LECP6_C

, 1 (3m) CN4 CN1 EMG C24V M24V 24V 0V 0V 20 - 2 DC24V EMG () DC24V 0V Ry Ry U (1 ) BK RLS EMG Ry C 24V 24V 0V 0V M 24V (2 ) BK RLS Ry EMG C 24V 24V 0V M 24V 0V (3 ) BK RLS Ry EMG C 24V 24V 0V M 24V 0V OFF 21 - 3() DC24V M24V EMG () DC24V 0V Ry Ry U (1 ) BK RLS EMG C 24V Ry 24V 0V M 24V 0V (2 ) BK RLS EMG C 24V Ry 24V 0V M 24V 0V (3 ) BK RLS EMG C 24V Ry 24V

3 Port Solenoid Valve Series VQ100 1

C (+) () Lead wire color Lead wire color B () Reset 100 VAC, 200 VAC 100 VAC, 200 VAC AC Yellow Yellow Set Blue Red A A Single solenoid (AC) Latching solenoid (AC) A Set A Blue Red COM Blue Red SOL. C C SOL. SOL. C COM SOL. Gray Gray Reset Single B C B Reset Latching Note 1) Single: No polarity ON: Orange light lights. Note 2) Setting side energizing: Orange light lights.

Cylinder with Lock Series CNG

NT-02 NT-03 NT-G04 (15) (19.6) (21.9) M8 x 1.25 M10 x 1.25 M14 x 1.5 12.5 16.5 18 13 17 19 20 25, 32 40 5 6 8 20 C type 8 for shaft C type 8 for shaft IY-G02 0.040 0.076 8 16.2 21 7.6 0.9 1.5 20 CD-G02 0.040 0.076 8 38.6 1.5 43.4 7.6 0.9 C type 10 for shaft C type 10 for shaft IY-G03 20.2 25.6 9.6 1.15 0.040 0.076 10 1.55 25, 32 0.040 0.076 10 CD-G25 42.6 1.55 48 9.6 1.15 25 C type 10 for

VCA

D U 25 Approx. 44 R C C R G1/2 E E G1/2 B B 2-P Port size A A D 2-P Port size (S) Port size G1/2 Compatible heavy duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single flat Single flat D D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note ) Dimensions and tolerance of the shaft and single flat (a parallel keyway for size 40) are the same as the standard.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Program Top entry Side entry U S * For "C" type manifolds only * For "C" type manifolds only * For use with 24VDC valves only.

PSxx-OMT0001CN

4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -21No.PS-OMT0001CN-E 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5 C(4 ) C(6 ) F(G ) H 13 13.6 19 -22No.PS-OMT0001CN-E 2 ISA3--B-L () ISA3--B-L 1ISO16030 2ISO1179-1 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 L2 136.4 174.4 212.4 250.4 288.4 326.4 C(4 ) C(6 ) F

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

Dd9 L d l m t -0.030 -0.040 -0.040 -0.076 -0.040 -0.076 -0.040 -0.076 -0.050 -0.093 IY-J015 IY-G02 IY-G03 IY-G04 IY-G05 10 5 16.6 4.8 12.2 1.5 0.7 C type 5 for shaft 16 8 21 7.6 16.2 1.5 0.9 C type 8 for shaft 20 10 25.6 9.6 20.2 1.55 1.15 C type 10 for shaft 25, 30 10 41.6 9.6 36.2 1.55 1.15 C type 10 for shaft 40 14 50.6 13.4 44.2 2.05 1.15 C type 14 for shaft 9

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

Electromagnetic Digital Flow Switch

Analog Output Flow/Analog output Output A B C Voltage output 1 V 1.1 V 5 V Current output 4 mA 4.4 mA 20 mA C Model Rated flow [L/min] Minimum Maximum LFE1 0.5 20 LFE2 2.5 100 LFE3 5 200 B A Outside the range 0 Min.

PSxx-OMG0001CN

(mm 0.81.0 ZS-28-C 24-26 0.14-0.2 1.01.2 ZS-28-C-1 1.21.6 ZS-28-C-2 23 0.1-0.5 1.151.35 ZS-28-CA-4 1.01.2 ZS-28-C-3 20-22 0.3-0.5 1.21.6 ZS-28-C-4 1.62.0 ZS-28-C-5 SMC 3M ZS-28-C 37104-3101-000FL 1-1473562-4 ZS-28-C-1 37104-3122-000FL ZS-28-C-2 37104-3163-000FL ZS-28-CA-4 2-1473562-4 ZS-28-C-3 37104-3124-000FL ZS-28-C-4 37104-3165-000FL ZS-28-C-5 37104-2206-000FL -12No.PS-OMG0001CN-H

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 2 mounting screws (for mounting brackets) are included in bracket part no. 17-2-12 7 Series VCA Direct Operated 2 Port Solenoid Valve For Air Dimensions Grommet: G Conduit: C Q F D Q F 300 280 D VC G1/2 C R C R L VDW IN E E VQ Manual override A B B A 2-P Port size 2-P Port size VX2 VX Manual override

Series VCS

Q Approx. 300 F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Lubrication Equipment

A B 63 63 80 85 90 100 C Port size Rc(PT) INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model No. 1/4 15 15 15 20 22 22 141 164.5 170 180 230 251 3/8 1/4 , 3/8 , 1/2 3/4 B C D E F Port size Rc(PT) 3/4 , 1 1 Model No. A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

ZPT/ZPX

N S NBR Silicon rubber 40 50 40 50 57 86 160 224 Pad type 63 63 80 80 U Urethane rubber H Heavy duty F Fluoro rubber 100 100 E EPR Add NBR weight to the table on the right for other materials. 125 125 Dimensions ZP H 40 50 ZP H 63 80 ZP H 100 125 (mm) (mm) (mm) Model A 63 ZP63H B 65 80 ZP80H 82 C 14.5 16.5 D 50 61 Y 3.5 4.5 B 42 50 ZP50H 52 Model A 40 ZP40H C 32 42 Model A 100 ZP100H B 103

XLAQ/XLDQ

Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

3 Port Solenoid Valve/

Piping adapter Spacer with Bracket Mounting Position Dual residual pressure release valve (-X538) Dual residual pressure release valve with soft start-up function (-X555) (Max. 10) 201.8 82.9 (14) (14) 201.8 (Max. 10) 82.9 IN OUT IN OUT d c b a d a b c Model a b c d Note Model a b c d Note VP544-5DZ1-03-X538 33.9 57.2 95.7 220.7 AW30-03G-A Y300T-A E300-03-A VP544-5DZ1-03-X555 33.9 57.2 129.2

EXxx-OMY0006CN

C. N. C. 34 Fig. 6-1 24 No.EX##-OMY0006CN 7. 7.1. 8 2xM5 (= 1.5 Nm) 2xM5 (SI = 1.5 Nm) 4xM () Fig. 7-1 8 VQC4000 7 25 No.EX##-OMY0006CN 7.1.1. SI 2 / =0.6 Nm O Fig. 7-2 IP65O 7.1.2. SI 1x 2x ( 2.5 mm= 1.3 Nm) Fig. 7-3 IP65 IP65 26 No.EX##-OMY0006CN 7.2.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.