IR1000/2000/3000

pressure P1 (MPa) IR IR2010-02 IR2010-02 IR2010-02 Supply pressure: 0.7 MPa Back pressure: 0.7 MPa 0.7 VEX 0.204 0.4 0.6 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) AMR 0.202 0.5 Set point 0.3 ITV 0.4 0.200 0.2 0.3 IC 0.198 0.2 0.1 VBA 0.1 0.196 VE 0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 0 100 200 300 400 500 600 700 800 900 1.0 Flow rate ( /min (ANR))

air-filter-e

Pressure Control Equipment Air Preparation Equipment One element included Pressure gauge FGF S A E B D 1 20 005 Symbol Pressure gauge Without pressure gauge (with plug) Nil Three, five elements included FGF S With pressure gauge (1 MPa: Brass for wetted parts) 3 005 A 40 E D G Bag filter Option Material Option Applicable model FGF3 FGF5 FGF1 None Vessel material Applicable model FGF3 FGF5

Air Preparation Equipment

Pressure Control Equipment Air Preparation Equipment One element included Pressure gauge FGF S A E B D 1 20 005 Symbol Pressure gauge Without pressure gauge (with plug) Nil Three, five elements included FGF S With pressure gauge (1 MPa: Brass for wetted parts) 3 005 A 40 E D G Bag filter Option Material Option Applicable model FGF3 FGF5 FGF1 None Vessel material Applicable model FGF3 FGF5

XL-OMV0002

1 2 3 H4 AC100V 600/150 800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 Ass'y XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 Ass'y 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1)/ 2)16 PTC() 200V 200 PTC 150 100V PTC Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (

Electric Actuators

Two mounting styles Table traveling accuracy C D Bottom mount Top mount Model Traveling accuracy C side against A side D side against B side LG1H 0.1 or less 0.1 or less A B Variations Mounting orientation Lead screw type Motor type Guide type Motor/Screw connection Series Standard motor [Tamagawa Seiki Co., Ltd.]

Magnet: D (Built-in), Mounting: B (MX0, Basic), Bore Size: 150 (1 1/2"), Stroke: 0250 (2 1/2"), Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: XC35 (with Coil Scraper)

Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Tube Material: Aluminum Tube, Bore Size: 100mm, Thread: TN (NPT), Stroke: 500mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Made to Order: XC35 (w/Coil Scrapper)

Magnet: D (Built-in Magnet), Mounting: L (Axial Foot), Tube Material: Aluminum Tube, Bore Size: 40mm, Thread: TN (NPT), Stroke: 50mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Made to Order: XC35 (w/Coil Scrapper)

Magnet: D (Built-in Magnet), Mounting: B (Basic), Tube Material: Aluminum Tube, Bore Size: 40mm, Thread: TN (NPT), Stroke: 50mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Made to Order: XC35 (w/Coil Scrapper)

Magnet: D (Built-in), Mounting: L (MS1, Foot), Bore Size: 250 (2 1/2"), Stroke: 0350 (3 1/2"), Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: XC35 (with Coil Scraper)

(Or None in the Case of No Switch), Environmental Options: XC35 (w/Coil Scraper)

(Or None in the Case of No Switch), Environmental Options: XC35 (w/Coil Scrapper)

Magnet: D (Built-in), Mounting: F (MF1, Front Flange), Bore Size: 200 (2"), Stroke: 2000 (20"), Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: XC35 (with Coil Scraper)

Magnet: D (Built-in), Mounting: B (MX0, Basic), Bore Size: 200 (2"), Stroke: 0700 (7"), Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: N (No Lead Wire), Number: 2 pcs. (Or None in the Case of No Switch), X Option: XC35 (with Coil Scraper)

Magnet: D (Built-in), Mounting: X (MP1, Double Rear Clevis), Bore Size: 150 (1 1/2"), Stroke: 0350 (3 1/2"), Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: XC35 (with Coil Scraper)

Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Tube Material: Aluminum Tube, Bore Size: 40mm, Thread: TN (NPT), Stroke: 75mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Made to Order: XC35 (w/Coil Scrapper)

Magnet: D (Built-in Magnet), Mounting: L (Axial Foot), Tube Material: Aluminum Tube, Bore Size: 40mm, Thread: Rc, Stroke: 250mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Made to Order: XC35 (w/Coil Scrapper)

Magnet: D (Built-in Magnet), Mounting: C (Single Clevis), Tube Material: Aluminum Tube, Bore Size: 40mm, Thread: TN (NPT), Stroke: 250mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Made to Order: XC35 (w/Coil Scrapper)

Magnet: D (Built-in Magnet), Mounting: G (Head Flange), Tube Material: Aluminum Tube, Bore Size: 50mm, Thread: TN (NPT), Stroke: 250mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Made to Order: XC35 (w/Coil Scrapper)

Magnet: D (Built-in), Mounting: L (MS1, Foot), Bore Size: 200 (2"), Stroke: 0350 (3 1/2"), Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: XC35 (with Coil Scraper)