Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set)

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set)

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc

LX

pitch N x P U 20 N 5 C (5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

CJ2

Bore size (mm) 10 16 Z 93 S 65 WW 4.5 WB 13.5 WA 14.5 NB 20 NA 21 GB 6.5 GA 7.5 FB 14.5 C 17 B 15 94 66 5.5 13.5 14.5 20 21 6.5 7.5 19 20 18.3 6-3-9 10 10 Series CJ2 Double Clevis Style (D) CJ2D Bore size Stroke Z + Stroke S + Stroke +0.030 0 Rod end nut CDH9 Clevis pin (cdd9 ) Piping port 2-M5 x 0.8 0.030 0.060 T-bracket For details, refer to page 6-3-11.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

20 stations (Max.)

Vacuum

Rolled steel WCS4 x 0.7 WCSs x 0.8 WCSG x 1 WCSS x 1 WCS10 x 1 20+Slroke s16-a32 ) 26 1 4 M4 x O.7 5 M5 x 0.8 6 1 8 4 12 40 1 9 . 5 7.6 Depth 12.5 1 5 . 5 85.5 29 1 6 M4 xO.7 M 6 x 1 O 8 20 5.5 9 t o 46 9.5 Deplh 8 13.5 19.5 96 ) 20 M5 x 0.8 A M8 x 1.25 10 28 5.5 9 20 50 9.5 Deplh I 1 9 24.5 104 42 24 N,l5 x 0.8 1 0 [,110x 1.25 32 6.6 13.5 24 52 1'l Depth 1 1 . 5 21 30.5 I t o ' shorrer DdRle

Free Mount Cylinder

S T S T S T S T S T C(D)UK6C(D)UK10C(D)UK16C(D)UK20C(D)UK25C(D)UK32For the auto switch weight, refer to page 68 to 72.

Vacuum

Rolled steel WCS4 x 0.7 WCSs x 0.8 WCSG x 1 WCSS x 1 WCS10 x 1 20+Slroke s16-a32 26 1 4 M4 x O.7 5 M5 x 0.8 6 1 8 4 12 40 1 9 . 5 7.6 Depth 12.5 1 5 . 5 85.5 29 1 6 M4 xO.7 M 6 x 1 O 8 20 5.5 9 t o 46 9.5 Deplh 8 13.5 19.5 96 20 M5 x 0.8 A M8 x 1.25 10 28 5.5 9 20 50 9.5 Deplh I 1 9 24.5 104 42 24 N,l5 x 0.8 1 0 [,110x 1.25 32 6.6 13.5 24 52 1'l Depth 1 1 . 5 21 30.5 I t o ' shorrer DdRle

•

4 Urethane tube H&lil 6 Urethane tube M8X1 AS 012 1>8 0110 1>1. 1>20' 1>32 40I>li~ Symbol T hread diafP"cft size ~} 16 2 4 6 8 10 13 20 25 32 40 50 Type AatlvDe Aat with rib ,o..ep \YIJ8 U4 UlS !!' .!!l t ~lI>h~... M10X1 AlO I'!

MG

0 r @4 e o t 16: 25 stroke MX 20, 25: 75 stroke or less !8 MTS !

Environment

0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 11LEFS 1500 1500 1500 Mep 11LEJS 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m 25AL3 Z 500 500 500 LEC 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] LEC S 1500 1500 1500 LEC SS-T LEC Y L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless 500 500 500

CJ2

Weight (g) Bore size (mm) 10 Bore size (mm) 10 16 Mounting bracket 16 Basic weight 24 55 Foot CJ-L016B CJK-L016B Additional weight for each 15 of stroke 4 6.5 Flange CJ-F016B CJK-F016B T bracket Axial foot 20 20 CJ-T010B CJ-T016B Mounting bracket weight T bracket is used with double clevis (D). Front flange 15 15 Auto Switch Mounting Bracket Part No.

7

Grommet Port size P A B C E F I J K L D M T T T 55 (61) 126.5 (134.5) 74.5 (82.5) 82.5 (90.5) 69 (77) U 68.5 (74.5) U V U 107.5 (113.5) 29 60.5 (66.5) 5 C VXD2 3/4 27 64.5 52.5 30 30 71 20 4.5 17 51 32.5 38.5 35 6 D VXD2 1 29.5 67 55 32.5 33 35 95 22 4.5 20 59.5 45.5 49.5 42 Model Mounting bracket dimensions Port size P a b d e f 3/4 1 50.5 55.5 77.5 85.5 74 81 51 58 45.5 49.5 VXD2 VXD2

Table of Contents

Digital Flow Switch, High Temperature Fluid Type For Water Series PF2W How to Order Integrated display type PF2W7 20 T 03 27 Flow rate range T Temperature range Unit specifications 0.5 to 4 l/min 2 to 16 l/min 5 to 40 l/min 04 20 40 0 to 90C Nil M With unit switching function Fixed SI unit Note) Thread type Wiring specifications Note) Fixed unit: Real-time flow rate: l/min Accumulated flow

Compact

135) 65 20 37 LEC 32.8 20 LEC S Motor cable length 300 181 0.3 7.5 LEC SS-T Note 1) [ ] for when the direction of return to origin has changed.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: K (mm) X W1 L1 max L3 max (mm) Shaft type L3 = Y W2 L2 max L4 max L1 = W1 = J K T J K T J K T J K T Size Size L2 1 4.5 to 14 10 10 X 3 Y 1 0.5 to 2 0.5 to 2 6.5 to 14 L1 1 L4 = L2 = Y = L2 1 5.5 to 18 15 15 X 4 Y 1.5 0.5 to 2.5 0.5 to 2.5 8 to 18 L1 1 L2 1 6 to 20 20 20 Y 1.5 X 4.5 0.5 to 3 0.5 to 3 9 to 20 L1 1 X = L2 2 8.5 to 22 30 30 Y 2 X 5 0.5 to 4 0.5 to 4 11.5

2/3 Port Valve

20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 1 4 3 8 4.1-71 Direct Air Operated 3 Port Valve/Manifold Series VVXA31/32 For Air, Gas, Vacuum and Oil Compatible with a wide variety of fluids.

ZP

@ ZP3-T(04/06/08)B;(JB/K)15-@ ZP3-T(04/06/08)UM(JB/K)20-@ ZP3-T(04/06/08)B;(JB/K)20-@ ZP3B-T2A(J/K)3-B5 Note 1) ; in the table indicates the pad material.