5 Port Air Operated Valve Series SYA3000/5000/7000 1

Mounting hole 4-7 Mounting hole 4-7 Mounting hole 5-3-34 5 4/5 Port Air Operated Valve Series VSA440 Model SA Flow characteristics P A/B C [dm3/(sbar)] 12 15 13 15 14 17 15 17 Note) Weight (kg) Valve model Body size Function Port size Rc A/B EA/EB Pilot port size VA C [dm3/(sbar)] 13 16 13 16 13 16 13 17 b 0.24 0.32 0.24 0.32 0.26 0.25 0.18 0.30 Cv 3.3 4.2 3.3 4.2 3.2 4.2 3.0 4.3 b 0.15

Cylinder with Lock

7 #6 #8 #7#5 #0#1#9 @1@0 @2 @3 @6 @8$0@4@5 @9 t !9 #3#2 #4@7!7!2 Component Parts Component Parts No. Description Material Qty.

10

7 !9 !1 !4 !0 !3!8 !6 !5 12-2 12-1 7-2 7-1 1-2 1-1 1-1 Width across flats Rod view 32 (2:1) Component Parts No.

Magnetically Coupled Rodless Cylinder

51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Compressed Air Preparation Filter

A B C D E EE F G H J K Applicable model Y200T-D 3.2 67 29 51 24 33 11.5 5.5 15.5 3.5 30 AFF/AM/AMD/AMK20 Y300T-D 4.2 85 42.5 67.5 35 14 7 20 6 41 AFF/AM/AMD/AMK30 Y400T-D 5.2 115 50 85.5 40 55 18 9 26 7 50 AFF/AM/AMD/AMK40 Part no.

CLA

-A34(C), IJ.-A44(C), IJ.-AS4, F-B54 Max. SOmA I Max, 25mA Max. 12.SmA .

Title not found

13 7 6 9 8 11 10 3 Connector B terminal no.

MQQ

thread effective depth C 2-Rc 1/8 F Q Y 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E Bore size (mm) Stroke range (mm) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6 29 5.5 M3 x 0.5 4 38 5 8 20 3.5 6.5 14.5 7 5 16 10 to 60 44 M6 x 1.0 34 8 8 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18

MQQ

Stroke range (mm) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6 29 5.5 M3 x 0.5 4 38 5 8 20 3.5 6.5 14.5 7 5 16 10 to 60 44 M6 x 1.0 34 8 8 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18 10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54 M6 x 1.0 42 12 12 45 8.5 M6 x 1.0 7 60 4.5 10 12 34 5.5 9 23

RQ

Refer to page 7-7-14 for details on rod end nut and accessories. Double clevis bracket material: Carbon steel 7-7-9 9 Series RQ Dimensions: 32, 40, 50 For the auto switch mounting position and its mounting height, refer to page 7-7-16.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

83503 Flat ribbon cable connector Socket: 10 pin MIL type with strain relief Conforming to MIL-C-83503 D-sub connector Conforming to MIL-C-24308 JIS-X-5101 Flat ribbon cable connector Socket: 26 pin MIL type with strain relief Conforming to MIL-C-83503 Applicable connector Internal wiring +COM, COM Location Valve 4(A), 2(B) port Porting specifications Direction Lateral, Upward, Downward Metric

Table of Contents

Exploded View: VQ0-Plug Lead Unit (F, P, C, S kit) .

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26

VQ5000

(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard

SZ3000

Particularly when using a C-R element (surge voltage suppressor) for the protection of a switching element, take note that leakage voltage will increase due to leakage current flowing through the C-R element.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

. 5 7 20 X20 Same as standard.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

port 3 22.5 3 22.5 84 96 e ng e ng ra 3 ra on on ti A port ta 3 ti 90 4 ro ta 7 ro m 1 A port A port u Clockwise m e e m g s 3 u i ni n w im k C ra c l o Mi 6 3 8 ax n o 1 ti M ta ro e m g u m n ni Mi 180 e ra C s l i o w c k n tio ta ro m mu xi Ma Positioning pin hole Positioning pin hole Position of bottom positioning pin hole Position of bottom positioning pin hole With external shock

CNG

NT-02 NT-03 NT-G04 (15) (19.6) (21.9) M8 x 1.25 M10 x 1.25 M14 x 1.5 12.5 16.5 18 13 17 19 20 25, 32 40 5 6 8 20 C type 8 for shaft C type 8 for shaft IY-G02 0.040 0.076 8 16.2 21 7.6 0.9 1.5 20 CD-G02 0.040 0.076 8 38.6 1.5 43.4 7.6 0.9 C type 10 for shaft C type 10 for shaft IY-G03 20.2 25.6 9.6 1.15 0.040 0.076 10 1.55 25, 32 0.040 0.076 10 CD-G25 42.6 1.55 48 9.6 1.15 25 C type 10 for