VK3000

port body ported: VK3120 5 port base mounted: VK3140 Blanking plate assembly: VK3000-7-1A M3 x 26 Round head combination screw DXT199-23-4 M3 x 26 Round head combination screw M3 x 8 Round head combination screw VK300-33-3 Blanking plate VK3000-7-1 Manifold gasket VK3000-6-1 Manifold gasket VK3000-6-2 Manifold gasket for blanking plate VK3000-6-3 Applicable base Type VV5K3-20 Type VV5K3-21

100

Weightp. 21 Internal Circuits and Wiring Examplesp. 22 Exhaust Characteristics/Flow Rate Characteristicsp. 23 Time to Reach Vacuum/Break Flow Rate Characteristics/Vacuum Breaking Time p. 24 Constructionp. 25 How to Order Replacement Partsp. 26 Dimensionsp. 27 Specific Product Precautionsp. 31 Safety Instructions Back cover 6 Multistage Ejector Max. suction flow rate: 100 L/min (ANR) Only

CRQ2

3 Steel wire Round head Phillips screw Nickel plated 20, 30, 40 Replacement Parts Part no. 10 15 20 30 40 Description Description Seal kit P473010-1 P473020-1 P473030-1 P473040-1 P473050-1 19, 20, 21, 23 11-8-4 5 Series CRQ2 Compact Rotary Actuator Rack & Pinion Style Construction With auto switch Size 10/15 With auto switch Size 20/30/40 !3 !0 !3 !0 CRB2 CRBU2 CRB1 MSU !4 !7 !1 !9 !

NCA1

21 Series NCA1 Rod Boot Rod Boot Material Material Nylon Neoprene Max. temperature 140F (60C) 230F (110C) Suffix for option J K Max. temperature is for boot only.

CUJ

-X Centering can be done easily. 13 18 + Stroke 33 20Tolerance h9 8 Rod cover Data CDUJB8-15D 21 13.5 18 + Stroke 38 Compliant for clean room Clean Series 10 CDUJB10-20D 1011-Series CUJ 22 Two auto switches can be installed even for 4 mm strokes. CU Length is shortened by approx. 64% max. Volume is reduced by approx. 70% max.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

For more information, please refer to page 8-16-21. Note 2) With 25, piping screws can be selected by the customer. (Refer to How to Order.)

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

They should be used only to provide support. q l 50 m 40 (450) 30 MY2C40 l l 20 (380) MY2C25 MY2C16 w 10 0 2000 1000 mm 1500 500 Support spacing l 8-13-20 21 Mechanically Jointed Rodless Cylinder High Precision Guide Type Series MY2H/2HT 16, 25, 40 How to Order MX MTS H MY2 G 16 300 L M9N MY Number of auto switches CY Guide type 2 pcs. 1 pc. n pcs.

Residual Pressure Release Valve

L1 Q B A D 8 4.2 Applicable tubing W (mm) M M L2 L2 Applicable tubing Weight (g) Model Applicable tubing O.D. 6 8 10 12 D L1 L2 Q W M KEB06 KEB08 KEB10 KEB12 12.8 15.2 18.5 20.9 25 27 27.7 29 21 23 26.5 28.5 5.3 6 6.8 7.5 13 15.4 18.7 21.1 17 18.5 21 22 13 17 24 31 With One-touch fitting with a push button guard Rc thread with a push button guard Rc thread with a push button guard: KEC D

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 8 15.3 21.1 25.5 15.8 22.3 26.7 23.5 27.9 29.4 30.8 32 36.2 8 10 14 8 10 14 12 14 4 10 19 6 12 20 13 21 26 36 38 65 D1 4 17 4 4 10.4 19.7 L2 A D2 10 H 8 Connection threads 6 18.5 10 10 12.8 21.8 (R) 10 (R) Applicable tubing 8 15.2 20.5 26 18 12 25.3 M L1 10 18.5 23 41 29 28.4 17 17 12 20.9 24 58 46 30.4 D1 22 Reference dimension for R threads after

IP80-OM00019

O 21 5. ( 3-1-2 ) 6. () ( 7-2) 22 11 11-1 OUT1OUT2 (1920) 6 90cm3 07 P36801080 P565010-18 180cm3 1 P36801081 P565010-19 O P5 19 20 (1) O (2) A (P22401123) 11-2 IP8100 IP8100 7 M P368010-24 S P368010-25 21 M 22 S M IP610 SIP610 23 11-3 IP8000 IP8000 8 1085mm P368010-20 35100mm P368010-21 50140mm P368010-22 11-4 (IP8*00-**0)2 9 (A) P368010-26 79 (B) P368010-27 911 G1/2 23 24

CEx-OMQ0013

No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

LEKF-OMZ0035

When a surge-generating load, such as a relay or solenoid valve, is driven directly, use a product that incorporates a surge absorption element. -21- 18. The power supplies should be separated between the controller power and the I/O signal power, and both power supplies must not be of the inrush-current limited type.

JXCx-OMT0034CN

6.1 . 21 1 - 6.2 . 21 6.3 . 22 . 23 7.CN3 . 24 8.CN1IF (CONT) . 25 8.1 . 25 8.2 . 27 9.CN2TB/PC . 28 9.1 . 28 10.LED . 29 10.1 LED . 29 10.2 IF LED . 29 11. . 30 11.1 . 30 11.2 . 30 11.3 . 30 11.4 . 32 12. . 33 12.1 . 33 12.1.1 . 39 12.2 IF ( ) . 40 12.3 (IO ) . 41 12.4 . 43 13.

MHF2

1 21 1 Finger opening port M5 x 0.8 +0.1 0 2-5.5 Close: 0 E-E Open: 241 Use the attached hexagon socket head screws for mounting holes. 8-M3 x 0.5 thread depth 4 4-M4 x 0.7 thread depth 5 Mounting thread 44 Attachment mounting thread Auto Switch Mounting Groove Dimensions M3 x 0.5 5 1.7 15 33 4 20 Accessory option: Hexagon socket head screw (special screws) 3.3 3 2-2.5H9 +0.025 0 depth

MHZ

DM3 x 0.5 (Finger closing port) 20M3 x 0.5 (Finger opening port) 4-M2 x 0.4 (Thread for mounting attachment) 0 -0.05 2.6 4 2.5 5 4.3 12.1 For single action, the port on one side is a breathing hole. 12-2-21 21 Series MHZA2-6 Finger Option Side Tapped Mounting [1] 4-M2 x 0.4 Thread for mounting attachment 2 2 5 2.5 Specifications and dimensions other than the above are the same as the basic

Check Valve Series AK 1

M M AKH03-00 AKH07-00 AKH09-00 AKH11-00 AKH13-00 5/32 1/4 5/16 3/8 1/2 3 6 10 17 24 2.8 6.5 14 24 34 9.3 12 15.2 18.5 21.7 33.5 39 53.3 63.6 70.2 12.7 13.6 18.5 21 22 L Metric Size Male connector type: AKH H (Hexagon width across flats) Connection thread R Applicable tubing O.D.

MHF2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Mounting thread 4 58 4 40 68 M5 x 0.8 2-M4 x 0.7 thread depth 5 20 54 Finger closing port Mounting thread E 7.7 14.8 15 19 25 E 0 -0.1 20 2-3.4 through (Mounting hole) 21 1 21 1 Finger opening port M5 x 0.8 +0.1 0 2-5.5 Close: 0 E-E Open: 241 Use the

MHZ

DM3 x 0.5 (Finger closing port) 20M3 x 0.5 (Finger opening port) 4-M2 x 0.4 (Thread for mounting attachment) 0 -0.05 2.6 4 2.5 5 4.3 12.1 For single action, the port on one side is a breathing hole. 12-2-21 21 Series MHZA2-6 Finger Option Side Tapped Mounting [1] 4-M2 x 0.4 Thread for mounting attachment 2 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

AKH/AKB Series

Model D L M AKH04-00 AKH06-00 AKH08-00 AKH10-00 AKH12-00 3 5 10 17 25 4 6 8 10 12 2.8 6.5 14 24 34 9.3 11.6 15.2 18.5 21.7 33.5 37.1 53.3 63.6 70.2 12.7 13.5 18.5 21 22 2-Applicable tubing D Inch Size Weight g Effective area (mm) Applicable tube O.D.

3 Port Air Operated Valve Series SYJA300 1

28 29 25 27 34 18 X 21 14 1 R P 3.5 40 4 26 40.5 26 34 4 48.7 10 2-M4 x 0.7 2-4.5 54.2 55.5 (3.6) 54.2 (Mounting screw) (For mounting) 8 1 (P, A, R port) 0.8 54.5 P R 1.8 (Breathing hole) 1.8 (Breathing hole) 20 16 14.5 With filter (80 mesh) 12 With filter (80 mesh) 23 15 , 8 1 4 1 48 (P, A, R port) 5-4-8