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D-Q73 ' D-C731. Parts No. of auio switch Common use to all of D.C7, C8, D-H7 types.

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

D-Q73 ' D-C731. Parts No. of auio switch Common use to all of D.C7, C8, D-H7 types.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Description Material AS800 AS900 6 7 8 O-ring O-ring Spring NBR NBR Stainless steel KA00069 KA00460 14115 KA00072 KA00462 14124 ASV AK VCHC Dimensions: AS420/500/600 Dimensions: AS800/900 ASS ASR ASQ 2 x Port size 2 x Port size L3 L2 L1 D Dimensions L1 L2 D Min. L3 (1) Model Port size Max.

3 Port Solenoid Valve Series VQ100 1

Enter in order starting from the first station on the D side.

HRX-OM-O021

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-O021 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [Electric resistivity /conductivity sensor set] . 6-2 6.3.1 Optional Accessories [Electric resistivity/conductivity

AC Servo Motor Driver (CC-Link Type)

Lists the history (Maximum 6 cases) of alarms that occurred in the past.

AC Servo Motor Driver (CC-Link Type)

Lists the history (Maximum 6 cases) of alarms that occurred in the past.

Air Cylinder

15 D-M9mA n 15 + 40 (n 2) 2 ( n =2, 4, 6, 8) Note) 2 (Different surfaces, Same surface), 1 15 D-M9mAV n 15 + 30 (n 2) 2 (n = 2, 4, 6, 8) Note) Note) When n is an odd number, an even number that is one larger than this odd number is used for the calculation. 6 JMB Series Operating Range [mm] Auto switch model Bore size 32 40 45 50 56 63 67 80 85 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV 3.5 4

I/O Configurator (NFC version)

When they are not in pairing mode, refer to STEP 4 or STEP 6 of 6.4. (1) Input and output size of the wireless slave.

I/O Configurator (NFC version)

When they are not in pairing mode, refer to STEP 4 or STEP 6 of 6.4. (1) Input and output size of the wireless slave.

NCY2 series

H type) and bore size and can be selected. t> E E d: 0 t 2 3 4 5 6 7 8 9101112131415 . Distance lrom cylindj|3l!|!{9Ti 3 4 5 6 cylinder axis: Lo (cm) t 300 ; 200 i'i 100 = P e .F 20 '10 9' -4!

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

Basic type Front ported D-F9 Side ported With external stopper D-M9 11-6-3 4 Series CRJ Precautions Be sure to read before handling.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

Basic type Front ported D-F9 Side ported With external stopper D-M9 11-6-3 4 Series CRJ Precautions Be sure to read before handling.

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

H type) and bore size and can be selected. t> E E d: 0 t 2 3 4 5 6 7 8 9101112131415 . Distance lrom cylindj|3l!|!{9Ti 3 4 5 6 cylinder axis: Lo (cm) t 300 ; 200 i'i 100 = P e .F 20 '10 9' -4!

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

7 NBR O-ring 5 6 7 FKM, EPDM, PTFE O-ring FKM, EPDM, PTFE NBR Stainless steel Return spring Return spring Stainless steel Brass Body Stainless steel Body Stainless steel Brass Bracket Dimensions A J 4-G C 1.5 B D L E 4-H Valve mounting hole F Bracket mounting dimensions A B C D E F G H J L Bracket part no.

Series VCL

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Flow Rate and Sonic Conductance AS121F-M3 AS121F-M5 AS131F-M5 AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS131F-M3 Model AS121F-M5-02 2, 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Metric size Tubing O.D. 1/8" , 3/16" 1/8" , 5/32" 1/8" , 5/32" 3/16" , 1/4" , 1/4" , 5/16" , 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 1/4" , 5/32" 5/16" 3/8" Controlled

Electric Actuator / Slider Type 《 AC Servo Motor 》

See the table below Belt tension Size Belt N Part number Bolts LEF25 LE-D-6-2 19.6 pull LEF32 LE-D-6-3 49.0 LEF40 LE-D-6-4 98.1 4. "Pulley plate" is installed. Bolts Size Tightening torque (Nm) M3 0.6310% M4 1.510% M5 310% 8.Troubleshooting When a fault occurs during the operation, the corresponding alarm or warning is displayed.

ZCUK

Applicable auto switch Number of auto switches D-A9, D-A9V D-M9, D-M9V D-F9W, D-F9WV 5 5 5 1 pc. 10 5 10 2 pcs.