MHF2

MHT E MHY 13 25 25 30 MHW 41 MRHQ E 4-5.2 through (Mounting hole) 0 -0.1 Misc. 32 46 1.2 46 1.2 Finger opening port M5 x 0.8 Finger closing port M5 x 0.8 4-10 D+0.1 0 Close: 0 E-E 20Open: 801 8-M4 x 0.7 thread depth 4 Attachment mounting thread 128 Mounting thread 4-M6 x 1 thread depth 6 Auto Switch Mounting Groove Dimensions 52 24 2.3 4 2-3H9 +0.025 0 depth 3 6 30 8 30 8 3 2-M6 x 1 thread

SMC Electronic Switch Series Variations

range 12 to 24V DC (Ripple 10% or less) Voltage 3% F.S.or less (0 to 60C) 3% F.S.or less (0 to 60C) 3% F.S.or less (0 to 60C) 10 m (0 to 60C) 3% F.S.or less (5 to 40C) 3% F.S. or less (5 to 40C) Temperature characteristics 5% F.S. or less (0 to 60C) 5% F.S. or less (0 to 60C) Repeatability 1% F.S. or less Variable 1 to 10% Fixed 4% F.S.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer Chamfer Chamfer R R A port B port B port A port A port B port A port B port A port B port For size 40 actuators, a parallel key will be used instead of

HRX-OM-M090

HRS018-W-0 HRS024-W-20) HRS Series 9.3 Flow Chart 9-7 HRX-OM-M090 Chapter 9 Documents 9.4 Cooling capacity 9.4.1 HRS012--10-(BJMT) 2500 2500 Ambient Ambient temperature temperature 2000 2000 or or Cooling capacity[W] Cooling capacity[W] facility water facility water temperature temperature 1500 1500 25 32 40 25 32 40 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid

HRX-OM-X071

] 1000 32 32 25 25 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature

DOC1003626

(Example 1) The least significant bit was a 1. 0 0 0 0 0 0 0 1 1bit shift in the lowest direction 0 0 0 0 0 0 0 0 1 Add 0 to the top Execute ExOR (Example 2) The least significant bit was a 0. 0 0 0 0 0 0 0 0 1bit shift in the lowest direction 0 0 0 0 0 0 0 0 0 Add 0 to the top Not execute ExOR 3.10 Checksum calculation method HRS400-A-46 3-10 DOC1003626 Chapter 3 Serial communication

JXCx-OMT0032CN

3 2 1 0 ID 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 12 1 1 0 0 40 - 13.

10

0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 63 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 80 14.5 11.5 10.5 7.5 11 8 16 13 4.5 1.5 8.5 5.5 4.5 1.5 8 5 10 7 7.5 4.5 100 14 12 10 8 10.5 8.5 15.5 13.5 4 2 8 6 4 2 7.5 5.5 9.5 7.5 7 5 125 16 16 12 12 12.5 12.5 17.5 17.5

MXQ

0 i !4 o !8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

Compact Manifold Regulator Series ARM5

0 50 100 150 200 250 0 0 50 100 150 200 Flow rate l/min (ANR) Flow rate l/min (ANR) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa ARM5AA1-308 (One-touch fittings: IN/OUT 6) ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate l/min (ANR) Flow rate l/min (ANR

Dual Rod Cylinder Series CXSJ/CXS

3 @2 @0 @3 @1 !7 !4 !5 !2 CXSWL6 r !5 !6 q !8 !0 !

IZx-OMP0064

[s] 0.4MPa 0.5MPa 0.5MPa 0.2MPa Discharge time [s] s s 6 6 4 4 2 2 0 0 0 500 1000 1500 2000 0 300 600 900 1200 1500 mm mm Installation distance [mm] Installation distance [mm] 6-2.

Thermo-chiller/Rack Mount Type

0 !1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

HRX-OM-Z015

lowest direction 0 0 0 0 0 0 0 0 1 Add 0 to the top Execute ExOR if 1 (Example 2) The least significant bit was a 0. 0 0 0 0 0 0 0 0 1 bit shift in the lowest direction 0 0 0 0 0 0 0 0 0 Add 0 to the top If it is 0, do not ExOR HRLE Series 3.10 Checksum calculation method 3-9 HRX-OM-Z015 Chapter 3 Serial communication Calculation example Example) Change circulating fluid set temperature

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

55) 26 56 (63) 0 0 (17) D-A9, D-A9V 0 (15) 0 40 40 (55) 32 32 (47) 0 0 (15) 25 D-M9,D-M9V D-M9W, D-M9WV 40 (42) 0 40 50 (57) 47 72 (74) 15 10 (17) D-A9, D-A9V 0 (15) 0 50 50 (61) 38 38 (53) 0 0 (11) 32 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 50 55 (63) 38 48 (55) 0 5 (13) D-A9, D-A9V 0 (15) 0 54 54 (64) 48 48 (63) 0 0 (10) 40 D-M9, D-M9V D-M9W, D-M9WV 15 (22) 0 54 59 (66) 48 63 (70) 0 5 (12)

Rotary Actuator/Vane Style Series CRB2

Single vane type Double vane type , 0 5 Chamfer +4 0 a a r r n n 9 0 n n e g g 0 o o g e e i i n t t 1 2 a a 0 a 8 7 t t r o o 1 +4 0 0 0 n R R o e +4 0 +4 0 i t g 0 a n 9 t o a e r R g n n o a ti r a n t o o R ti a t o R Chamfer Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer.

SV

V 0 V 24 V G D G D SI unit SI unit Master unit D 0 V24 V G D 0 V24 V G D 0V 24V G D 0V 24V L2 L1 G LINE1 LINE2 SHIELD L1 L2 Power supply 24 V 0 V 0 V 24 V SHIELD SHIELD Transmission line L1 L2 FG 24 V 0 V L1 L2 FG 24 V 0 V Black White Brown Blue Terminal resistor Main transmission line Transmission line Crimped connector SL-J1A Power supply 24 V 0 V 0 V 24 V Type 3 ground Type 3 ground G

IIIIIIIIII

Blue 0-010-062 0-010-125 .012 Green 0-012-062 0-012-125 .014 Orange 0-014-062 0-014-125 .016 Grey 0-016-062 0-016-125 .017 Brown 0-017-062 0-017-125 .019 Red 0-019-062 0-019-125 .020 Dk. Blue 0-020-062 0-020-125 .025 Black 0-025-062 0-025-125 .030 Beige 0-030-062 0-030-125 .035 Dk.

Electric Rotary Table

E 1 R 3 1 / 0 180 L 0 E T 2 R 3 3 / a 0 0 5 , bl 1) e e ot o N p er e g at n in ra g The figures show the origin position for each actuator.

2-Color Display Digital Flow Switch Series PFM

to 26.3 l/min 0 to 105 l/min 0 to 10.5 l/min 0 to 52.5 l/min Dry air, N2, Ar Settable range Note 1) 0 to 13.1 l/min 0 to 52 l/min 0 to 5.2 l/min 0 to 26.2 l/min CO2 Minimum unit setting Note 2) 0.01 l/min 0.1 l/min 0.1 l/min 0.1 l/min Accumulated pulse flow rate exchange value 0.1 l/pulse 0.1 l/pulse 0.1 l/pulse 1 l/pulse Real-time flow rate l/min, CFM x 10-2 Accumulated flow l, ft3 x 10-