Precision Cylinder Series MTS

freezing) Bearing type Ball spline Rubber bumper Cushion Air cushion Effective cushion length (mm) 11 12 9 10 17 17 Lubrication Non-lube Reed switch: D-A9 Solid state switch: D-F9 D-F8 Reed switch: D-A9 Solid state switch: D-F9 Auto switches +1.0 0 Stroke tolerance mm 0.1 or less (within allowable torque values) 0.2 or less (within allowable torque values) Non-rotating accuracy Port size

IDX-OM-W010

. 6 1 6 2 Refrigerant with GWP reference . 6 1 6 3 Dimensions . 6 3 6 4 Electrical Circuit . 6 5 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 7 Chapter 7 Specification for Option A 7 1 Safety instructions . 7 1 7 2 Specifications . 7 1 7 3 Air piping . 7 1 7 4 Air flow capacity . 7 1 7 5 Compressed Air and Refrigerant Circuit / Operation Principles . 7 2 Chapter

VCB

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 52 42 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 65 56 Two mounting screws (for mounting

212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

ITV

side. 50 56 D side U side 1 2 stations 50 9 3 (8) Dimensions in inch are noted in parentheses. 6.5 6.5 1 1 82 89.5 SUP, VACzport 3 3 (6, 1/4") 40 40 EXH, ATMcport 25 25 (6, 1/4") 5 5 2 2 2 OUTxport (4, 5/32") Note) 3.7 Breathing hole (M3 x 0.5) Note) For dimensions of the cable connector, refer to single unit on page 14-8-8.

PFxx-OMS0001CN

PFMC 7 7 A*8 8 501 5~500L/min 2 102 10~1000L/min 202 20~2000L/min *7 Rc N NPT R F G*1 1ISO228 501 102 202 04 1/2 *7 06 3/4 OUT1 OU2 *5 A NPN NPN M SI*6 B PNP PNP 5 C NPN (1~5V) SI D NPN (4~20mA) 6:L/min:L E*2 PNP (1~5V) F*2 PNP (4~20mA) 1 G*2 NPN *3 M8(3m)*4 H*2 PNP *3 2 3 N M8 *4 / ZS-40-A M8 3 m ZS-42-A PFMC7501/7102 (M352 ) ZS-42-B PFMC7202 (M352 ) -10No.PF-OMS0001CN-A M8 1

PFxx-OMX0002

Otherwise, chattering will occur. 6: Analogue output or external input can be selected by pressing the buttons.

S Couplers

7, 8, 9 KQG2 Plated with fluorine-contained material Fluorine coated Fluorine coated Fluorine coated Fluorine coated KKA3, 4, 6 KKA7, 8, 9 Equivalent to Stainless steel 304 Stainless steel 304 6 Plug valve spring KG KFG2 Equivalent to Stainless steel 304 Stainless steel 304 Stainless steel 304 Stainless steel 304 Stainless steel 304 10 Collar spring MS 11 12 13 Sleeve spring Steel ball Stopper

NAR Series

C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A F A 2 C A F A 2 C A F A 2 C A t e n n o B C D A r e b m a h C F A 2 C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A F A 2 C A F A 2 C A F A 2 C A e d i u g e v l a V F A 2 C A , C D Z F A 2 C A , C D Z F A 2 C A , C D Z F A 2 C A , C D Z F A 2 C A F A 2 C A F A 2 C A F A 2 C A ) f g k (

Precision Regulator

Option/Semi-standard symbol : When more than one specification is inqures, indicate in alphanumeric order. 3 4 5 6 2 1 Symbol Description 0 0.01 to 0.2MPa 1 0.01 to 0.4MPa Set pressure range 2 0.01 to 0.8MPa + 0 Bottom exhaust 1 Front exhaust Exhaust direction 2 Back exhaust + Nil Rc N NPT Thread type F G + 02 1/4 03 3/8 Port size 04 1/2 + Nil Without mounting accessories B With bracket

KK

. mm 3.2 4 6 8 10 12 16 Applicable hose I.D.

Multi-channel Digital Sensor Monitor ( compatible)

Incorrect internal data processing of the product (Er0, 4, 6, 7, 8 and 9) Check if there is a noise source nearby. System error (Er0, 4, 6, 7, 8, 9) is displayed. (2) Check if the power supply voltage is in the range 12 to 24 VDC 10%. (2) Supply power in the range 12 to 24 VDC 10%.

Angle Seat Valve /

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.

VCB

Port size VCB2 VCW20-12-01A 34 40 25 30 12.8 12.8 5 4.5 6 13 1/8, 1/4 VCW30-12-02A 42 52 30 40 19 19 6 5.5 7 19 1/4, 3/8 VCB3 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-02A 42 52 30 40 23 23 6 5.5 7 19 1/4, 3/8 VCB4 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-06A 56 65 44 53 28.2 28.2 6 5.5 7 26 3/4 2 mounting screws (for mounting bracket) are included

ALF400 to 900, ALT-5/-9

hole Applicable tubing O.D. 6, I.D. 4 Applicable tubing O.D. 6, I.D. 4 Model Number of distribution ports Applicable tubing A B C Number of distribution ports Applicable tubing A B C Model VA4-6 VA6-6 VA10-6 VA16-6 4 6 10 16 36.5 60 88 130 82.5 110.5 152.5 96.5 124.5 152.5 74 102 130 62 90 118 6 VB4-6 VB6-6 VB8-6 4 6 8 48 76 118 6 Note) Insert seal plug (PG1) into the distribution port which

ALF400 to 900, ALT-5/-9

A B C Model VA4-6 VA6-6 VA10-6 VA16-6 4 6 10 16 36.5 60 88 130 82.5 110.5 152.5 96.5 124.5 152.5 74 102 130 62 90 118 6 VB4-6 VB6-6 VB8-6 4 6 8 48 76 118 6 Note) Insert seal plug (PG1) into the distribution port which is not used.

Air Tank Series AT 1

Accessory (Option) Tank capacity ID D With auto-drain F Companion flange Port size Capacity ( l ) 100 200 400 500 700 1000 1500 Applicable compressor (kW) 5.5 Symbol AMG 6C 04 Rc 06 14 20 30 1 2 Rc 3 4 Rc 1 1 2 2B flange 3B flange 40 4B flange AT6C AT11C AT22C/37C AT55C/75C AT125C AT150C/220C 11C 11 22C 22 AFF 37C 37 55C 55 AM 75C 75 125C 125 2000 150C 150 3000 220C 220 Misc. 14-16-1 2 Series

q"s

0.1 o -1 2 4 6 a 1 0 0.0 0 25 50 75 lnputsignal (%F.S.) 1 . 0 1 0 25 50 75 Inputsignal (%F.S.) 500 1000 1500 Flow rale (l/min (ANR)) :':i ::l Relief flow characterjslics supp y pressure: 0.7 Mpa Flow characteristics suppty pressure: 0.7 Moa Pressufe chafaCtgristics set oressue: 0 2 MHa 0.8 0-7 t'. I { 0 s l I l 6 l ; D.0 t' 6 l 0.6 0.5 o.4 0.3 6 ' ) !

Safety Speed Control Valve (SSC Valve) Series ASS 1

D L2 L3 L4 L5 L6 L7 L8 P d h T L1 Model Model ASS10 ASS100 ASS110 2 10 5 20 9 5 20 52 14 4 17 50 XT14-82-3-1 1 8 ASS30 ASS300 ASS310 3.2 12 6 30 12 6 26 73 23 5 16.5 63 XT14-105-5-1 1 4 3 8 , ASS500 ASS500 2.3 14 7 35 13 6 38 99 27 6 30.5 90 XT14-89-2-1 1 2 3 4 , ASS600 ASS600 3.2 14 7 65 14 6 46 116 31 6 26 112 XT14-85-2-1 3 4 1 , AS Meter-in Control Type Meter-out Control Type ASP Mounting

VFR5000 Series

No.VFR5000OMA0001B 5 Port Solenoid Valve PRODUCT NAME VFR5000 Series MODEL/ Series Contents Safety Instructions -2, 3 Precautions on Design -4, 5 Selection -4, 5 Mounting -5 Piping -5, 6 Wiring -6 Lubrication -6 Air Supply -6 Operating Environment -6, 7 Maintenance -7 Specific Product Precautions -8 to 11 Trouble shooting -12 Remedy -13 -1VFR5000OMA0001B Safety Instructions These safety instructions