0.4

consumption (W) Max. operating frequency (Hz) A 80 1200 B 40 1000 C 10 550 D 4 350 E Note) Two mounting screws (M3 x 0.5) and a gasket are included.

Vacuum Equipment

Vacuum Area Diameter (Vacuum pressure: 84 kPa) after Vacuum Suction by Vacuum Pad (mm) Flat U Flat with ribs C Bellows B Deep D Large size H Type Large size bellows HB Material Size Part no.

The multi-pin connectors replace the

Connector type Connector type SMC Corporation 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing December, 2001 D-Export dept. P-100(D) Printed in Japan. This pamphlet is printed on recycled paper with concern for the global environment.

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

tTV2000/3000

o 4 c > 0 3 I J o o $ 0 2 o 6 a 0 1 f o 5 0 0 0 50 75 100 Input signal %F S Pressure chafacteristicS Set pressure: 0 2tvPa Flow rate characteristics supp v pressure: 0 TMPa Relief flow characteristics suppty pressure: 0.7MPa 1 0 @ I aQ 0 5 o b 0 0 E = = o 0 5 1 0 2000 3000 4000 Flow rate 4min (ANB) lTU2000/3000 tlectro-Pneuma flegula Series |TV205I Hysteresis Linearity Repeatability a u o

VVXA21/22

86 126 108 136 122 172 154 172 158 218 200 208 194 264 246 244 230 310 292 280 266 356 338 316 302 402 384 352 338 448 430 388 374 494 476 VVXA21 VVXA22 A 38 49 B 20.5 [17.5] 26.5 [22.5] Model VVXA21 VVXA22 C 10.5 13 D 11 13 E 25 30 F 32 40 G 36 46 H 12 15 N 45 49 [ ]: Individual pressure type J 7 9 K 6.5 8.5 M 54 58 17-3-100 5 The VX series will be revised shortly.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

Rated voltage G: Grommet (Lead wire length: 300 mm) D: DIN terminal DO: DIN terminal H: Grommet (Lead wire length: 600 mm) 50 60 1 2 3 100 VAC, Hz 200 VAC, Hz 110 VAC, Hz 220 VAC, Hz 24 VDC 12 VDC 240 VAC, Hz Other (Without connector) 50 60 50 60 50 60 4 5 6 7 50 60 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Digital Flow Switches, Series PF2A, Series PF2W

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

DC: DL (With indicator light) Option Grommet G D DIN terminal 5 Base mounted 0 Manifold 4 Coil rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 5 9 24 VDC Construction Other Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Body ported De-energized Base mounted

Serial Network

U, D)-SSL1 Y VQ2000/4000/5000 EX123 (U, D)-SSL2 Y IP53 or NEMA12 comes as optional.

VVX31/32/33

G <& C D, T G, C S L, Z S L, Z 8 8 8 8 8 8 8 8 8 8 8 8 T 9 '01 !" % % :"; % %%& !" % % :; S Note) 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) How to Order Manifold Arrangement of solenoid 9= Write both the base part number and the solenoid valve to be mounted or blanking plate part number. !"

Return Filter FH100 Series

Blanking cap (65) A 2 x Rc (d) (34) C D C C IN OUT IN IN OUT OUT E (Element removal dimension) Differential pressure indicator Differential pressure indication switch B DRAIN (mm) d A B C D E F Weight (kg) Model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 102 90 35 200 290 2.5 1 104 1 1/4 110 100 45 265 380 4.3 1 1/2 144 150 128 52 299 430 6.8 2 2 1/2 175 200 157 70

IDX-OM-W035

117kg 123kg 1ANR 2065% 2 330mA 4() 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) IDFB Series 6-1 6-1 IDX-OM-W035 6 6-3 IDFB22E/37E A B G D E F C (35.4[900]) J M N P L K H 4x0..5 (0.4[9~11mm] [4x13] [IDFB22E-11*(L=2800)] Unitinch [mm] A B C D E F G H J K L M N P 30.5 23.6 IDFB22E 1 [775

CRB2-OM00001

t 1 / 2 t + C (2) C is integration constant.

Electro-Pneumatic Positioner Series IP8000/8100

D. 7 to 9:P368010-26 Applicable cable O.

High Pressure Coolant Valve

Q 4 positions C Main port 3 (3 port valve only) VNA VNB Flow indicator for 2 port valve SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 217 (219) 246.5 (248.5) 282 (284) 301 (303) 60 77 96 113 46 60 76 85 34

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Note 2) This filter does not include any companion flange, companion flange bolt, and O-ring. 4 x K depth L DRAIN (): Internal dimensions for FH342 type (mm) Model Weight (kg) d A B C D E F G H J J' K L M N P Q Threaded Rc Flange SSA FH340-03 FH340-04 FH342-06 FH342-08 FH34 -10 FH34 -12 FH341-16 FH440-03 FH44 -04 FH44 -06 FH44 -08 FH44 -10 FH44 -12 FH441-16 FH441-20 FH441-24 FH540-03 FH54

IDX-OM-Y002

200 4x20 700 (100) 800 355 4x20 Auto drain is included in the package.

EXxx-OMQ0015CN

code-RJ451m EX9-AC020EN-PSRJ M12, D code-RJ452m EX9-AC030EN-PSRJ M12, D code-RJ453m EX9-AC050EN-PSRJ M12, D code-RJ455m EX9-AC100EN-PSRJ M12, D code-RJ4510m (10) PCA-1557769 M12(4)3mSPEEDCON PCA-1557772 M8(3 )3m -72No.EX-OMQ0015CN Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications

Gun Type Ionizer

Loosening and damage of nozzles c. Twists or crushing of connected tubes d. Hardness and deterioration of connected tubes e. Air leakage 192