Exhaust Cleaner for Clean Rooms AMP Series

(Atlanta) 1440 Lakes Parkway, Suite 600 Lawrenceville, GA 30043 Tel: (770) 624-1940 FAX: (770) 624-1943 SMC Pneumatics Inc. (Richmond) 5377 Glen Alden Drive Richmond, VA 23231 Tel: (804) 222-2762 FAX: (804) 222-5221 SMC Pneumatics Inc. (Cleveland) 2305 East Aurora Rd., Unit A-3 Twinsburg, OH 44087 Tel: (330) 963-2727 FAX: (330) 963-2730 SMC Pneumatics Inc.

ZB-OM00301

2V Assy Assy 18 - No.ZB-OM00301 O Assy V Assy Assy V Assy Assy 19 - No.ZB-OM00301 1TK1-123 2 3 1VKJ 2 3 1 0.1 2 0.1 3 0.15 -0.2 2 20 - No.ZB-OM00301 () ( ) ONOFF () 0.1Nm 1 ON 0 ) () () 1 (PA) 0 (AR) () 21 - No.ZB-OM00301 AXT661-12 0.2~0.33mm 2 (1.7mm) ) DXT170-71-1 3.2~3.7mm (DXT170-75-1) 2 0.2~0.33mm (1.7mm) (ACB (1mm) 22 - No.ZB-OM00301 N.C. 300 600

Series VF1000/3000/5000 Pilot Operated 5 Port Solenoid Valve Single Unit Note) Only DIN and conduit terminal types are available with AC mode. Refer to the electrical entry for details.

wire length 600 mm D: With connector Y: With connector T: Conduit terminal Light/Surge voltage suppressor LN: Without lead wire MN: Without lead wire AC > > Symbol Light/Surge voltage suppressor DC > > > > > Without light/surge voltage suppressor With surge voltage suppressor With light/surge voltage suppressor With surge voltage suppressor (Non-polar) Nil S Z R U G: Lead wire length

Regulator for 2 MPa ARX 20

F C D E Setting the Indicator Needles Move the indicator needles with your fingers. If it is done with a small screw driver, etc., take care not to bend the indicator needles or scratch the gauge dial. There are 2 green indicator needles, to be set at the upper and lower limits of the pressure range.

90

NPN 1 output ISE30A-01-N-ML Digital pressure PNP 1 output ISE30A-01-P-ML NPN 1 output/ Voltage output ISE30A-01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.

Regulator for 2 MPa Series ARX20

TEL: 317-899-4440 FAX: 317-899-3102 GERMANY SMC Pneumatik GmbH Boschring 13-15 D-63329 Egelsbach, Germany TEL: 06103-4020 FAX: 06103-402139 CANADA SMC Pneumatics (Canada) Ltd. 6768 Financial Drive Mississauga, Ontario, L5N 7J6 Canada TEL: 905-812-0400 FAX: 905-812-8686 ITALY SMC Italia S.p.A.

PF3A7xxH.eng

(For accumulated decrement) [ 150] 150 L/min (PF3A703H) [ H] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) Caution Press the button once to reduce the value by one digit, press and hold to continuously reduce. [ 600] 600 L/min (PF3A712H) : If the error cannot be reset after the above measures are taken, then please contact SMC.

PF3A7xxH-L.eng

Installation Direct mounting Install the product with 4 screws suitable for the product number according to the required tightening torque. [ 600] 600 L/min (PF3A712H) Reset the accumulated flow.

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

LEF-D-2-1 For details, refer to the Web Catalog,) Note 4) Order auto switches separately. (For details, refer to the Web Catalog.)

Fan Type Ionizer

900 1200 Installation distance [mm] mm At maximum air flow (air flow scale: 4) 300 mm 300 0 4s 6s 8s 0 2s -300 mm -300 0 300 600 900 1200 Installation distance [mm] mm At minimum air flow (air flow scale: 1) 300 mm 300 6s 0 4s 8s 0 2s -300 mm -300 0 300 600 900 1200 Installation distance [mm] mm 18 - Doc. no.

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

L3 Max. 1 4 1 2 L1 L2 D Min. L3 Max. Model Port size Model Port size 120 150 AS800 AS900 1 1 , 2 74 93 204 262 192 250 80 94 AS420 AS500 AS600 67.5 74 90 1/4, 3/8, 1/2 3/4 1 38 42 55 122 115 158 112 105 148 50 50 62 15-9-33

ARJ310

Printed in Japan. 1st printing January, 2001 D-SMC.L.A. P-80 (N) This catalog is printed on recycled paper with concern for the global environment.

Title not found

Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing September, 1999 D-SMC.L.A. P-80 (JT)

ARJ1020F

Inch size ARJ310F-N01 5/32" 1/4" 03 07 14-4-11 9 Series ARJ310 Flow Characteristics Inlet pressure: 0.7 MPa ARJ310-01 ARJ310F-01-04 ARJ310F-01-06 0.7 0.7 0.7 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

3 Controller/Driver mounting Nil Screw mounting D DIN rail mounting* * DIN rail is not included. Order it separately.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

Applicable Stroke Table : Standard Model Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Manufacturable stroke range [mm] LEFS16 50 to 500 LEFS25 50 to 600 LEFS32 50 to 800 LEFS40 150 to 1000 * Please consult with SMC for non-standard strokes as they are produced as special orders. The actuator and controller/driver are sold as a package.

Thermo-chiller

D-G

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-F79F D-F7NTL D-BAL D-A79W D-F7WV D-F7V D-F7BAVL D-J79 D-F7W D-J79W D-A7 D-A80 D-A7H D-A80H D-F7 12 to 25 32 to 50 D-A9V D-M9V D-F9WV D-A9 D-M9 D-F9W D-F9BAL 32 to 50 Proper Auto Switch Mounting Position Auto Switch Mounting Height (mm) D-A7H D-A80H D-A73C D-A80C D-F7 D-F79F D-J79 D-F7V D-J79C D-F7W D-J79W D-F7WV D-F7BAVL D-F7BAL D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL

CQ2

D-J79W D-F7F D-F7NTL D-F7BAL D-A73C D-A80C D-J79C D-A79W D-F7WV D-F7V 12 to 25 CU 32 to 50 CQS CQ2 MU D-A9 D-F9 D-A9V D-F9V D-F9WV D-F9W D-F9BAL 32 to 50 Auto Switch Mounting Position Auto Switch Mounting Height (mm) D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F7F D-F7NTL D-A7H D-A80H D-A73C D-A80C D-F7 D-J79 D-F7V D-J79C D-F7BAL D-F7W D-F7F D-J79W D-F7WV D-F9W D-F9WV D-F9BAL D-F9WV D-F9W

ISO Cylinder

Auto Switch Mounting Height [mm] [mm] Band mounting Rail mounting Auto switch model Auto switch model D-M9l*1 D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-A9l*2 D-A9lV D-F7l D-J79 D-F7lW D-J79W D-F79F D-F7BA D-A7lH D-A80H D-H7l D-H7lW D-H7BA D-H7NF D-C7l D-C80 D-M9l D-M9lW D-M9lA D-A9l*1 D-M9lV D-M9lWV D-M9lAV D-A9lV*1 D-F7lV D-F7lWV D-F7BAV D-J79C D-A7l D-A80 D-A73C D-A80C *2 D-A79W D-H7C D-C73C