VCW

Grommet: G Conduit: C 2-M 2-M L L K Approx. 300 K Q F D Approx. 280 D Q F C R C G (PF) 1/2 R E B A H E 2-P Port size A H 2-P Port size B DIN connector: D Conduit terminal: T 2-M 2-M L L K Cable 6.8 to 10 K 27.5 F F Q (Q) 34 S 25 U R C R C G (PF) 1/2 (44) E B A H D (S) E G (PF) 1/2 B A H D 2-P Port size 2-P Port size N.C.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 Symbol Specifications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Throttle valve (Without check valve) -X214 Throttle valve (Without check valve) Note) M5 size: S (with seal) is not necessary. 611 A AS Series Construction AS1201-M5 AS2201/3201/4201 AS3201-02 o !1 w r u y e t !5 !2 !4 q !0 !3 i Component Parts No.

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Max. 1 2 Min.

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port

PSxx-OMT0005CN

02 R1/4(M5) 28 (4~20mA) M12 3m ZS-37-A 1 M12 3m ZS-37-B 1 Rc1/4 ZS-31-X175 1 -8No.PS-OMT0005CN-A M12 C3604+AI203(96)FKM (Nm) R1/4 812 -9No.PS-OMT0005CN-A PSE570ZS-37-AZS-37-B ZS-37-A ZS-37-B 1 DC(+) 2 N.C. 3 DC(-) 4 -10No.PS-OMT0005CN-A DC(+) PSE57-02 15V 1 k N.C.

VFRA3000

B: 34.2 (1.9) A, BEA, EB: 45 (2.5) [A, BEA, EB: 27 (1.5)] VFRA3311-03 1 4 VFRA3411-02 3 position exhaust center 0.72 1 8 PA, B: 36 (2.0) A, BEA, EB: 50.4 (2.8) [A, BEA, EB: 28.8 (1.6)] 3 8 VFRA3411-03 1 4 39.6 (2.2) [PA, B: 16.2 (0.9)] VFRA3511-02 3 position pressure center 0.72 1 8 VFRA3511-03 3 8 41.4 (2.3) [PA, B: 16.2 (0.9)] JIS symbol 2 position single 3 position closed center ( ):

Pilot Operated Regulator AR425 to 935 Series

How to Order Internal pilot operated relieving type regulator AR 25 4 BG 02 Semi-standard Nil Flow direction: Right to left None (Standard) Regulator R Body size Port size Accessory 4 6 8 9 1 2 1 Symbol 1 Description Applicable model 02 03 04 06 10 12 14 20 1 4 Nil 2 1 8 3 B With bracket AR4 5 to 6 5 AR 25 AR 35 2 1 2 3 4 Gauge G46-10-02 G46-2-02 G Regulating pressure range 1 G46-P10-02-X30

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

2 Port for Steam Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Oil Filter FH150 Series

(kg) Model FH150-02 FH150-03 FH150-04 1/4 80 168.5 197.5 259.5 50 15 25 7 6.5 0.7 3/8 1/2 524

Pressure Relief 3 Port Valve with Locking Holes

VHS40-06-D 3/4 1/2 34.0 0.22 7.6 16.1 0.41 4.4 VHS50-D 3/4 1/2 45.0 0.26 10.6 23.0 0.49 6.4 1 53.3 0.36 13.5 22.8 0.49 6.3 -7- 4How to Order VHS D 30 03 Symbol Description Body size 20 30 40 50 Handle operation Nil Single action W Double action Thread type Nil Rc *2) N NPT F G 01 1/8 02 1/4 03 3/8 Port size 04 1/2 06 3/4 10 1 a Mounting Nil Without mounting option B With bracket Option

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16

Clean Gas Filter

Helium leak volume 4.0 x 10-9 Pam3/sec or less Case/Cover Stainless steel 316 (Interior/Exterior: Electrolytic polishing) Main material Filter medium PTFE membrane Seal Fluororubber (FKM) -8- 2-3 Dimensions 1) SFC100-02, SFC100-03 Model A SFC100-02 Rc1/4 SFC100-03 Rc3/8 2) SFC102-02, SFC102-03 Model A SFC102-02 TSJ1/4 SFC102-03 TSJ3/8 3) SFC105-02, SFC105-03 Model A B C SFC105-02 URJ1/4 22

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

Model B C D E F G H J K L M N P U T S R VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19 32 50 50 118 96 120 60 7 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 133 96 140 66 9 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 64 50.8 163 196 68 60.5 1 2, 3 4 4-16-7

Series 12-REA Sine rodless cylinder

Adjustment procedure is shown below. 1) Insert a wrench into the hexagon hole of the adjustment screw to loosen lock nut A. 2) Rotate the adjustment screw to right and left and move the cushion ring holder (stroke end) forward and backward to align the position with that of the external stopper. 3) After the stroke end adjustment is completed, retighten lock nut A. 3.

AMR3000 to 6000

E 3 Auto drain Additional symbol Port size 1 None With auto drain 0 Flow direction: left to right MR unit Flow direction: right to left 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Applicable model AMR300-02 to 03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 R 3 4 5 6 Body size 3 4 5 6 Adapter ass'y port size (2 pcs.) 8 3 standard standard standard Pressure switch 1 2 E2 E3 E4 E6 E10 None With pressure

IS3000

0 1 Standard Micro load Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 16-9-3 2 Series IS3000 Construction Precautions IS3000-02/3010-02 (Rc 1/4 thread) Be sure to read before handling.

IS3000

Model Piping method Rc 1/4 thread Gasket piping Rc 1/4 thread Gasket piping Micro switch type Min. applicable load IS3000-02 IS3100 IS3010-02 IS3110 Standard 5 VDC 160 mA Micro load 5 VDC 1 mA Easy electrical wiring Wide space for wiring. Fixed wiring possible with G 1/2 connector.