4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

M plug connector, Without lead wire and light and surge voltage suppressor U side D side Port size (Body ported only) Station1 2 3 4 5 VQD1151-5L M5 thread M5 VQD1000-10A-5 2B 4A 3R 1P 2B 4A VV4QD15-05M5 1.13-8 Series VQD1000 Manifold Option Blank Plate Assembly/Body Ported VVQD1000-10A-2 SY Blank plate assembly includes 2 screws and 1 gasket.

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

11.5 6 40.5 14.5 40.5 14.5 21.5 24.5 21.5 20 10 10 17 17 36 36 16.5 26 16 16 16 22 29 47 47 7 51.5 20.5 33.5 51.5 20.5 26.5 30.5 20.5 39 29 19 29 27 35 67 70 75 19 8 71.5 23.5 39.5 74.5 77.5 33.5 31.5 43.5 33.5 48 38 28 28 42 42 56 84 75 22 9 60.5 32.5 46.5 88.5 88.5 42.5 46.5 52.5 32.5 Solid state auto switch: D-M9B, D-M9N Stroke B Stroke E Auto switch operating range Model A 40 50 150

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

MXU

Minimum Stroke for Auto Switch Mounting (mm) Applicable auto switch model No. of auto switches mounted D-A9 D-A9V D-M9 D-M9V D-F9W D-F9WV 1 pc. 5 5 5 2 pcs. 10 10 5 Auto switch model Bore size (mm) Operating Range 6 5 10 6 16 9 D-A9/A9V 3 (2) 3.5 (2) 5.5 (3) D-M9/M9V D-F9W/F9WV Since this is a guideline including hysteresis, not meant to be guaranteed.

MXU

D-A9V D-M9V D-F9WV ( ): Denotes the values of D-M9V, D-F9WV.

Miniature Guide Rod Cylinder Series MGJ

Auto switch internal circuit Weight Unit: (g) D-F8N D-F8N D-F8P D-F8B Auto switch part No.

Slide Tables MX Series

D 1.Body tapped H H l Guide block D l Max.tightening torque ftlb (Nm) Locating pin hole D x H (mm) Max.screw-in depth l (mm) Bolt used Model Use a bolt that is less 0.5mm than max.(l)screw-in depth to avoid contacting the guide with mounting bolt.

Series 10/11-C(D)A2, available for clean environment, prevent particle generation in a clean room. 21/22-C(D)A2 series offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted. The CDA2 clean series is auto switch capable.

E-P HYREG ® Series VY1 1

Applicable wire Cord external diameter: 4 to 6.5 c.f. 0.5 mm2 3 core wire (JIS C 3306 equivalent) F.R.L.

Digital Gap Checker

[June 2018] C: Contents revised in several places. [September 2019] D: Contents revised in several places. [October 2021] E: Contents revised in several places.

AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Z (Super Compact), Bore Size: 300 (3"), Stroke: 300 (3")

Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Z (Super Compact), Bore Size: 300 (3"), Stroke: 300 (3"), Body Option: M (Male Rod End)

Magnet: D (Built-in), Mounting: B (Through Hole), Overall Length: Standard, Bore Size: 300 (3"), Stroke: 300 (3"), Body Option: C (Rubber Bumper), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Magnet: D (Built-in), Mounting: B (Through Hole), Overall Length: Standard, Bore Size: 300 (3"), Stroke: 300 (3"), Body Option: C (Rubber Bumper)

Magnet: D (Built-in), Mounting: B (Through Hole), Overall Length: Z (Super Compact), Bore Size: 300 (3"), Stroke: 300 (3"), Body Option: C (Rubber Bumper)

Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Overall Length: Standard, Bore Size: 300 (3"), Stroke: 300 (3"), Body Option: C (Rubber Bumper)