4-channel Flow Monitor ( compatible)

Set the connection range of PF2D5. 0: 4 L 1: 20 L 2: 40 L rAnG (PF2D5, Selection of connection range) Y U8 0x00 3 R/W (0) 0: PFA (PF2A5) 1: PFW (PF2W5) 2: PFd (PF2D5) 3: USEr (User setting) 4 R/W Setting of connection product Y U8 0x01 (1) Setting of connection sensor (For PF3W5) Y U8 0x00 0: FloW 1: tEMP 5 R/W (0) Unit (Selection of display unit, for PF2A5) Y U8 0x00 0: L 1: Ft 6 R/W (0)

HRX-OM-R016

-(BJMT) . 9-5 9.3.2 HRS030-W-20-(BJMT) . 9-5 9.4 Cooling capacity . 9-6 9.4.1 HRS030--20-(BJMT) . 9-6 9.5 Heating capacity . 9-6 9.5.1 HRS030-A-20-(BJMT) . 9-6 9.5.2 HRS030-W-20-(BJMT) . 9-6 9.6 Pump capacity. 9-7 9.6.1 HRS030--20-(BJM) . 9-7 9.6.2 HRS030--20-T . 9-7 HRS Series HRX-OM-R016 Contents 9.6.3 HRS030--20-MT . 9-8 9.7 Required facility water flow (for water-cooled type) . 9-8 9.8

CJ2X/CUX/CQSX/CQ2X/CM2X

0.05 0.05 MK(2) Standard Stroke RS Q G Bore size (mm) Standard stroke (mm) RS H A 10, 16 5, 10, 15, 20, 25, 30 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 RZQ Precautions MI W S CEP1 Be sure to read before handling.

CJ2X/CUX/CQSX/CQ2X/CM2X

25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEF How to Order LEJ 11 Vacuum type LEJS 11 40 S2 A 500 H LEL Clean series q w e r y u i o !0 !

HRX-OM-R005

-(BJM) . 9-5 9.3.2 HRS060-W-20-(BJM) . 9-6 9.4 Cooling capacity . 9-7 9.4.1 HRS060--20-(BJM) . 9-7 9.5 Heating capacity . 9-7 9.5.1 HRS060-A-20-(BJM) . 9-7 9.5.2 HRS060-W-20-(BJM) . 9-7 9.6 Pump capacity. 9-8 9.6.1 HRS060--20-(BJM) . 9-8 9.7 Required facility water flow (For water-cooled type) . 9-8 9.8 Compliance . 9-9 HRS Series HRX-OM-R005 Contents 9.9 Sample DoC. . 9-10 9.10 Daily Check

17

Technical Data 47 6 1193 MY1B Series Stroke Adjustment Units With adjustment bolt MY1B AZ Stroke Bore size E EA EB W TT h Stroke adjustment unit FC EC EY (mm) FC Applicable cylinder E EA EB EC EY h TT MY1B25 MY1B32 MY1B40 W 60 5 (Max. 16.5) 3.5 13 53.5 6.5 49 10 20 8 (Max. 20) 4.5 17 67 8.5 61 12 25 74 9 (Max. 25) 4.5 17 81.5 9.5 76 15 31 94 With high load shock absorber + adjustment bolt

Vacuum Pad

to 50) PTSF-(A5/AG1/A12/AG2/AG3) ZP3P-T (20 to 50) PTSF-(B5/B8) w T male thread adapter assembly (With gasket) p.3 p.3 Pad diameter Part no. 20 25 35 50 Dimensions ZP3PA-T1-A5 V V ZP3PA-T1-AG1 V V ZP3PA-T2-A12 V V ZP3PA-T2-AG2 V V ZP3PA-T2-AG3 V V p. 11 w T female thread adapter Pad diameter Part no. 20 25 35 50 Dimensions w T male thread adapter assembly w T female thread adapter

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

0 o u r t !1 q i !2 e !

240

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

Stations: 02 (2 Stations), Piping: U (U Side: Open; D Side: Closed), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 40 (5 to 40 L/min), Return Unit Components: S (w/Flow Adj.

Valve; Stop Valve: None), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: 2T (Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None; Temp.: Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector)

Valve; Stop Valve: None), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: 2T (Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None; Temp.: Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector)

Valve; Stop Valve: None), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: 2T (Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None; Temp.: Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector)

Valve; Stop Valve: None), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: 2T (Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None; Temp.: Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector)

Valve; Stop Valve: None), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: 2T (Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None; Temp.: Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector)

Valve; Stop Valve: None), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: 2T (Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None; Temp.: Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector)

Valve; Stop Valve: None), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: 2T (Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None; Temp.: Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector)

Valve; Stop Valve: None), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: 2T (Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None; Temp.: Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector)