Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

flange) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bottom view of MXQ6-30 13223 6.5 20 16 13 3.5 0.3 19.2 20 Z ZZ G (NN 1) x H H 10.5 5.5 10.5 5.5 A B 3H9( ) depth 2.5 +0.025 0 3.2 3.2 6.3 7 7 12 1 A B NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 2.5 +0.025 0 HA GA A-A B-B (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5

10

Cushion valve G 2 x Rc P W V Port G E Width across flats KA TX D E B C H1 AL MM MB MA N 2 x 4 x J N TY B C Width across flats B1 A H K F TT ZZ + Stroke S + Stroke With rod boot d e 10.2 10.2 f h l [mm] Bore size [mm] A AL B B1 C D E F G H H1 J K KA MA MB MM N P S TT TX TY V W ZZ 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 27 1/8 84 17 48 49 4 6.5 135 40 30 27 52 22

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

d (H8) M A B C D G L F E K J H N Applicable cylinder type Bore size (mm) Spring pin P Order no.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

0.70 B 0.56 0.66 0.70 A 1.50 1.81 2.29 A 1.50 1.81 2.29 B 0.48 0.58 0.61 B 0.48 0.58 0.61 A 1.42 1.72 2.21 A 1.42 1.72 2.21 B 0.60 0.70 0.74 B 0.60 0.70 0.74 A 1.54 1.85 2.33 A 1.54 1.85 2.33 B 0.37 0.46 0.50 B 0.37 0.46 0.50 A 1.30 1.61 2.10 A 1.30 1.61 2.10 Bore Bore 075 (3/4") 106 (1 1/16") 150 (1 1/2") 075 (3/4") 106 (1 1/16") 150 (1 1/2") Mounting Height (NCDM) (in) D-C7 D-C80 D-H7

Secondary Batteries

How to Order 90 AR 30 t y K 03 B Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

MGP

+ Stroke A + Stroke WA Z JB 6H7 depth 10 FA FB S K E G 6H7 depth 10 With front lock 7 6 HN 10 5 6H7 DM 23 b a Section XX detail e c d End lock mechanism (Locking type manual release) T-slot dimensions (mm) 30 Bore size (mm) a b c d e With rear lock 13.3 20.3 12 8 22.5 80 15.3 23.3 13.5 10 30 100 (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA J JA JB K L 80 146.5 106.5

SMC

JIS B 8370: General rules for pneumatic equipment. JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment of machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. 2) Labor Safety and Sanitation Law, etc. Caution: Operator error could result in injury or equipment damage.

15

flange to the housing B using motor flange fixing screws (included parts).

MGG

Hs Approx. 14.5 B 24.5 Auto switch D-B5, B6 D-G5, K5 A B 8.5 Approx.

MGP

+ Stroke A + Stroke WA Z JB 6H7 depth 10 FA FB S K E G 6H7 depth 10 With front lock 7 6 HN 10 5 6H7 DM 23 b a Section XX detail e c d End lock mechanism (Locking type manual release) T-slot dimensions (mm) 30 Bore size (mm) a b c d e With rear lock 13.3 20.3 12 8 22.5 80 15.3 23.3 13.5 10 30 100 (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA J JA JB K L 80 146.5 106.5

Refrigerated Air Dryer

AT IDF IDU IDF FS C IDFA IDFA F IDFB M IDH N ID L P IDG K 4 x 13 IDK Dimensions AMG (mm) A B C D E F G K L M N P Q Port size Model AFF IDFA22E IDFA37E R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AM AMD IDFA55E, IDFA75E AMH A R B AME AMF Q E ZFC D SF G SFD F LLB C AD GD M N L P K 4 x 13 Dimensions (mm) A B C D E F G K L M N P Q R Model Port size IDFA55E IDFA75E 800 (868

JXCx-OMU0004

1 2 A A-1 1 LE-CP-1 L B B-2 6 1 1.5m B A-2 5 COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 S B B-6 9 B A-6 8 3 14.2 2 1 8 14) B1 A1 17.7 6 5 2 1 18 B6 A6 16 15 L 11 30.7 11.2 [820m] A B-1 2 A A-1 1 LE-CP-1 L B B-2 6 B A-2 5 8 8m* COM-A/COM B-3 3 COM-B/ A-3 4 A 10m* Shield B 15m* Vcc B-4 12 C 20m* GND A-4 13 A B-5 7

CL

BP BP lock-up port, Unlocked when pressurized A BP BP lock-up port B With rod boot S + Stroke Long stroke 2-Rc P EA D e 4-LD Plug cap 2 positions Plug cap 2 positions Plug cap 2 positions Width across flats KA l LS + Stroke ZZ + Stroke h + l ZZ + l + Stroke Bore size (mm) Stroke range (mm) F FA GA GB GC H1 K KA LD LH J A AL B B1 BX BY C D EA EB BP Without rod boot With rod boot Up to 500

REA/REB

Note 2) 15 has internal magnets in the body. 10-2-70 70 Sine Rodless Cylinder Direct Mount Type Series REBR Dimensions: 15, 25, 32 Operating direction B Operating direction A Operating direction A K W HB HB HC RE A B X REC Piping port P (Plug) Operating direction A Piping port P (Plug) Operating direction B N H CX HA Y T CB 8-MM thread depth M HT HP CY 4-counterbore B Counterbore depth C

REA/REB

Note 2) 15 has internal magnets in the body. 10-2-70 70 Sine Rodless Cylinder Direct Mount Type Series REBR Dimensions: 15, 25, 32 Operating direction B Operating direction A Operating direction A K W HB HB HC RE A B X REC Piping port P (Plug) Operating direction A Piping port P (Plug) Operating direction B N H CX HA Y T CB 8-MM thread depth M HT HP CY 4-counterbore B Counterbore depth C

REA/REB

LD Piping port P Operating direction A 7 Piping port P Operating direction B W K G With switch rail Q + Stroke Z + Stroke Piping port P (plug) Operating direction B HS CR HR Plug 22 8 Piping port P Operating direction B Piping port P (plug) Operating direction B 8 Piping port P Operating direction A 16 19.5 16 Plug REBR15 REBR15 (mm) A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

11 12 6.6 12 38 2 7 A B NN x M8 x 1.25 thread depth 16 6H9 ( ) depth 6 +0.030 0 6H9 ( ) depth 6 +0.030 0 GA HA Section AA Section BB (mm) Model ZZ 133.5 133.5 133.5 143.5 156.5 197.5 238.5 296.5 336.5 M 92 92 92 102 115 156 197 255 295 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 K 35 45 55 65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2

MY1

G D Za 4-MM E E E E E E E E C F B G D Section Z detail (adjustable range) Section Za detail (adjustable range) F B Q P Zb JJ B B C Z B F K H A L 2 x 2LD H A H A Section Zb detail (adjustable range) Holding bolt J Mounting direction 2 Applicable cylinder MY1B50 MY1B63 Mounting direction 1 C C A C H B D G F Model 110 131 55 65 37 37 110 130 MY-J50 MY-J63 70 80 90 100 126 149 Mounting direction

LEH_C

3 3 5 5 5 K K 5 (mm) NPN NPN 10 LECP6 ( PNP PNP 4 4 10 LECP1 1 LECP1 ( 1 NPN NPN 6 6 16 16 1P 1P PNP PNP 20 10 20 10 25 14 25 14 AN LECPA ( AP AN LECPA NPN NPN A A 32 22 32 22 AP PNP PNP B B (m) 40 30 40 30 C C 8 8 8 8 A A 1.5 1 1.5 1 10 10 B B 3 3 3 3 15 15 ( C C 5 5 5 20 20 F F 5 () () R R S S A B C / P.42 7.3 (NPNPNP) 12 - 2.1.3 3 10 2 5 1 4 7 6 9 8 1 2 3 4 +