Air Cylinder CP Series Cylinder Positioner Assembly

"O" Rings 1 Fixed Orifice "O" Ring Bore Part # 50mm cA1N50-P 63mm cAt N63-P 80mm cA1N80-P!

Sensor Monitor

(Additional range) Relation between analog input and digital display Set value A B 0.002 0 kPa 2 kPa -0.1 0 kPa -101 kPa F0.1 -100 kPa 100 kPa 0.1 0 kPa 100 kPa 0.5 0 kPa 500 kPa 1 0 MPa 1 MPa 2 0 MPa 2 MPa 5 0 MPa 5 MPa 10 0 MPa 10 MPa 20 0 MPa 20 MPa 25 0 MPa 25 MPa USEr Input value (setting) Input value (setting) Available display unit and minimum set value Pressure range Rated pressure

Clean Gas Filter

Nonreplaceable 5 to 120 Membrane element ( ) Multiple disc type SF SF SFD SFC10 P . 309 240 0.99 LLB AD GD Case/Cover material: Aluminum alloy (SFB100) Strainer with other nominal filtration: 1, 2, 5, 10, 20, 40, 70, 100 m (SFB200) Made to Order P . 312 297 SF Series Model Selection Determine the model by using the following procedures involving the inlet pressure and the maximum flow

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

DeviceNet-E

S. consi st s of 12 bi t s, t o t he E/P regul at or t hrough m ast er PLC( t arget val ue t o w ord area) . Set t i ng D at e 0h 0FFFh [ ( aF. S. ) 4095] H EX O ut put pressure 0% F. S. ( =0) 100% F.

FQ1

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 q q w w 0.01 0.01 e r e 0.005 0.005 r 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.

FQ1

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 0.01 0.01 0.005 0.005 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.

IDU/IDF

P-80 (YG)

Process Pump

PAB-OM-B005-A PRODUCT NAME Process Pump MODEL / Series / Product Number PAX112 Series Contents Safety Instructions -P.2 to 3 Names and functions of parts P.4 Precautions P.5 to 10 Applicable Fluids P.11 Specifications P.12 Performance Curve P.13 to 14 Working Principle P.15 Maintenance Parts P.16 Piping and Operation P.16 Dimensions P.17 1 Safety Instructions These safety instructions are

HRX-OM-X071

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

VCS

P: PTFE F: FKM For VCS30 OR-2380-130P P: PTFE F: FKM For VCS40 OR-2600-180P P: PTFE F: FKM Manifold For VCS20 e OR-1400-178P P: PTFE F: FKM OR-2670-178P r P: PTFE F: FKM Wave washer For VCS30, 40 When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.

5 Port Air Operated Valve

single 2 position double 1/4, 3/8, 1/2 [4 (A), 2 (B) port] 1/4, 3/8, 1/2 [4 (A), 2 (B) port] 02 03 04 VFA5244(-P) 02 03 04 VFA5144(-P) 36 (39.5) 27 (31) 36 (39.5) 27 (31) SYA 14 (15.5) 14 (15.5) SYJA 20.5 (24.5) 20.5 (24.5) VZA 92 (100) 1/8 [Pilot port: Lateral (-P)] 1/8 [Pilot port: Lateral (-P)] VFA VFA 82 (87) 51.5 (55.5) 82 (87) 5 (6.5) 51.5 (55.5) VFRA 2B 4A 2B 4A VPA4 42 (45) 52 (58

NVZseies

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

3 Way,3 Port Solenoid Valve NVZ Series

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

PFxx-OMX0007

([ 1_P]) Normal output [ 500] 500 L/min (PF3A701H) [ P] ([P_1 ]) Select input switch operation [1000] 1000 L/min (PF3A702H) [F 1] [ 50] 50 L/min (PF3A701H) [ H] ([H_1 ]) Setting of Hysteresis [ 100] 100 L/min (PF3A702H) ([dt1 ]) Delay time setting ([0.00]) 0.00 s [CoL ] Select display colour [ SoG] ([1SoG]) Green when ON Red when OFF (OUT1) [oUt2] Select output mode [ HYS] Hysteresis mode

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

0x02 0X06 0002 0064: Force 100 Mbps/Full duplex Ex.

Fieldbus system EtherNet/IP compatible SI Unit

0X06 0002 0064: Force 100 Mbps/Full duplex Ex.

Vacuum Pad

P #Vacuum Ejector or Pump and Number of Vacuum Pads Ejector and number of pads Vacuum pump and number of pads Vacuum line Tank P P P P P P P P P Ideally, one pad should be used for each line. When more than one pad is attached to a single vacuum line, take the countermeasures listed below.

Vacuum Pad

P #Vacuum Ejector or Pump and Number of Vacuum Pads Ejector and number of pads Vacuum pump and number of pads Vacuum line Tank P P P P P P P P P Ideally, one pad should be used for each line. When more than one pad is attached to a single vacuum line, take the countermeasures listed below.

45

(Pitch) P = 10.5 (A, B port) Applicable tubing O.D.: 4 6 DIN rail release button 4-One-touch fittings (P , R port) Applicable tubing O.D.: 8 DIN rail holding screw Manual override (Press and turn for the locking type.)