NVEPA|VEFseies

P O Flow Characteristics/Operating Principles P O, O Construction Detail .. PO Dimensions P O Installation PO Power Amp.: Series VEA Model / S pec ific ations . . . . P O H o w t o O r d e r . . . . . . . . . P @ Dimensions/ Handling Instructions . . . . . P@, @, @ External Connections P@, @ Features and Functions P@ Sample Applications . . .

Fluoropolymer Piping Equipment

(Example) Body class 3 A side: 10 x 8 B side: 8 x 6 Order as shown below. A SMC LVN30 S 10 08 B Different dia. tubing size (B side) Applicable tubing size (A side) 938 High Purity Fluoropolymer Needle Valve LVN Series Standard Specifications Model LVN20 LVN30 LVN40 4, 6 Tubing O.D.

KT10

F H J L N P R Option Code Specification Standard (Cv: 0.06) High flow (Cv: 0.12) No code HF O-ring material 1) Not available for material code B.

With Factory Installed

Metal bowl with level gauge fitting B B B B p AW3001 220.5 213.5 219.5 240.5 AW4001 272 265 271 292 IN-OUT reversal mounting "'" DimenSions except B are same as the standard type.

240

[ ]: Value of the D-M9A ( ): Value of the D-A90/A93 D-M9V D-M9WV D-M9AV D-A9V A 20 (22) W B ( ): Value of the D-M9AV/A9V (mm) D-A9, D-A9V D-M9W, D-M9 D-M9WV, D-M9V A 16.5 15.0 22.0 30.0 D-M9A A 16.5 15.0 22.0 30.0 D-M9AV A 16.5 15.0 22.0 30.0 Bore size (mm) 6 10 16 20 B 2.5 7.5 8.0 10.5 B 2.5 7.5 8.0 10.5 W 5.5 0 0 2.5 W 7.5 2.0 2.0 0.5 B 2.5 7.5 8.0 10.5 B 2.5 7.5 8.0 10.5 A 16.5 15.0 22.0

FQ1

P Note) Specity seal material in place of "" (N for NBR or V for FPM). 4.

IDX-OM-M051

Replacement method Standard replacement period Refrigerating compressor 1 B 20,000 hours (6 years) Plate type heat exchanger 1 B 20,000 hours (6 years) Water regulating valve 1 B 20,000 hours (6 years) High pressure switch 1 B 20,000 hours (6 years) Low pressure switch 1 A 20,000 hours (6 years) Magnetic contactor 1 A 20,000 hours (6 years) Programmable controllers 1 A 20,000 hours (6 years

VFA3000

5 Port Air Operated Valve Series VFA3000 How to Order Thread type (Including pilot port) Nil Rc G NPT NPTF Port size (P, A, B port) F N T 01 02 1 8 1 4 R1, R2 port are 1/8. Option F Foot bracket Mounting bracket are supplied, but unattached.

I/O Configurator (NFC version)

Setting: Operate the NFC-B preferentially using the protocol used. Select the icon. (Windows7 is used in this Operation Manual) (2) Double-click the [NFC port/PaSoRi] icon on the control panel to display the setting window. Select [NFC-B] only for [Detectable cards].

PSxx-OMR0001CN

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

HRS100/150

View B-B 50 HRZ HRZD Accessory: Y-strainer mounting view HRW * Mount it by yourself on the circulating fluid return port.

Transfer

C D Side support B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

Suction cups with flange

ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B-7A-X2 11 12 12 14 ZP25B ZP 32 B ZPG32B-7A-X2 14 15 15 18 ZP32B ZP 20 UT ZPG20UT-7A-X2 4 4 4 4 ZPT1-A6 ZP2-20UT ZP 16 J ZPG16J-7A-X2 8 8 8 9 ZPT2-7A-X2 ZP2-16J ZP B25 J ZPGB25J-7A-X2 14 15 15 18 ZP2-B25J ZPT3-7A-X2

Thermo-chiller

dimension) 20.4 [518] 1.97 [50] 24.3 [617] View A-A View B-B 1.97 [50] Accessory: Y-strainer mounting view Mount it by yourself on the circulating uid return port.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

port Applicable cable O.D. 4 to 6.5 MAX.10 71.5 78.5 71 Indicator light (Type DZ only) 67.5 59 32 17 2 2-4.5 (Mounting hole) P mPm P 19 35 Pg.7 2-Rc 1/8 1(P) port A A A 11 20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A) port 19 35 n-Rc 1/8 3(R) port 47.5 11 R R P = 19 19 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133

PSxx-OMU0005CN

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8,433: *2) 1. 2. 3. 1. 2. 3. 4

53

Note 2) 400 V type is provided with an earth leakage breaker -B as standard.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

. *2 With ejector 63, 80 Application Examples Robot handling Palletizing Automobile Case packer 254 Vacuum Pad with Ejector ZHP Series 63, 80 RoHS ZK2 How to Order ZQ ZHP 80 BM N B 00 Without ejector ZR ZB ZHP 80 BM N B 10 C6 S With ejector ZA Pad diameter Exhaust release ZX 63 63 80 80 S Silencer exhaust ZM Supply (P) port Pad form Symbol Type Port size C4 Metric 4 One-touch fitting C6 6

MHS

2 P 3 4 5 P 6 7 8 C 9 10 NBR 11 NBR 12 NBR 13 NBR MHSH3-A32A MHSH3-A40A MHSH3-A50A MHSH3-A63A MHSH3-A80A NBR MHSH32A-PS MHSH40A-PS MHSH50A-PS MHSH63A-PS MHSH80A-PS 1) 10,11,12,13 1) 10111213 1 MHSH3DB MHSH3-A B 1 P 2 S 3 4 5 S 6 7 8 C 26 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications