 9 13.5 4.5 4.5 4.5 16 20 24 36 (46) 40 (50) 42 (52) 9 9 10 9.3

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

NW5Z5-40-OO2 .NW525,41-OO1 . NW5Z5-42-OOr Aootibla ba! . rlwszt2cool . NW5?$A-OOr . t\"wsztreoo2 .

ARM10/11

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ARM10/11

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Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Note) Maximum mountable valve number: 40 pcs.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Refer to the construction drawing of the actuator motor. 40 40 40 40 40 40 40 40 Air cylinder installation with an auto switch is forbidden in the shaded area. (2) When installing electric actuator LEY(G) or LEF series with an auto switch by side, leave a gap of 40 mm or more with respect to the position where the magnet passes.

180° Angular Style Air Gripper Series MHY2/MHW2

point L (mm) 120 80 160 200 20 40 60 Gripping point L (mm) 80 0 20 40 60 Gripping point L (mm) 80 100 120 MHW2-25D MHW2-40D 160 50 Pressure 0.7 MPa Pressure 0.7 MPa 140 0.6 0.6 40 120 Gripping force (N) Gripping force (N) 0.5 0.5 100 30 0.4 0.4 80 0.3 0.3 0.2 20 60 MHZ 0.2 40 10 20 MHF 0 20 40 60 Gripping point L (mm) 100 80 80 100 120 140 160 0 20 40 60 Gripping point L (mm) MHL MHR Confirmation

Fieldbus System

(No.4-40 UNC) 5 Joint bracket Links Units to one another. 6 Connector for Unit (Plug) Transmits signals to the neighboring Unit and supplies power. y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

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motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder

Escapements Series MIW/MIS

4 w i !7 q y r !3 !2 t o w e !0 !5 !6 25, 32 Option @4 @1 @3 @0 !9 @2 Scraper Stroke adjuster u w !1 !8 (32 only) Description Material Note Component parts Description Material Note No. No.

A_HEC-OM-K001

flow rate: 5L/min, Ambient temp.: 25oC 1) Cooling capacity 1200 1000 Facility water 25oC Cooling capacity W Facility water 10oC 800 Facility water 35oC 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig.9-9 Cooling capacity (HED005) 2) Heating capacity 1400 1200 Heating capacity W 1000 Facility water 35oC 800 Facility water 10oC 600 Facility water 25oC 400 200 0 0 10 20

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

60 15 0.4 0.3 150 0.4 0.4 MHK 40 10 0.3 0.3 100 0.2 0.2 0.2 MHS 5 20 50 MHC 0 0 40 Gripping point L (mm) 120 80 160 200 20 40 60 Gripping point L (mm) 80 0 20 40 60 Gripping point L (mm) 80 100 120 MHT MHW2-25D MHW2-40D 160 50 MHY Pressure 0.7 MPa Pressure 0.7 MPa 140 0.6 0.6 40 Gripping force (N) Gripping force (N) 120 MHW 0.5 0.5 100 30 0.4 0.4 80 MRHQ 0.3 0.3 20 60 0.2 0.2 Misc. 40 10

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

60 15 0.4 0.3 150 0.4 0.4 MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 40 10 0.3 0.3 100 0.2 0.2 0.2 MHS 5 20 50 MHC 0 0 40 Gripping point L (mm) 120 80 160 200 20 40 60 Gripping point L (mm) 80 0 20 40 60 Gripping point L (mm) 80 100 120 MHT MHW2-25D MHW2

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VR VH Body ported single solenoid Foot bracket VFA3122 F 02 VHS Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size For 50 type manifold VFA3 1 50 W/o sub-plate (Pilot port: Rc) Nil W/o sub-plate (Pilot port: Other than Rc) Thread type for pilot port 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil 00F 00N 00T Rc G NPT NPTF

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

High Vacuum Angle Valve, XL Series

(dual operation) XLA-40 Normally closed XLC-40 Valve type Model 600 600 400 400 T msec T msec Bellows seal 200 200 0 0 0.4 0.5 0.6 0.7 0.3 0.4 0.5 0.6 P MPa P MPa Double acting (dual operation) XLF-40 Normally closed XLG-40 Valve type Model 80 80 60 60 T msec T msec 40 40 O-ring seal 20 20 0 0 0.4 0.5 0.6 0.7 0.3 0.4 0.5 0.6 P MPa P MPa Valve type XLD-40 Normally closed Model Main valve

13

Selection Graph (2)-1 Pad Diameter Selection Graph by Lifting Force Vertical Lifting (2 to 50) Selection Graph (1)-1 Pad Diameter Selection Graph by Lifting Force Horizontal Lifting (2 to 50) 50 40 32 25 20 16 13 10 8 50 40 32 25 20 16 13 10 8 -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa Pad diameter (mm) Pad diameter (mm) Pad diameter (mm) 6 6 4 4 2 2 Lifting

SMC

30 55 65 70 ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16 16 21 26 39 19 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 NA 2 2 2 2 2 4 4 4 GA 16 16 16 16 51 61 109 159 KA 125 173 223 13-/22-MXS16L-10 13-/22