Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(mm) Bore size D-A9, D-A9V D-M9, D-M9V D-F9W D-F9WV (mm) 10 15 25 5 10 Minimum Stroke for Auto Switch Mounting (2 pcs.)

Cylinder with Lock Series CLS

Shown below is an example of a model selection procedure for an intermediate stop application (including an emergency stop in operation).

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When the DIN ra lis ncruded wlhour an slunil rhe D N ra lenqllr wll accommodale an S Lnrland one Inpul bock Input block type lnout block common specification +COM -coM Note) wlhout sr unir, the symbolis n Valve stations B E port position 2 stations N o L e l ) Double wi ng specilication 16 stations 2 stalions Nore 2) Specified layoui (Up 10 32 solenoids possible ) 20 stations U side (2 to

Sensor Monitor

Display resolution Output mode OUT1 OUT2 Hysteresis mode 1/10 of P_1 (n_1) 1/10 of P_2 (n_2) Window comparator mode 1/4 of P1H P1L (n1H n1L) 1/4 of P2H P2L (n2H n2L) Error output 1/7 of rated maximum pressure rated minimum pressure Switch output off -43No.PS-OMU0012-C During an error output or when the switch output setting is OFF, the pressure value meter at the atmospheric pressure

Vacuum Equipment

Air suction filter 13-10-1 Series ZFA Using an ejector with a 2-stage nozzle, the ejector system can be used most efficiently. Air suction filter 13-10-4 Prevents problems related to vacuum circuits or airborne contaminants.

CNA

DL DD DA DU DC DX DE DO DR DT DS DH DF B W1 Z A B A + B + 90 CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 +0.058 0 11 57 35 65 15 85 10 9 17 8 40 52 60 10 234 10 +0.070 0 11 12 57 35 65 18 85 10 9 17 8 40 52 70 10 261 +0.070 0 13.5 12 60 162 67 40 80 25 105 12.5 11 22 10 50 66 85 10 280 16 +0.084 0 16.5 93 60 100 31.5 130 15 13.5 24 12 65 90 102 12 337 20 +0.084 0 16.5 93 60 100 35.5 130 15 13.5

CNA

DL DD DA DU DC DX DE DO DR DT DS DH DF B W1 Z A B A + B + 90 CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 +0.058 0 11 57 35 65 15 85 10 9 17 8 40 52 60 10 234 10 +0.070 0 11 57 35 65 18 85 10 9 17 8 40 52 70 10 261 12 +0.070 0 13.5 12 60 162 67 40 80 25 105 12.5 11 22 10 50 66 85 10 280 16 +0.084 0 16.5 20 93 60 100 31.5 130 15 13.5 24 12 65 90 102 12 337 +0.084 0 16.5 93 60 100 35.5 130 15 13.5

A_HEC-OM-I009

-1 Signal and style of connectors -10-1 Table 10-2 Power Supply Cable -10-2 Abbreviations Abbreviation (The order of ABC) Meaning AC Alternating Current AT Auto Tuning Chap.

Pressure switch for energy-saving control ejector with N.O. type valve

If resetting fails, an investigation by SMC Corporation will be required. Displayed in the case of an internal data error.

MXS

(Unit: mm) A 2 2.5 4 5 5.5 10 B Model MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 3 3.11-5 Air Slide Table Series MXS How to Order MXS 12 50 F9N S Air slide table Number of auto switches Bore size (Stroke mm) 2 1 n 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100

HEC-OM-U015

If the fluid is left inside, an accident and damage can result during transportation. 0.04 0.04 Warning If instructions are not followed there is a possibility of serious injury or loss of life. 0.02 0.02 0.00 0.00 0 5 10 15 20 Danger In extreme conditions, there is a possibility of serious injury or loss of life. 0 5 10 15 20 3.3.1 Cooling Capacity Facility water flow rate L/min Facility

Guide Cylinder Series MGG

(Assuming approximately 30% dispersion) There may be the case to change substantially depending on an ambient environment. 4 4 4.5 5 6 6.5 6.5 7 8 10 9 10 10 11 D8 10 9 10 10 11 5 5 5.5 6 7 7.5 7.5 8 11 11 13 13 14 14 14 17 35 40 40 45 45 45 45 50 16 18 -X 8 10 9 10 10 11 Individual -X 387 Series MGG Auto Switch Mounting Bracket: Part No.

33

Outlet: 60 Hz Outlet: 60 Hz 20 20 0.1 0.1 10 10 Outlet: 50 Hz Outlet: 50 Hz Return port Allowable operating range Return port Allowable operating range 0 0 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] 202 Thermo-chiller Basic Type HRSE Series Dimensions HRSE012/018/024-A-10/20/23 Ventilation air outlet Ventilation air inlet

PA3000/5000/PAX1000

When an air operated pump is dry, operate the solenoid valve at a switching cycle of 1 to 7Hz. If operated outside of this range, the suction lifting height may be less than the rated value. 10. Other 1. Test the unit before using it in an actual equipment application.

Water-cooledThermo-chiller

Specific heat C [kg/m 3] [g/L] ([kcal/kgC]) [J/(kgK)] 10C 1.10 x 10 3 3.02 x 10 3 0.72 20C 1.08 x 10 3 3.15 x 10 3 0.75 50C 1.06 x 10 3 3.27 x 10 3 0.78 80C 1.04 x 10 3 3.40 x 10 3 0.81 Water Density : 1 x 10 3 [kg/m 3] [g/L] Specific heat C: 4.2 x 10 3 [J/(kgK)] (1.0 [kcal/kgC]) 107 Thermo-chiller Series HRW Fluorinated Fluid Type SEMI How to Order 002 H HRW Fluorinated FluidType Option

High-precision Digital Pressure Switch ( compatible)

Display resolution Output mode OUT1 OUT1 Hysteresis mode 1/10 of P_1 (n_1) 1/10 of P_2 (n_2) Window comparator mode 1/4 of P1H P1L (n1H n1L) 1/4 of P2H P2L (n2H n2L) Error output 1/7 of rated maximum pressure rated minimum pressure Switch output off -42No.PS-OMV0004-H During an error output or when the switch output setting is OFF, the pressure value meter at the atmospheric pressure

Thermo-con

Circulating FluidTypical Physical PropertyValues Fluorinated Fluids Density [kg/m 3] Physical property value Temperature 10C 20C 50C 80C Specific heat C [J/(kg K)] 1.87 x 10 3 0.87 x 10 3 1.80 x 10 3 0.96 x 10 3 1.74 x 10 3 1.05 x 10 3 1.67 x 10 3 1.14 x 10 3 Water Density : 1 x 10 3 [kg/m 3] Specific heat C: 4.2 x 10 3 [J/(kg K)] 133 Peltier-Type Chiller Thermo-con (Air-cooled) Series HEC-A

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 35 190 190 190 190 190 190 190 10 10 10 10 10 10 10 10 10 10 10 10 10 10 90 80 65 50 45 40 35 60 50 50 40 40 30 20 17 23 27 33 37 44 57 36 50 66 68 78 91 115 40 54 60 72 82 95 19 40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

Digital pressure switch for energy-saving control ejector

(Approximately 10 to 15 minutes) 43 - NO. ZQ-OM01501 Troubleshooting Troubleshooting If an operational failure of the pressure switch occurs, please select the cause of failure from the flow chart below.

10

4.5 5 5 5.5 6.5 D-P4DW 4 4 4 4.5 4 4.5 4.5 D-A9l/A9lV 7 7.5 8.5 9.5 9.5 10.5 12 D-Z7l/Z80 7.5 8.5 7.5 9.5 9.5 10.5 13 D-A5l/A6l 9 9 10 11 11 11 10 D-A59W 13 13 13 14 14 15 17 D-A3l/A44 9 9 10 11 11 11 10 * The switch mounting bolt is supplied with the switch.