Table of Contents

Description AC servomotor Lead screw Guide frame Guide plate A Guide plate B Push bar Frame cover Coupling Bearing R Bearing F Body A Table Housing A No.

PFxx-OMY0005

(Page 77) 8200 0x2008 0 R Temperature PD conversion equation: a F32 N 8210 0x2012 0 R Temperature PD conversion equation: b F32 N 8220 0x201C 0 R Flow peak value S16 N 0xFF9C to 0x0258 (-100 to 600) 8230 0x2026 0 R Flow bottom value S16 N 8400 0x20D0 0 R Pressure PD conversion equation: a F32 N Refer to "Inclination and intercept to the unit specification".

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

B A B A 0.6 P R R P R R Pilot pressure MPa Pilot pressure range SS5YJ3-41-03-M5T SYJA3140 SYJA3240 SYJ3000-21-2A 0.5 3 Position pressure center 3 Position pressure center 1pc. 1pc. 1pc. 1pc. 0.4 B A B A 0.3 P R R P R 0.2 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure MPa 18 18 18 18 18 18 Air Pilot Drawings Series SYJ3000 (mm) Body Ported Type / Dimensions Base Mounted Type / Dimensions

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

, 2(B) port] [With External Pilot Specifications] One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8, 5/16" 13.3 (Pitch) P = 10.5 13.3 24 24 16.2 16.2 17 34 34 36.7 B 2 B 2 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 A 4 A 4 A 4 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" One-touch fitting [4(A), 2(B) port]

4-channel Flow Monitor ( compatible)

) 0x1F88 (8072) 1 R Rated range lower limit N S16 2 R Rated range upper limit N S16 3 R Measurable range lower limit N S16 0x1F9A (8090) 0x1F9B (8091) 0x1F9C (8092) 0x1F9D (8093) 4 R Measurable range upper limit N S16 5 R Settable range lower limit N S16 6 R Settable range upper limit N S16 1: "R" means Read and "W" means Write.

Electric Actuator/Slider Type

3 q u t y u o A !9 r e @0 !0 !2 !5 !6 !4 i A w A-A Component Parts No. Description Material Note No.

VZ100/300/500

R A: 0.19 A P: 0.13 VP VG Grommet (G) Body Ported Base Mounted VZ300 VP S070 M5 x 0.8 0.66 2 3 (A R) VQ L plug connector (L) VKF (Standard) VQZ 100 VAC 50/60 Hz With surge voltage suppressor (G) (L) (M) (D) With light/ surge voltage suppressor (L) (M) (D) VZ500 200 VAC 50/60 Hz 24 VDC VZ VS 2.5 2 3 (A R) (Option) N. C. N. O.

Digital Gap Checker ( compatible)

U8 0 Y 2420 0X0974 6 R/W 6 th letter (11seg) U8 0 Y 7 R/W 7 th letter (11seg) U8 0 Y 8 R/W 8 th letter U8 0 Y LINE name 9 R/W 9 th letter U8 0 Y 1 R/W 1st dot (left side) U8 0 Y 2 R/W 2nd dot U8 0 Y 3 R/W 3rd dot U8 0 Y 4 R/W 4th dot U8 0 Y 0: OFF (dot OFF) 1: ON (dot ON) 2430 0X097E 5 R/W 5th dot U8 0 Y 6 R/W 6th dot U8 0 Y 7 R/W 7th dot U8 0 Y 8 R/W 8th dot U8 0 Y -100No.PS-OMW0009-C 4

Digital Flow Switch ( compatible)

(page 79) 8000 0x1F40 0 R Inclination of flow rate PD a F32 N Measurement related Refer to "Inclination and intercept".

Digital Flow Switch ( compatible)

(page 75) 8000 0x1F40 0 R Inclination of flow rate PD a F32 N Measurement related Refer to "Inclination and intercept".

PFxx-OMX0002

(Page 84) 5 R/W Line name 5th letter U8 0 Y 7seg 2420 0x0974 6 R/W Line name 6th letter U8 0 Y 11seg 7 R/W Line name 7th letter U8 0 Y 7seg 8 R/W Line name 8th letter U8 0 Y 7seg 9 R/W Line name 9th letter U8 0 Y 7seg OUT output test Communication Communication OUT output test U8 N 0: Normal output 1: Fixed output The PD becomes 1 when a fixed output has been received 7000 0x1B58 0 W Refer

Multi-channel Digital Sensor Monitor ( compatible)

2 R/W5 PinCode 0x0 ~ 0x03E7 (Security code) Y U16 (0) (0 ~ 999) Process data 0x1F40 0x1F41 0x1F42 0x1F43 Conversion formula Inclination a 0 R N F32 (8000) (8001) (8002) (8003) Refer to table "Inclination and intercept to the unit specification".

•

_8_ (mm) , A , 8 ' .. ---.t! R at type Flat with rib , I Mqde~ . > Il. 9, Y .C Rat type (mm) y . H :M6)$1 . ..Ii:M8'Xl . i ,8 0 MOOsl M E F I . , 1 .F!a, >C I E F I G. r '.e G lit"'" lb.

Air Cylinder NCA1 Series

L R O D T H R E A D X A O P T I O N Thread Form Code M .

NCA1

L R O D T H R E A D X A O P T I O N Thread Form Code M .

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

VZ5000

Rc Nil G F VP4 20 20 stations 4(A), 2(B) port N NPTF T NPT Rc 1/4 3/5(R) port Note) For more than 8 stations, supply air to both sides of P port and exhaust air from both sides of R port.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ 0.45 0.6 (A) 4 VQD VZS 1 (P) 5 (R) Except for VQZ1000 N.O.

A_HEC-OM-K001

Remote off alarm 5 Fig.6-4 occurrence 6.1 How to Identify Alarm 6-1 A_HEC-OM-K001-1.7 Chapter 6 Alarms 6.2 Alarm indication BLINK E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig. 6-1 Alarm indication in the event ERR14 occurs BLINK E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig. 6-2 Alarm indication in the event ERR14 occurs during PB range setting input LIGHT W R N P